A
AthlonXP
Unregistered / Unconfirmed
GUEST, unregistred user!
{大侠们可以试下，用到以下控件
BitBtn1: TBitBtn;
BitBtn2: TBitBtn;
BitBtn3: TBitBtn;
OpenDialog1: TOpenDialog;
SaveDialog1: TSaveDialog;}
unit Unit1;
interface
uses
Windows, Messages, SysUtils, Variants, Classes, Graphics, Controls, Forms,
Dialogs, StdCtrls, Buttons, ComCtrls;
type
TForm1 = class(TForm)
BitBtn1: TBitBtn;
BitBtn2: TBitBtn;
BitBtn3: TBitBtn;
OpenDialog1: TOpenDialog;
SaveDialog1: TSaveDialog;
RichEdit1: TRichEdit;
Edit1: TEdit;
procedure BitBtn1Click(Sender: TObject);
private
{ Private declarations }
public
{ Public declarations }
end;
type //定义这个记录是用来存放数据的。
Tsticmp = record
DateTime:array[0..1] of string[25];
Filmname:array[0..1] of String[10];
Stagegroup:array[0..1] of String[15];
LotID:array[0..1] of String[15];
WaferID:array[0..1] of String[10];
Data:array[0..5] of array[0..10] of String[10];
Statistical:array[0..6] of array[0..3] of String[10]
end;
Type// 这个类用于子过程中，没有问题。
ArrayOfString=Array of string;
var
Form1: TForm1;
implementation
{$R *.dfm}
Var
StiCmpArr: array of Tsticmp;//定义 一个记录的数组，用来放数据。
//这个子过程是用来把一个字符串分成多个字符串，放入一个数组中。
procedure splitstr(SourceStr,SepChar:String;VAR result:Arrayofstring);
var
TempStr:String;
begin
result:=nil;
TempStr:=SourceStr;
if TempStr[Length(TempStr)]=SePchar then
begin
while pos(SepChar,Tempstr)>0 do
begin
setlength(Result,Length(result)+1);
Result[Length(Result)-1]:=copy(TempStr,1,Pos(SepChar,TempStr)-1);
delete(TempStr,1,pos(SepChar,TempStr));
end;
end
else
begin
while pos(SepChar,Tempstr)>0 do
begin
setlength(Result,Length(result)+1);
Result[Length(Result)-1]:=copy(TempStr,1,Pos(SepChar,TempStr)-1);
delete(TempStr,1,pos(SepChar,TempStr));
end;
setlength(Result,Length(result)+1);
Result[Length(result)-1]:=tempstr;
end;
end;
//主程序在这里，目的是当一个BitBtnr按下，将所有的数据录入一个数组sticmparr中去。
//出错也在这里，可知出错时i=j=5003当时数组sticmparr大小为250。
procedure TForm1.BitBtn1Click(Sender: TObject);
var
SourceFile:Tstringlist;
I:Integer;
J:Integer;
TempArr: ArrayOfString;
begin
try begin
if opendialog1.Execute then
begin
sourcefile:= Tstringlist.Create;
sourcefile.LoadFromFile(opendialog1.FileName);
I:=3;
while I< sourcefile.Count do
begin
J:=I;
setlength(sticmparr,length(sticmparr)+1);
splitstr(sourcefile.Strings[J],',',temparr);
sticmparr[length(sticmparr)-1].DateTime[0]:=temparr[0];
sticmparr[length(sticmparr)-1].DateTime[1]:=temparr[1];
//showmessage( sticmparr[length(sticmparr)-1].DateTime[0]);
//showmessage( sticmparr[length(sticmparr)-1].DateTime[1]);
I:=I+20;
end;
end;
edit1.Text:= sticmparr[length(sticmparr)-1].DateTime[0];
end;
except
showmessage(inttostr(I));
showmessage(inttostr(j));
end;
end;
end.
数据如下：：：：大家记得在copy去TXT文件的时候前面要留两个空行。并且只有数据大于5000行的时候才有问题。
Date/Time:,13-Oct-05 11:28:36 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W25
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4770.56,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,4883.26,0.9990,51.110,-42.389,10.244,28.172,-3,4,2
,3,4808.56,0.9985,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4694.20,0.9989,-51.215,70.612,10.244,28.172,1,-1,4
,5,4600.35,0.9992,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4883.2613, 0.9993
Min,, 4600.3457, 0.9985
Range,, 282.9157, 0.0007
Mean,, 4751.3855, 0.9990
StdD,, 108.5257, 0.0003
%StdD,, 2.2841, 0.0293
%NonU,, 2.9772, 0.0355
Date/Time:,13-Oct-05 11:24:19 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W20
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4658.68,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4826.41,0.9993,51.110,-42.389,10.244,28.172,-3,4,2
,3,4881.67,0.9989,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4706.02,0.9991,-51.215,70.612,10.244,28.172,1,-1,4
,5,4588.71,0.9989,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4881.6723, 0.9997
Min,, 4588.7102, 0.9989
Range,, 292.9621, 0.0008
Mean,, 4732.2985, 0.9992
StdD,, 120.3087, 0.0003
%StdD,, 2.5423, 0.0338
%NonU,, 3.0953, 0.0405
Date/Time:,13-Oct-05 11:19:23 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W19
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4807.63,0.9991,51.211,70.500,10.244,28.172,1,4,1
,2,4915.83,0.9993,51.110,-42.389,10.244,28.172,-3,4,2
,3,4834.66,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4720.62,0.9992,-51.215,70.612,10.244,28.172,1,-1,4
,5,4607.38,0.9987,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4915.8299, 0.9995
Min,, 4607.3786, 0.9987
Range,, 308.4513, 0.0007
Mean,, 4777.2229, 0.9992
StdD,, 117.7786, 0.0003
%StdD,, 2.4654, 0.0284
%NonU,, 3.2284, 0.0368
Date/Time:,13-Oct-05 11:14:43 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W18
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4624.90,0.9992,51.211,70.500,10.244,28.172,1,4,1
,2,4796.31,0.9991,51.110,-42.389,10.244,28.172,-3,4,2
,3,4892.49,0.9987,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4696.60,0.9982,-51.215,70.612,10.244,28.172,1,-1,4
,5,4604.36,0.9975,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4892.4880, 0.9992
Min,, 4604.3562, 0.9975
Range,, 288.1318, 0.0016
Mean,, 4722.9312, 0.9985
StdD,, 120.9314, 0.0007
%StdD,, 2.5605, 0.0679
%NonU,, 3.0503, 0.0808
Date/Time:,13-Oct-05 11:09:33 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W17
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4739.02,0.9991,51.211,70.500,10.244,28.172,1,4,1
,2,4871.23,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,4803.15,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4684.87,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,4608.01,0.9991,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4871.2298, 0.9996
Min,, 4608.0125, 0.9991
Range,, 263.2173, 0.0005
Mean,, 4741.2562, 0.9993
StdD,, 102.0573, 0.0002
%StdD,, 2.1525, 0.0214
%NonU,, 2.7758, 0.0250
Date/Time:,13-Oct-05 11:04:31 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W16
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4619.88,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4794.66,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4862.42,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4655.29,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4580.81,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4862.4181, 0.9996
Min,, 4580.8055, 0.9996
Range,, 281.6126, 0.0001
Mean,, 4702.6106, 0.9996
StdD,, 120.3437, 0.0000
%StdD,, 2.5591, 0.0029
%NonU,, 2.9942, 0.0033
Date/Time:,13-Oct-05 10:59:38 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W15
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4773.73,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4881.20,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4841.00,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4686.40,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4616.79,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4881.1967, 0.9997
Min,, 4616.7859, 0.9995
Range,, 264.4107, 0.0002
Mean,, 4759.8215, 0.9996
StdD,, 108.8179, 0.0001
%StdD,, 2.2862, 0.0059
%NonU,, 2.7775, 0.0081
Date/Time:,13-Oct-05 10:54:41 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W14
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4608.18,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4776.16,0.9993,51.110,-42.389,10.244,28.172,-3,4,2
,3,4887.00,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4710.18,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4569.51,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4887.0035, 0.9996
Min,, 4569.5104, 0.9993
Range,, 317.4931, 0.0004
Mean,, 4710.2056, 0.9995
StdD,, 128.2693, 0.0002
%StdD,, 2.7232, 0.0153
%NonU,, 3.3703, 0.0185
Date/Time:,13-Oct-05 10:49:45 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W13
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4768.71,0.9991,51.211,70.500,10.244,28.172,1,4,1
,2,4883.80,0.9993,51.110,-42.389,10.244,28.172,-3,4,2
,3,4833.00,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4719.16,0.9998,-51.215,70.612,10.244,28.172,1,-1,4
,5,4620.31,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4883.8037, 0.9998
Min,, 4620.3088, 0.9991
Range,, 263.4949, 0.0007
Mean,, 4764.9951, 0.9995
StdD,, 102.2114, 0.0003
%StdD,, 2.1450, 0.0266
%NonU,, 2.7649, 0.0330
Date/Time:,13-Oct-05 10:44:54 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W12
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4617.83,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4784.86,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4826.20,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4666.25,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4553.02,0.9982,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4826.1998, 0.9997
Min,, 4553.0184, 0.9982
Range,, 273.1814, 0.0015
Mean,, 4689.6295, 0.9993
StdD,, 114.1107, 0.0006
%StdD,, 2.4333, 0.0628
%NonU,, 2.9126, 0.0769
Date/Time:,13-Oct-05 10:39:49 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W11
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4772.76,0.9975,51.211,70.500,10.244,28.172,1,4,1
,2,4850.66,0.9984,51.110,-42.389,10.244,28.172,-3,4,2
,3,4796.04,0.9989,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4686.18,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,4573.70,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4850.6595, 0.9994
Min,, 4573.7038, 0.9975
Range,, 276.9557, 0.0020
Mean,, 4735.8693, 0.9987
StdD,, 108.3104, 0.0008
%StdD,, 2.2870, 0.0796
%NonU,, 2.9240, 0.0987
Date/Time:,13-Oct-05 10:34:52 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W10
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4666.43,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4822.40,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4881.49,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4700.18,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4584.21,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4881.4855, 0.9997
Min,, 4584.2126, 0.9993
Range,, 297.2729, 0.0004
Mean,, 4730.9412, 0.9995
StdD,, 120.0692, 0.0002
%StdD,, 2.5380, 0.0168
%NonU,, 3.1418, 0.0221
Date/Time:,13-Oct-05 10:30:03 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W9
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4733.68,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4840.05,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4782.32,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4699.85,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,4584.57,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4840.0515, 0.9997
Min,, 4584.5655, 0.9994
Range,, 255.4860, 0.0003
Mean,, 4728.0941, 0.9996
StdD,, 96.0522, 0.0001
%StdD,, 2.0315, 0.0114
%NonU,, 2.7018, 0.0137
Date/Time:,13-Oct-05 10:24:57 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W8
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4655.16,0.9989,51.211,70.500,10.244,28.172,1,4,1
,2,4774.95,0.9981,51.110,-42.389,10.244,28.172,-3,4,2
,3,4872.04,0.9987,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4670.36,0.9983,-51.215,70.612,10.244,28.172,1,-1,4
,5,4567.09,0.9986,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4872.0404, 0.9989
Min,, 4567.0873, 0.9981
Range,, 304.9531, 0.0008
Mean,, 4707.9177, 0.9985
StdD,, 117.7471, 0.0003
%StdD,, 2.5010, 0.0305
%NonU,, 3.2387, 0.0379
Date/Time:,13-Oct-05 10:20:04 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W7
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4717.82,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4811.98,0.9993,51.110,-42.389,10.244,28.172,-3,4,2
,3,4757.44,0.9990,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4625.23,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4581.58,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4811.9805, 0.9995
Min,, 4581.5759, 0.9990
Range,, 230.4045, 0.0006
Mean,, 4698.8082, 0.9993
StdD,, 94.5571, 0.0002
%StdD,, 2.0124, 0.0223
%NonU,, 2.4517, 0.0276
Date/Time:,13-Oct-05 10:15:08 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W6
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4604.53,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4729.84,0.9998,51.110,-42.389,10.244,28.172,-3,4,2
,3,4787.10,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4613.71,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4515.85,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4787.1034, 0.9998
Min,, 4515.8513, 0.9996
Range,, 271.2521, 0.0001
Mean,, 4650.2075, 0.9997
StdD,, 107.8795, 0.0000
%StdD,, 2.3199, 0.0047
%NonU,, 2.9166, 0.0058
Date/Time:,13-Oct-05 10:10:04 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W5
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4705.01,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4828.27,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,4775.65,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4711.83,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4580.61,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4828.2697, 0.9997
Min,, 4580.6149, 0.9994
Range,, 247.6548, 0.0003
Mean,, 4720.2756, 0.9996
StdD,, 92.9223, 0.0001
%StdD,, 1.9686, 0.0108
%NonU,, 2.6233, 0.0145
Date/Time:,13-Oct-05 10:05:05 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W4
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4497.54,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4650.87,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4716.46,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4553.96,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4470.65,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4716.4640, 0.9997
Min,, 4470.6504, 0.9995
Range,, 245.8136, 0.0001
Mean,, 4577.8970, 0.9996
StdD,, 103.7512, 0.0001
%StdD,, 2.2664, 0.0068
%NonU,, 2.6848, 0.0075
Date/Time:,13-Oct-05 10:00:07 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W3
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4697.66,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4784.40,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4747.10,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4649.96,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4558.07,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4784.4013, 0.9997
Min,, 4558.0658, 0.9996
Range,, 226.3356, 0.0001
Mean,, 4687.4363, 0.9996
StdD,, 88.3287, 0.0001
%StdD,, 1.8844, 0.0057
%NonU,, 2.4143, 0.0066
Date/Time:,13-Oct-05 09:54:58 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W2
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4587.77,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4740.94,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,4810.38,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4661.19,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4536.62,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4810.3845, 0.9997
Min,, 4536.6209, 0.9994
Range,, 273.7636, 0.0003
Mean,, 4667.3824, 0.9995
StdD,, 111.0589, 0.0001
%StdD,, 2.3795, 0.0124
%NonU,, 2.9327, 0.0158
Date/Time:,13-Oct-05 09:51:46 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W1
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4631.23,0.9990,51.211,70.500,10.244,28.172,1,4,1
,2,4781.04,0.9991,51.110,-42.389,10.244,28.172,-3,4,2
,3,4714.73,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4626.13,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,4511.88,0.9989,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4781.0433, 0.9994
Min,, 4511.8806, 0.9989
Range,, 269.1628, 0.0005
Mean,, 4653.0020, 0.9992
StdD,, 101.6318, 0.0002
%StdD,, 2.1842, 0.0212
%NonU,, 2.8924, 0.0258
Date/Time:,13-Oct-05 08:42:09 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W25
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4809.30,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4902.16,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,4830.06,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4747.80,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4658.03,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4902.1573, 0.9997
Min,, 4658.0323, 0.9994
Range,, 244.1250, 0.0004
Mean,, 4789.4691, 0.9996
StdD,, 91.8583, 0.0002
%StdD,, 1.9179, 0.0153
%NonU,, 2.5486, 0.0177
Date/Time:,13-Oct-05 08:37:54 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W22
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4569.58,0.9991,51.211,70.500,10.244,28.172,1,4,1
,2,4743.71,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4781.13,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4580.39,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4513.73,0.9989,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4781.1315, 0.9996
Min,, 4513.7295, 0.9989
Range,, 267.4020, 0.0007
Mean,, 4637.7092, 0.9993
StdD,, 117.3717, 0.0003
%StdD,, 2.5308, 0.0314
%NonU,, 2.8829, 0.0357
Date/Time:,13-Oct-05 08:32:50 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W21
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4817.50,0.9988,51.211,70.500,10.244,28.172,1,4,1
,2,4911.35,0.9983,51.110,-42.389,10.244,28.172,-3,4,2
,3,4860.84,0.9989,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4722.77,0.9988,-51.215,70.612,10.244,28.172,1,-1,4
,5,4693.60,0.9991,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4911.3465, 0.9991
Min,, 4693.5953, 0.9983
Range,, 217.7511, 0.0008
Mean,, 4801.2103, 0.9988
StdD,, 91.7659, 0.0003
%StdD,, 1.9113, 0.0285
%NonU,, 2.2677, 0.0382
Date/Time:,13-Oct-05 08:27:56 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W20
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4558.87,0.9989,51.211,70.500,10.244,28.172,1,4,1
,2,4743.61,0.9992,51.110,-42.389,10.244,28.172,-3,4,2
,3,4810.91,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4522.63,0.9991,-51.215,70.612,10.244,28.172,1,-1,4
,5,4545.86,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4810.9148, 0.9997
Min,, 4522.6323, 0.9989
Range,, 288.2825, 0.0008
Mean,, 4636.3770, 0.9993
StdD,, 131.4351, 0.0004
%StdD,, 2.8349, 0.0350
%NonU,, 3.1089, 0.0392
Date/Time:,13-Oct-05 08:23:00 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W19
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4754.93,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4894.12,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4789.54,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4660.19,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4608.77,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4894.1150, 0.9997
Min,, 4608.7716, 0.9996
Range,, 285.3435, 0.0001
Mean,, 4741.5088, 0.9996
StdD,, 111.8124, 0.0001
%StdD,, 2.3582, 0.0063
%NonU,, 3.0090, 0.0066
Date/Time:,13-Oct-05 08:17:55 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W18
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4587.25,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4793.51,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4839.85,0.9990,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4597.41,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4551.68,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4839.8517, 0.9997
Min,, 4551.6799, 0.9990
Range,, 288.1718, 0.0007
Mean,, 4673.9411, 0.9995
StdD,, 132.4223, 0.0003
%StdD,, 2.8332, 0.0281
%NonU,, 3.0827, 0.0341
Date/Time:,13-Oct-05 08:12:58 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W17
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4798.99,0.9998,51.211,70.500,10.244,28.172,1,4,1
,2,4904.93,0.9993,51.110,-42.389,10.244,28.172,-3,4,2
,3,4801.94,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4701.79,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4628.45,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4904.9312, 0.9998
Min,, 4628.4467, 0.9993
Range,, 276.4845, 0.0005
Mean,, 4767.2205, 0.9996
StdD,, 105.7332, 0.0002
%StdD,, 2.2179, 0.0187
%NonU,, 2.8998, 0.0235
Date/Time:,13-Oct-05 08:08:09 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W16
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4652.29,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4786.15,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4831.33,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4638.93,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4577.19,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4831.3346, 0.9997
Min,, 4577.1931, 0.9995
Range,, 254.1414, 0.0003
Mean,, 4697.1802, 0.9996
StdD,, 106.9088, 0.0001
%StdD,, 2.2760, 0.0114
%NonU,, 2.7053, 0.0126
Date/Time:,13-Oct-05 08:03:05 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W15
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4741.54,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,4866.04,0.9984,51.110,-42.389,10.244,28.172,-3,4,2
,3,4768.40,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4659.98,0.9990,-51.215,70.612,10.244,28.172,1,-1,4
,5,4584.77,0.9987,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4866.0427, 0.9993
Min,, 4584.7750, 0.9984
Range,, 281.2677, 0.0009
Mean,, 4724.1453, 0.9989
StdD,, 107.1645, 0.0004
%StdD,, 2.2684, 0.0382
%NonU,, 2.9769, 0.0455
Date/Time:,13-Oct-05 07:58:07 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W14
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4683.86,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4842.68,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4908.63,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4687.21,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4644.31,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4908.6349, 0.9997
Min,, 4644.3136, 0.9994
Range,, 264.3213, 0.0003
Mean,, 4753.3384, 0.9996
StdD,, 115.3116, 0.0001
%StdD,, 2.4259, 0.0125
%NonU,, 2.7804, 0.0164
Date/Time:,13-Oct-05 07:53:15 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W13
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4718.45,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4849.23,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4735.49,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4631.95,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4575.75,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4849.2289, 0.9997
Min,, 4575.7527, 0.9994
Range,, 273.4762, 0.0004
Mean,, 4702.1766, 0.9996
StdD,, 104.7778, 0.0002
%StdD,, 2.2283, 0.0154
%NonU,, 2.9080, 0.0184
Date/Time:,13-Oct-05 07:48:12 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W12
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4658.47,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4828.32,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4881.78,0.9998,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4651.18,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4612.20,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4881.7813, 0.9998
Min,, 4612.2020, 0.9996
Range,, 269.5793, 0.0001
Mean,, 4726.3917, 0.9997
StdD,, 120.2555, 0.0000
%StdD,, 2.5443, 0.0045
%NonU,, 2.8519, 0.0064
Date/Time:,13-Oct-05 07:43:17 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W11
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4809.50,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4905.22,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4799.20,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4706.62,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,4623.57,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4905.2211, 0.9996
Min,, 4623.5715, 0.9994
Range,, 281.6496, 0.0002
Mean,, 4768.8236, 0.9995
StdD,, 107.4109, 0.0001
%StdD,, 2.2524, 0.0088
%NonU,, 2.9530, 0.0110
Date/Time:,13-Oct-05 07:38:27 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W10
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4644.05,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4820.58,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4863.37,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4686.66,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4632.32,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4863.3667, 0.9997
Min,, 4632.3182, 0.9996
Range,, 231.0486, 0.0001
Mean,, 4729.3954, 0.9996
StdD,, 105.8269, 0.0001
%StdD,, 2.2376, 0.0060
%NonU,, 2.4427, 0.0072
Date/Time:,13-Oct-05 07:33:25 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W9
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4744.43,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4875.29,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4757.28,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4666.03,0.9998,-51.215,70.612,10.244,28.172,1,-1,4
,5,4612.14,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4875.2929, 0.9998
Min,, 4612.1396, 0.9996
Range,, 263.1533, 0.0001
Mean,, 4731.0354, 0.9997
StdD,, 100.0510, 0.0001
%StdD,, 2.1148, 0.0061
%NonU,, 2.7811, 0.0061
Date/Time:,13-Oct-05 07:28:28 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W8
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4677.43,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4821.21,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4886.48,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4634.33,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4602.58,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4886.4779, 0.9997
Min,, 4602.5752, 0.9996
Range,, 283.9027, 0.0002
Mean,, 4724.4036, 0.9997
StdD,, 123.2901, 0.0001
%StdD,, 2.6096, 0.0068
%NonU,, 3.0046, 0.0084
Date/Time:,13-Oct-05 07:26:53 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W25
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7067.53,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,7057.17,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,7018.28,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7051.01,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,7022.68,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7067.5312, 0.9997
Min,, 7018.2772, 0.9994
Range,, 49.2540, 0.0003
Mean,, 7043.3340, 0.9995
StdD,, 21.7375, 0.0001
%StdD,, 0.3086, 0.0101
%NonU,, 0.3497, 0.0130
Date/Time:,13-Oct-05 07:25:49 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W20
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7093.33,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,6909.00,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,6956.12,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7017.43,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,6945.17,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7093.3301, 0.9997
Min,, 6908.9984, 0.9993
Range,, 184.3317, 0.0004
Mean,, 6984.2100, 0.9995
StdD,, 72.4230, 0.0002
%StdD,, 1.0370, 0.0156
%NonU,, 1.3196, 0.0202
Date/Time:,13-Oct-05 07:24:48 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W19
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7082.29,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,7068.80,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,7024.93,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7065.44,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,7031.20,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7082.2870, 0.9996
Min,, 7024.9268, 0.9994
Range,, 57.3602, 0.0002
Mean,, 7054.5303, 0.9995
StdD,, 25.0673, 0.0001
%StdD,, 0.3553, 0.0092
%NonU,, 0.4065, 0.0119
Date/Time:,13-Oct-05 07:23:38 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W7
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4783.06,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4846.83,0.9990,51.110,-42.389,10.244,28.172,-3,4,2
,3,4740.13,0.9976,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4696.37,0.9987,-51.215,70.612,10.244,28.172,1,-1,4
,5,4603.76,0.9985,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4846.8311, 0.9995
Min,, 4603.7636, 0.9976
Range,, 243.0675, 0.0019
Mean,, 4734.0314, 0.9987
StdD,, 91.5878, 0.0007
%StdD,, 1.9347, 0.0693
%NonU,, 2.5672, 0.0941
Date/Time:,13-Oct-05 07:22:36 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W18
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7087.77,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,6903.17,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,6953.82,0.9992,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7009.45,0.9992,-51.215,70.612,10.244,28.172,1,-1,4
,5,6943.00,0.9986,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7087.7747, 0.9995
Min,, 6903.1697, 0.9986
Range,, 184.6050, 0.0009
Mean,, 6979.4408, 0.9992
StdD,, 71.4818, 0.0004
%StdD,, 1.0242, 0.0358
%NonU,, 1.3225, 0.0445
Date/Time:,13-Oct-05 07:21:34 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W17
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7076.69,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,7060.40,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,7020.21,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7057.89,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,7023.51,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7076.6901, 0.9997
Min,, 7020.2087, 0.9995
Range,, 56.4814, 0.0002
Mean,, 7047.7393, 0.9996
StdD,, 24.7307, 0.0001
%StdD,, 0.3509, 0.0077
%NonU,, 0.4007, 0.0086
Date/Time:,13-Oct-05 07:20:33 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W16
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7086.85,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,6902.47,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,6953.42,0.9989,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7005.50,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,6941.87,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7086.8479, 0.9995
Min,, 6902.4677, 0.9989
Range,, 184.3802, 0.0006
Mean,, 6978.0205, 0.9993
StdD,, 71.0966, 0.0002
%StdD,, 1.0189, 0.0240
%NonU,, 1.3211, 0.0286
Date/Time:,13-Oct-05 07:19:27 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W6
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4563.68,0.9988,51.211,70.500,10.244,28.172,1,4,1
,2,4722.39,0.9988,51.110,-42.389,10.244,28.172,-3,4,2
,3,4752.93,0.9987,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4582.22,0.9991,-51.215,70.612,10.244,28.172,1,-1,4
,5,4516.70,0.9992,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4752.9251, 0.9992
Min,, 4516.7018, 0.9987
Range,, 236.2233, 0.0005
Mean,, 4627.5830, 0.9989
StdD,, 103.8443, 0.0002
%StdD,, 2.2440, 0.0219
%NonU,, 2.5523, 0.0232
Date/Time:,13-Oct-05 07:18:16 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W15
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7076.28,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,7064.69,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,7017.07,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7055.67,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,7027.83,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7076.2811, 0.9996
Min,, 7017.0723, 0.9994
Range,, 59.2088, 0.0002
Mean,, 7048.3093, 0.9995
StdD,, 24.9992, 0.0001
%StdD,, 0.3547, 0.0072
%NonU,, 0.4200, 0.0089
Date/Time:,13-Oct-05 07:17:00 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W14
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7093.01,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,6906.98,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,6956.82,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7011.44,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6946.79,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7093.0125, 0.9996
Min,, 6906.9850, 0.9994
Range,, 186.0275, 0.0002
Mean,, 6983.0084, 0.9995
StdD,, 71.9136, 0.0001
%StdD,, 1.0298, 0.0106
%NonU,, 1.3320, 0.0100
Date/Time:,13-Oct-05 07:15:58 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W13
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7077.85,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,7067.42,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,7024.72,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7066.62,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,7029.37,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7077.8525, 0.9996
Min,, 7024.7209, 0.9994
Range,, 53.1317, 0.0002
Mean,, 7053.1977, 0.9995
StdD,, 24.3355, 0.0001
%StdD,, 0.3450, 0.0069
%NonU,, 0.3766, 0.0091
Date/Time:,13-Oct-05 07:14:56 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W12
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7081.81,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,6902.38,0.9990,51.110,-42.389,10.244,28.172,-3,4,2
,3,6950.44,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7006.19,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,6937.69,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7081.8112, 0.9994
Min,, 6902.3753, 0.9990
Range,, 179.4359, 0.0004
Mean,, 6975.7032, 0.9993
StdD,, 70.0863, 0.0002
%StdD,, 1.0047, 0.0168
%NonU,, 1.2861, 0.0211
Date/Time:,13-Oct-05 07:13:49 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W5
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4778.39,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4877.07,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4746.06,0.9998,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4626.35,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4594.78,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4877.0665, 0.9998
Min,, 4594.7841, 0.9995
Range,, 282.2824, 0.0003
Mean,, 4724.5295, 0.9996
StdD,, 115.2215, 0.0001
%StdD,, 2.4388, 0.0120
%NonU,, 2.9874, 0.0165
Date/Time:,13-Oct-05 07:12:28 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W11
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7065.36,0.9991,51.211,70.500,10.244,28.172,1,4,1
,2,7058.20,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,7017.53,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7053.44,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,7022.34,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7065.3555, 0.9996
Min,, 7017.5333, 0.9991
Range,, 47.8222, 0.0005
Mean,, 7043.3732, 0.9995
StdD,, 21.8772, 0.0002
%StdD,, 0.3106, 0.0192
%NonU,, 0.3395, 0.0241
Date/Time:,13-Oct-05 07:11:25 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W10
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7098.99,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,6916.89,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,6967.29,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7016.42,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,6953.02,0.9992,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7098.9945, 0.9996
Min,, 6916.8892, 0.9992
Range,, 182.1053, 0.0003
Mean,, 6990.5214, 0.9994
StdD,, 70.3650, 0.0001
%StdD,, 1.0066, 0.0130
%NonU,, 1.3025, 0.0155
Date/Time:,13-Oct-05 07:10:24 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W9
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7069.30,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,7061.25,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,7017.94,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7050.96,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,7025.93,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7069.3029, 0.9996
Min,, 7017.9373, 0.9995
Range,, 51.3656, 0.0002
Mean,, 7045.0759, 0.9995
StdD,, 22.2849, 0.0001
%StdD,, 0.3163, 0.0072
%NonU,, 0.3645, 0.0094
Date/Time:,13-Oct-05 07:09:17 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W4
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4556.52,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4744.27,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4770.69,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4549.05,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4515.83,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4770.6936, 0.9995
Min,, 4515.8277, 0.9995
Range,, 254.8659, 0.0001
Mean,, 4627.2724, 0.9995
StdD,, 120.2102, 0.0000
%StdD,, 2.5979, 0.0028
%NonU,, 2.7540, 0.0035
Date/Time:,13-Oct-05 07:07:43 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W8
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7099.94,0.9992,51.211,70.500,10.244,28.172,1,4,1
,2,6920.31,0.9993,51.110,-42.389,10.244,28.172,-3,4,2
,3,6969.26,0.9990,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7019.69,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,6956.99,0.9985,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7099.9394, 0.9993
Min,, 6920.3083, 0.9985
Range,, 179.6311, 0.0008
Mean,, 6993.2370, 0.9991
StdD,, 69.4484, 0.0003
%StdD,, 0.9931, 0.0335
%NonU,, 1.2843, 0.0412
Date/Time:,13-Oct-05 07:06:41 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W7
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7069.40,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,7056.75,0.9993,51.110,-42.389,10.244,28.172,-3,4,2
,3,7019.87,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7055.26,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,7023.27,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7069.4032, 0.9995
Min,, 7019.8735, 0.9993
Range,, 49.5298, 0.0002
Mean,, 7044.9111, 0.9993
StdD,, 22.0374, 0.0001
%StdD,, 0.3128, 0.0091
%NonU,, 0.3515, 0.0112
Date/Time:,13-Oct-05 07:05:39 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W6
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7087.69,0.9990,51.211,70.500,10.244,28.172,1,4,1
,2,6908.52,0.9992,51.110,-42.389,10.244,28.172,-3,4,2
,3,6953.36,0.9990,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7010.09,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,6947.68,0.9991,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7087.6874, 0.9995
Min,, 6908.5234, 0.9990
Range,, 179.1639, 0.0005
Mean,, 6981.4671, 0.9992
StdD,, 69.5595, 0.0002
%StdD,, 0.9963, 0.0206
%NonU,, 1.2831, 0.0268
Date/Time:,13-Oct-05 07:04:38 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W5
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7070.62,0.9989,51.211,70.500,10.244,28.172,1,4,1
,2,7059.13,0.9987,51.110,-42.389,10.244,28.172,-3,4,2
,3,7017.54,0.9989,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7049.72,0.9988,-51.215,70.612,10.244,28.172,1,-1,4
,5,7025.47,0.9989,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7070.6155, 0.9989
Min,, 7017.5404, 0.9987
Range,, 53.0751, 0.0002
Mean,, 7044.4954, 0.9989
StdD,, 22.4290, 0.0001
%StdD,, 0.3184, 0.0089
%NonU,, 0.3767, 0.0098
Date/Time:,13-Oct-05 07:03:32 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W3
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4736.72,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4845.42,0.9993,51.110,-42.389,10.244,28.172,-3,4,2
,3,4739.71,0.9984,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4574.32,0.9992,-51.215,70.612,10.244,28.172,1,-1,4
,5,4605.86,0.9991,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4845.4233, 0.9996
Min,, 4574.3200, 0.9984
Range,, 271.1033, 0.0012
Mean,, 4700.4070, 0.9991
StdD,, 110.3746, 0.0005
%StdD,, 2.3482, 0.0459
%NonU,, 2.8838, 0.0624
Date/Time:,13-Oct-05 07:02:24 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W4
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7104.62,0.9984,51.211,70.500,10.244,28.172,1,4,1
,2,6916.18,0.9988,51.110,-42.389,10.244,28.172,-3,4,2
,3,6966.92,0.9988,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7025.98,0.9989,-51.215,70.612,10.244,28.172,1,-1,4
,5,6955.22,0.9987,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7104.6172, 0.9989
Min,, 6916.1792, 0.9984
Range,, 188.4380, 0.0005
Mean,, 6993.7848, 0.9987
StdD,, 73.4025, 0.0002
%StdD,, 1.0495, 0.0179
%NonU,, 1.3472, 0.0234
Date/Time:,13-Oct-05 07:01:22 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W3
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7059.23,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,7047.00,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,7012.05,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7046.24,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,7015.48,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7059.2346, 0.9996
Min,, 7012.0488, 0.9994
Range,, 47.1858, 0.0003
Mean,, 7036.0012, 0.9995
StdD,, 20.9786, 0.0001
%StdD,, 0.2982, 0.0097
%NonU,, 0.3353, 0.0131
Date/Time:,13-Oct-05 07:00:21 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W2
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7091.31,0.9992,51.211,70.500,10.244,28.172,1,4,1
,2,6906.60,0.9991,51.110,-42.389,10.244,28.172,-3,4,2
,3,6961.56,0.9990,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7014.44,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,6946.72,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7091.3081, 0.9995
Min,, 6906.5991, 0.9990
Range,, 184.7090, 0.0005
Mean,, 6984.1243, 0.9993
StdD,, 71.2843, 0.0002
%StdD,, 1.0207, 0.0216
%NonU,, 1.3223, 0.0258
Date/Time:,13-Oct-05 06:59:13 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W2
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4705.70,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4792.48,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4859.84,0.9989,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4661.75,0.9992,-51.215,70.612,10.244,28.172,1,-1,4
,5,4603.15,0.9981,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4859.8420, 0.9996
Min,, 4603.1545, 0.9981
Range,, 256.6875, 0.0015
Mean,, 4724.5855, 0.9990
StdD,, 102.4129, 0.0006
%StdD,, 2.1677, 0.0609
%NonU,, 2.7165, 0.0767
Date/Time:,13-Oct-05 06:57:48 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W1
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7079.54,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,7066.88,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,7021.76,0.9992,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7063.35,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,7033.87,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7079.5411, 0.9996
Min,, 7021.7645, 0.9992
Range,, 57.7765, 0.0004
Mean,, 7053.0822, 0.9994
StdD,, 24.2171, 0.0001
%StdD,, 0.3434, 0.0140
%NonU,, 0.4096, 0.0180
Date/Time:,13-Oct-05 06:53:56 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W1
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4714.59,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4789.89,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4682.76,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4601.38,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4556.42,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4789.8860, 0.9997
Min,, 4556.4181, 0.9993
Range,, 233.4678, 0.0004
Mean,, 4669.0067, 0.9995
StdD,, 92.3688, 0.0002
%StdD,, 1.9783, 0.0150
%NonU,, 2.5002, 0.0185
Date/Time:,13-Oct-05 06:15:52 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W25
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7082.13,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,7076.81,0.9991,51.110,-42.389,10.244,28.172,-3,4,2
,3,7033.73,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7063.57,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,7037.46,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7082.1308, 0.9996
Min,, 7033.7312, 0.9991
Range,, 48.3996, 0.0006
Mean,, 7058.7410, 0.9995
StdD,, 22.2211, 0.0002
%StdD,, 0.3148, 0.0226
%NonU,, 0.3428, 0.0282
Date/Time:,13-Oct-05 06:14:48 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W22
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7133.56,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,6954.00,0.9992,51.110,-42.389,10.244,28.172,-3,4,2
,3,7001.95,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7050.18,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,6985.59,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7133.5585, 0.9996
Min,, 6954.0040, 0.9992
Range,, 179.5545, 0.0004
Mean,, 7025.0561, 0.9994
StdD,, 69.9003, 0.0001
%StdD,, 0.9950, 0.0143
%NonU,, 1.2780, 0.0177
Date/Time:,13-Oct-05 06:09:25 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W21
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7073.89,0.9991,51.211,70.500,10.244,28.172,1,4,1
,2,7065.98,0.9990,51.110,-42.389,10.244,28.172,-3,4,2
,3,7026.25,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7056.19,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,7028.54,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7073.8922, 0.9995
Min,, 7026.2457, 0.9990
Range,, 47.6466, 0.0005
Mean,, 7050.1703, 0.9993
StdD,, 21.7312, 0.0002
%StdD,, 0.3082, 0.0230
%NonU,, 0.3379, 0.0246
Date/Time:,13-Oct-05 06:08:22 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W20
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7132.09,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,6946.87,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,6999.37,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7046.71,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,6982.22,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7132.0923, 0.9996
Min,, 6946.8687, 0.9993
Range,, 185.2235, 0.0003
Mean,, 7021.4516, 0.9995
StdD,, 71.5339, 0.0001
%StdD,, 1.0188, 0.0130
%NonU,, 1.3190, 0.0155
Date/Time:,13-Oct-05 06:07:17 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W19
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7079.22,0.9991,51.211,70.500,10.244,28.172,1,4,1
,2,7069.64,0.9989,51.110,-42.389,10.244,28.172,-3,4,2
,3,7028.66,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7060.14,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,7033.90,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7079.2247, 0.9994
Min,, 7028.6621, 0.9989
Range,, 50.5627, 0.0005
Mean,, 7054.3129, 0.9992
StdD,, 22.1600, 0.0002
%StdD,, 0.3141, 0.0229
%NonU,, 0.3584, 0.0274
Date/Time:,13-Oct-05 06:02:03 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W18
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7135.80,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,6949.35,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,7000.11,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7052.71,0.9992,-51.215,70.612,10.244,28.172,1,-1,4
,5,6983.66,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7135.8040, 0.9996
Min,, 6949.3546, 0.9992
Range,, 186.4494, 0.0004
Mean,, 7024.3280, 0.9995
StdD,, 72.6193, 0.0002
%StdD,, 1.0338, 0.0172
%NonU,, 1.3272, 0.0207
Date/Time:,13-Oct-05 06:00:59 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W17
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7076.06,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,7069.31,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,7028.00,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7064.48,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,7031.63,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7076.0607, 0.9997
Min,, 7027.9978, 0.9995
Range,, 48.0630, 0.0002
Mean,, 7053.8961, 0.9996
StdD,, 22.4010, 0.0001
%StdD,, 0.3176, 0.0073
%NonU,, 0.3407, 0.0092
Date/Time:,13-Oct-05 05:59:52 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W16
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7145.53,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,6963.27,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,7016.59,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7066.93,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,6994.92,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7145.5350, 0.9996
Min,, 6963.2677, 0.9994
Range,, 182.2672, 0.0002
Mean,, 7037.4485, 0.9995
StdD,, 71.2367, 0.0001
%StdD,, 1.0123, 0.0069
%NonU,, 1.2950, 0.0094
Date/Time:,13-Oct-05 05:54:24 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W15
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7080.29,0.9991,51.211,70.500,10.244,28.172,1,4,1
,2,7075.90,0.9990,51.110,-42.389,10.244,28.172,-3,4,2
,3,7033.78,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7061.89,0.9990,-51.215,70.612,10.244,28.172,1,-1,4
,5,7033.48,0.9992,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7080.2885, 0.9993
Min,, 7033.4811, 0.9990
Range,, 46.8074, 0.0004
Mean,, 7057.0691, 0.9991
StdD,, 22.4483, 0.0002
%StdD,, 0.3181, 0.0157
%NonU,, 0.3316, 0.0186
Date/Time:,13-Oct-05 05:53:20 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W14
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7137.93,0.9990,51.211,70.500,10.244,28.172,1,4,1
,2,6961.63,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,7009.92,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7061.83,0.9992,-51.215,70.612,10.244,28.172,1,-1,4
,5,6994.99,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7137.9343, 0.9994
Min,, 6961.6326, 0.9990
Range,, 176.3018, 0.0004
Mean,, 7033.2619, 0.9993
StdD,, 68.7608, 0.0001
%StdD,, 0.9777, 0.0149
%NonU,, 1.2533, 0.0180
Date/Time:,13-Oct-05 05:52:16 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W13
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7077.66,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,7071.19,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,7024.13,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7058.73,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,7028.32,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7077.6572, 0.9996
Min,, 7024.1326, 0.9995
Range,, 53.5246, 0.0001
Mean,, 7052.0056, 0.9995
StdD,, 24.5405, 0.0000
%StdD,, 0.3480, 0.0038
%NonU,, 0.3795, 0.0048
Date/Time:,13-Oct-05 05:51:10 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W12
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7134.45,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,6947.90,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,7000.38,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7047.16,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6983.19,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7134.4454, 0.9996
Min,, 6947.9033, 0.9994
Range,, 186.5421, 0.0002
Mean,, 7022.6166, 0.9995
StdD,, 72.0051, 0.0001
%StdD,, 1.0253, 0.0067
%NonU,, 1.3282, 0.0078
Date/Time:,13-Oct-05 05:48:58 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W11
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7085.46,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,7074.07,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,7033.39,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7061.82,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,7038.35,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7085.4594, 0.9996
Min,, 7033.3941, 0.9993
Range,, 52.0653, 0.0003
Mean,, 7058.6190, 0.9995
StdD,, 22.4546, 0.0001
%StdD,, 0.3181, 0.0113
%NonU,, 0.3688, 0.0153
Date/Time:,13-Oct-05 05:46:02 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W10
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7140.15,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,6959.85,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,7010.01,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7055.23,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6995.14,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7140.1457, 0.9996
Min,, 6959.8478, 0.9995
Range,, 180.2978, 0.0001
Mean,, 7032.0748, 0.9996
StdD,, 69.4328, 0.0000
%StdD,, 0.9874, 0.0040
%NonU,, 1.2820, 0.0055
Date/Time:,13-Oct-05 05:44:58 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W9
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7088.60,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,7078.74,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,7034.48,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7065.98,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,7037.79,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7088.6006, 0.9995
Min,, 7034.4751, 0.9993
Range,, 54.1254, 0.0002
Mean,, 7061.1168, 0.9994
StdD,, 24.2055, 0.0001
%StdD,, 0.3428, 0.0074
%NonU,, 0.3833, 0.0090
Date/Time:,13-Oct-05 05:43:54 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W8
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7135.22,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,6952.50,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,7003.37,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7048.71,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6986.04,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7135.2178, 0.9996
Min,, 6952.4989, 0.9994
Range,, 182.7189, 0.0002
Mean,, 7025.1670, 0.9996
StdD,, 70.6259, 0.0001
%StdD,, 1.0053, 0.0100
%NonU,, 1.3005, 0.0106
Date/Time:,13-Oct-05 05:42:40 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W7
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7087.01,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,7077.44,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,7031.03,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7071.12,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,7038.30,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7087.0106, 0.9996
Min,, 7031.0327, 0.9993
Range,, 55.9779, 0.0003
Mean,, 7060.9801, 0.9994
StdD,, 24.8121, 0.0001
%StdD,, 0.3514, 0.0126
%NonU,, 0.3964, 0.0151
Date/Time:,13-Oct-05 05:41:20 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W6
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7152.37,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,6961.78,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,7014.22,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7067.04,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6995.29,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7152.3708, 0.9996
Min,, 6961.7790, 0.9994
Range,, 190.5918, 0.0002
Mean,, 7038.1404, 0.9995
StdD,, 74.3690, 0.0001
%StdD,, 1.0567, 0.0091
%NonU,, 1.3540, 0.0111
Date/Time:,13-Oct-05 05:39:59 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W5
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7079.38,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,7062.03,0.9993,51.110,-42.389,10.244,28.172,-3,4,2
,3,7020.83,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7054.86,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,7020.05,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7079.3754, 0.9995
Min,, 7020.0541, 0.9993
Range,, 59.3214, 0.0002
Mean,, 7047.4285, 0.9994
StdD,, 26.2012, 0.0001
%StdD,, 0.3718, 0.0094
%NonU,, 0.4209, 0.0121
Date/Time:,13-Oct-05 05:38:50 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W4
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7135.75,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,6955.22,0.9989,51.110,-42.389,10.244,28.172,-3,4,2
,3,7001.92,0.9992,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7053.17,0.9983,-51.215,70.612,10.244,28.172,1,-1,4
,5,6986.00,0.9990,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7135.7545, 0.9995
Min,, 6955.2176, 0.9983
Range,, 180.5370, 0.0012
Mean,, 7026.4119, 0.9990
StdD,, 70.6635, 0.0004
%StdD,, 1.0057, 0.0439
%NonU,, 1.2847, 0.0580
Date/Time:,13-Oct-05 05:37:38 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W3
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7040.41,0.9985,51.211,70.500,10.244,28.172,1,4,1
,2,7022.25,0.9987,51.110,-42.389,10.244,28.172,-3,4,2
,3,6985.33,0.9988,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7022.29,0.9980,-51.215,70.612,10.244,28.172,1,-1,4
,5,6979.25,0.9990,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7040.4109, 0.9990
Min,, 6979.2542, 0.9980
Range,, 61.1568, 0.0011
Mean,, 7009.9063, 0.9986
StdD,, 26.3613, 0.0004
%StdD,, 0.3761, 0.0404
%NonU,, 0.4362, 0.0536
Date/Time:,13-Oct-05 05:36:16 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W2
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7121.33,0.9991,51.211,70.500,10.244,28.172,1,4,1
,2,6945.54,0.9992,51.110,-42.389,10.244,28.172,-3,4,2
,3,6998.81,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7050.57,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,6976.78,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7121.3283, 0.9996
Min,, 6945.5410, 0.9991
Range,, 175.7873, 0.0004
Mean,, 7018.6058, 0.9993
StdD,, 69.0164, 0.0002
%StdD,, 0.9833, 0.0184
%NonU,, 1.2523, 0.0216
Date/Time:,13-Oct-05 05:35:11 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W1
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,6919.51,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,6840.77,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,6806.40,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,6892.63,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,6777.13,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 6919.5114, 0.9996
Min,, 6777.1286, 0.9993
Range,, 142.3828, 0.0002
Mean,, 6847.2860, 0.9994
StdD,, 58.9681, 0.0001
%StdD,, 0.8612, 0.0092
%NonU,, 1.0397, 0.0119
Date/Time:,13-Oct-05 05:22:08 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W17
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4498.73,0.9988,51.211,70.500,10.244,28.172,1,4,1
,2,4568.08,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,4509.45,0.9991,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4380.76,0.9989,-51.215,70.612,10.244,28.172,1,-1,4
,5,4311.30,0.9992,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4568.0778, 0.9994
Min,, 4311.2965, 0.9988
Range,, 256.7813, 0.0006
Mean,, 4453.6634, 0.9991
StdD,, 104.6626, 0.0002
%StdD,, 2.3500, 0.0242
%NonU,, 2.8828, 0.0285
Date/Time:,13-Oct-05 05:20:00 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W15
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4454.32,0.9988,51.211,70.500,10.244,28.172,1,4,1
,2,4583.04,0.9992,51.110,-42.389,10.244,28.172,-3,4,2
,3,4497.22,0.9990,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4389.17,0.9987,-51.215,70.612,10.244,28.172,1,-1,4
,5,4320.70,0.9989,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4583.0402, 0.9992
Min,, 4320.6959, 0.9987
Range,, 262.3442, 0.0005
Mean,, 4448.8883, 0.9989
StdD,, 100.4499, 0.0002
%StdD,, 2.2579, 0.0205
%NonU,, 2.9484, 0.0265
Date/Time:,13-Oct-05 05:17:52 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W8
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4372.59,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,4571.57,0.9992,51.110,-42.389,10.244,28.172,-3,4,2
,3,4598.53,0.9988,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4370.86,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,4344.58,0.9988,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4598.5291, 0.9993
Min,, 4344.5783, 0.9988
Range,, 253.9508, 0.0005
Mean,, 4451.6243, 0.9991
StdD,, 122.6752, 0.0003
%StdD,, 2.7557, 0.0268
%NonU,, 2.8523, 0.0274
Date/Time:,13-Oct-05 05:06:44 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W17
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4612.34,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4699.45,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,4639.37,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4498.55,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4446.07,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4699.4491, 0.9996
Min,, 4446.0687, 0.9993
Range,, 253.3803, 0.0003
Mean,, 4579.1543, 0.9994
StdD,, 104.1707, 0.0001
%StdD,, 2.2749, 0.0116
%NonU,, 2.7667, 0.0145
Date/Time:,13-Oct-05 05:05:38 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W15
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4552.64,0.9992,51.211,70.500,10.244,28.172,1,4,1
,2,4680.87,0.9992,51.110,-42.389,10.244,28.172,-3,4,2
,3,4587.76,0.9992,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4477.65,0.9990,-51.215,70.612,10.244,28.172,1,-1,4
,5,4420.20,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4680.8700, 0.9993
Min,, 4420.1957, 0.9990
Range,, 260.6743, 0.0002
Mean,, 4543.8242, 0.9992
StdD,, 100.5651, 0.0001
%StdD,, 2.2132, 0.0096
%NonU,, 2.8684, 0.0124
Date/Time:,13-Oct-05 05:04:31 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W8
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7086.67,0.9992,51.211,70.500,10.244,28.172,1,4,1
,2,6903.58,0.9992,51.110,-42.389,10.244,28.172,-3,4,2
,3,6953.25,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,6998.98,0.9992,-51.215,70.612,10.244,28.172,1,-1,4
,5,6940.08,0.9992,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7086.6670, 0.9993
Min,, 6903.5766, 0.9992
Range,, 183.0904, 0.0001
Mean,, 6976.5114, 0.9992
StdD,, 70.4042, 0.0001
%StdD,, 1.0092, 0.0053
%NonU,, 1.3122, 0.0065
Date/Time:,13-Oct-05 05:03:15 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W13
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4812.63,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,4926.41,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4884.89,0.9990,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4705.48,0.9990,-51.215,70.612,10.244,28.172,1,-1,4
,5,4694.85,0.9988,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4926.4091, 0.9996
Min,, 4694.8522, 0.9988
Range,, 231.5569, 0.0008
Mean,, 4804.8543, 0.9992
StdD,, 103.9435, 0.0003
%StdD,, 2.1633, 0.0328
%NonU,, 2.4096, 0.0401
Date/Time:,13-Oct-05 05:00:06 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W25
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4626.36,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4753.22,0.9988,51.110,-42.389,10.244,28.172,-3,4,2
,3,4661.45,0.9979,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4570.59,0.9986,-51.215,70.612,10.244,28.172,1,-1,4
,5,4537.66,0.9991,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4753.2151, 0.9995
Min,, 4537.6602, 0.9979
Range,, 215.5550, 0.0016
Mean,, 4629.8533, 0.9988
StdD,, 84.0248, 0.0006
%StdD,, 1.8148, 0.0593
%NonU,, 2.3279, 0.0789
Date/Time:,13-Oct-05 04:56:47 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W24
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4525.53,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4608.12,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,4507.19,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4421.31,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4341.56,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4608.1210, 0.9997
Min,, 4341.5593, 0.9993
Range,, 266.5617, 0.0004
Mean,, 4480.7427, 0.9995
StdD,, 102.2687, 0.0002
%StdD,, 2.2824, 0.0163
%NonU,, 2.9745, 0.0190
Date/Time:,13-Oct-05 04:52:29 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W17
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4614.02,0.9985,51.211,70.500,10.244,28.172,1,4,1
,2,4701.92,0.9988,51.110,-42.389,10.244,28.172,-3,4,2
,3,4640.56,0.9985,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4496.45,0.9988,-51.215,70.612,10.244,28.172,1,-1,4
,5,4445.69,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4701.9202, 0.9993
Min,, 4445.6943, 0.9985
Range,, 256.2260, 0.0008
Mean,, 4579.7269, 0.9988
StdD,, 105.7209, 0.0003
%StdD,, 2.3085, 0.0334
%NonU,, 2.7974, 0.0424
Date/Time:,13-Oct-05 04:47:12 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W15
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4552.99,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4685.96,0.9991,51.110,-42.389,10.244,28.172,-3,4,2
,3,4594.60,0.9989,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4486.26,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,4420.63,0.9986,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4685.9632, 0.9994
Min,, 4420.6336, 0.9986
Range,, 265.3296, 0.0008
Mean,, 4548.0902, 0.9990
StdD,, 101.5669, 0.0003
%StdD,, 2.2332, 0.0326
%NonU,, 2.9169, 0.0416
Date/Time:,13-Oct-05 04:44:22 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W13
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4963.45,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,5089.40,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,5030.95,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4877.47,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,4858.87,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 5089.4029, 0.9997
Min,, 4858.8695, 0.9993
Range,, 230.5334, 0.0004
Mean,, 4964.0300, 0.9996
StdD,, 98.4225, 0.0002
%StdD,, 1.9827, 0.0151
%NonU,, 2.3220, 0.0180
Date/Time:,13-Oct-05 04:40:52 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W13
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4967.27,0.9992,51.211,70.500,10.244,28.172,1,4,1
,2,5091.89,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,5035.45,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4876.51,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4860.40,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 5091.8922, 0.9997
Min,, 4860.3962, 0.9992
Range,, 231.4961, 0.0005
Mean,, 4966.3043, 0.9995
StdD,, 99.7910, 0.0002
%StdD,, 2.0094, 0.0212
%NonU,, 2.3307, 0.0257
Date/Time:,13-Oct-05 04:38:20 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W25
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4684.37,0.9989,51.211,70.500,10.244,28.172,1,4,1
,2,4813.21,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,4725.43,0.9984,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4628.58,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,4606.32,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4813.2064, 0.9995
Min,, 4606.3191, 0.9984
Range,, 206.8873, 0.0010
Mean,, 4691.5819, 0.9991
StdD,, 82.5057, 0.0004
%StdD,, 1.7586, 0.0444
%NonU,, 2.2049, 0.0525
Date/Time:,13-Oct-05 04:35:57 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W25
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4682.98,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4814.88,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4718.80,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4630.68,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4607.64,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4814.8791, 0.9996
Min,, 4607.6421, 0.9993
Range,, 207.2370, 0.0003
Mean,, 4690.9957, 0.9994
StdD,, 81.8081, 0.0001
%StdD,, 1.7439, 0.0122
%NonU,, 2.2089, 0.0156
Date/Time:,13-Oct-05 04:31:37 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W22
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4544.64,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,4720.41,0.9989,51.110,-42.389,10.244,28.172,-3,4,2
,3,4810.90,0.9990,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4595.23,0.9992,-51.215,70.612,10.244,28.172,1,-1,4
,5,4544.97,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4810.8972, 0.9994
Min,, 4544.6355, 0.9989
Range,, 266.2617, 0.0004
Mean,, 4643.2303, 0.9992
StdD,, 118.0557, 0.0002
%StdD,, 2.5425, 0.0202
%NonU,, 2.8672, 0.0213
Date/Time:,13-Oct-05 04:27:10 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W24
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7082.76,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,6905.58,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,6955.29,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7010.07,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,6945.09,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7082.7635, 0.9997
Min,, 6905.5814, 0.9994
Range,, 177.1821, 0.0003
Mean,, 6979.7565, 0.9996
StdD,, 68.6146, 0.0001
%StdD,, 0.9831, 0.0107
%NonU,, 1.2693, 0.0144
Date/Time:,13-Oct-05 04:26:00 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W21
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4659.67,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4809.24,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,4725.25,0.9991,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4563.17,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4543.35,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4809.2440, 0.9996
Min,, 4543.3468, 0.9991
Range,, 265.8972, 0.0005
Mean,, 4660.1361, 0.9994
StdD,, 111.2605, 0.0002
%StdD,, 2.3875, 0.0221
%NonU,, 2.8529, 0.0262
Date/Time:,13-Oct-05 04:24:50 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W17
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7062.80,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,7050.81,0.9992,51.110,-42.389,10.244,28.172,-3,4,2
,3,7010.17,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7045.44,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,7016.86,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7062.8016, 0.9996
Min,, 7010.1716, 0.9992
Range,, 52.6300, 0.0004
Mean,, 7037.2172, 0.9993
StdD,, 22.6527, 0.0001
%StdD,, 0.3219, 0.0150
%NonU,, 0.3739, 0.0206
Date/Time:,13-Oct-05 04:23:18 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W15
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7076.44,0.9991,51.211,70.500,10.244,28.172,1,4,1
,2,7066.34,0.9993,51.110,-42.389,10.244,28.172,-3,4,2
,3,7021.32,0.9991,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7057.83,0.9990,-51.215,70.612,10.244,28.172,1,-1,4
,5,7025.45,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7076.4428, 0.9994
Min,, 7021.3184, 0.9990
Range,, 55.1244, 0.0003
Mean,, 7049.4778, 0.9992
StdD,, 24.7567, 0.0001
%StdD,, 0.3512, 0.0145
%NonU,, 0.3910, 0.0167
Date/Time:,13-Oct-05 04:20:37 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W18
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4519.24,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4642.86,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4755.44,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4540.77,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4475.14,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4755.4355, 0.9997
Min,, 4475.1428, 0.9994
Range,, 280.2927, 0.0003
Mean,, 4586.6900, 0.9996
StdD,, 112.6180, 0.0001
%StdD,, 2.4553, 0.0111
%NonU,, 3.0555, 0.0141
Date/Time:,13-Oct-05 04:14:35 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W10
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4343.73,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4504.04,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,4591.58,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4470.83,0.9992,-51.215,70.612,10.244,28.172,1,-1,4
,5,4351.03,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4591.5836, 0.9996
Min,, 4343.7347, 0.9992
Range,, 247.8490, 0.0004
Mean,, 4452.2430, 0.9994
StdD,, 105.4311, 0.0002
%StdD,, 2.3680, 0.0154
%NonU,, 2.7834, 0.0191
Date/Time:,13-Oct-05 04:12:38 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W13
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7055.76,0.9991,51.211,70.500,10.244,28.172,1,4,1
,2,7040.43,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,6998.31,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7033.80,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,7011.11,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7055.7623, 0.9996
Min,, 6998.3146, 0.9991
Range,, 57.4477, 0.0006
Mean,, 7027.8820, 0.9995
StdD,, 23.0505, 0.0002
%StdD,, 0.3280, 0.0222
%NonU,, 0.4087, 0.0278
Date/Time:,13-Oct-05 04:09:27 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W7
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4453.42,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4539.05,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4496.91,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4339.08,0.9990,-51.215,70.612,10.244,28.172,1,-1,4
,5,4283.47,0.9991,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4539.0512, 0.9997
Min,, 4283.4684, 0.9990
Range,, 255.5827, 0.0007
Mean,, 4422.3862, 0.9994
StdD,, 107.6622, 0.0003
%StdD,, 2.4345, 0.0310
%NonU,, 2.8896, 0.0351
Date/Time:,13-Oct-05 04:07:18 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W1
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4439.06,0.9992,51.211,70.500,10.244,28.172,1,4,1
,2,4553.70,0.9991,51.110,-42.389,10.244,28.172,-3,4,2
,3,4450.76,0.9987,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4356.63,0.9991,-51.215,70.612,10.244,28.172,1,-1,4
,5,4283.57,0.9991,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4553.6996, 0.9992
Min,, 4283.5750, 0.9987
Range,, 270.1246, 0.0005
Mean,, 4416.7458, 0.9990
StdD,, 102.1753, 0.0002
%StdD,, 2.3134, 0.0215
%NonU,, 3.0580, 0.0269
Date/Time:,13-Oct-05 04:06:08 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W25
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7076.37,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,7066.02,0.9990,51.110,-42.389,10.244,28.172,-3,4,2
,3,7025.88,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7062.30,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,7035.05,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7076.3723, 0.9996
Min,, 7025.8762, 0.9990
Range,, 50.4961, 0.0006
Mean,, 7053.1236, 0.9994
StdD,, 21.5641, 0.0002
%StdD,, 0.3057, 0.0245
%NonU,, 0.3580, 0.0322
Date/Time:,13-Oct-05 04:05:05 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W22
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7072.34,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,6892.31,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,6943.23,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,6992.01,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6934.85,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7072.3374, 0.9997
Min,, 6892.3080, 0.9995
Range,, 180.0294, 0.0002
Mean,, 6966.9469, 0.9996
StdD,, 68.7368, 0.0001
%StdD,, 0.9866, 0.0072
%NonU,, 1.2920, 0.0088
Date/Time:,13-Oct-05 04:03:52 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W20
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4865.67,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4946.82,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4875.96,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4755.10,0.9998,-51.215,70.612,10.244,28.172,1,-1,4
,5,4684.92,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4946.8183, 0.9998
Min,, 4684.9202, 0.9996
Range,, 261.8981, 0.0002
Mean,, 4825.6940, 0.9997
StdD,, 104.3986, 0.0001
%StdD,, 2.1634, 0.0079
%NonU,, 2.7136, 0.0101
Date/Time:,13-Oct-05 04:02:41 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W21
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7062.10,0.9989,51.211,70.500,10.244,28.172,1,4,1
,2,7055.37,0.9990,51.110,-42.389,10.244,28.172,-3,4,2
,3,7015.64,0.9992,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7041.67,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,7019.41,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7062.1019, 0.9995
Min,, 7015.6434, 0.9989
Range,, 46.4585, 0.0006
Mean,, 7038.8399, 0.9992
StdD,, 20.8455, 0.0002
%StdD,, 0.2962, 0.0247
%NonU,, 0.3300, 0.0322
Date/Time:,13-Oct-05 04:01:37 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W12
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4727.75,0.9992,51.211,70.500,10.244,28.172,1,4,1
,2,4849.75,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,4895.76,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4682.34,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,4667.82,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4895.7551, 0.9997
Min,, 4667.8231, 0.9992
Range,, 227.9319, 0.0006
Mean,, 4764.6841, 0.9995
StdD,, 102.3994, 0.0002
%StdD,, 2.1491, 0.0221
%NonU,, 2.3919, 0.0291
Date/Time:,13-Oct-05 04:00:31 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W18
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7068.62,0.9979,51.211,70.500,10.244,28.172,1,4,1
,2,6889.02,0.9983,51.110,-42.389,10.244,28.172,-3,4,2
,3,6938.00,0.9984,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,6987.25,0.9975,-51.215,70.612,10.244,28.172,1,-1,4
,5,6929.97,0.9986,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7068.6193, 0.9986
Min,, 6889.0189, 0.9975
Range,, 179.6004, 0.0011
Mean,, 6962.5705, 0.9981
StdD,, 68.7964, 0.0004
%StdD,, 0.9881, 0.0448
%NonU,, 1.2898, 0.0571
Date/Time:,13-Oct-05 03:59:21 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W10
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7082.66,0.9991,51.211,70.500,10.244,28.172,1,4,1
,2,6905.27,0.9988,51.110,-42.389,10.244,28.172,-3,4,2
,3,6950.74,0.9991,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7005.52,0.9986,-51.215,70.612,10.244,28.172,1,-1,4
,5,6943.62,0.9989,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7082.6628, 0.9991
Min,, 6905.2697, 0.9986
Range,, 177.3931, 0.0005
Mean,, 6977.5626, 0.9989
StdD,, 68.7842, 0.0002
%StdD,, 0.9858, 0.0211
%NonU,, 1.2712, 0.0254
Date/Time:,13-Oct-05 03:58:14 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W7
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4565.45,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4652.79,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4617.88,0.9992,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4452.84,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,4418.65,0.9992,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4652.7878, 0.9997
Min,, 4418.6452, 0.9992
Range,, 234.1425, 0.0004
Mean,, 4541.5213, 0.9994
StdD,, 102.1605, 0.0002
%StdD,, 2.2495, 0.0178
%NonU,, 2.5778, 0.0220
Date/Time:,13-Oct-05 03:57:08 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W1
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4517.66,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4634.84,0.9993,51.110,-42.389,10.244,28.172,-3,4,2
,3,4531.98,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4426.88,0.9992,-51.215,70.612,10.244,28.172,1,-1,4
,5,4367.81,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4634.8415, 0.9995
Min,, 4367.8126, 0.9992
Range,, 267.0289, 0.0003
Mean,, 4495.8338, 0.9994
StdD,, 102.7732, 0.0001
%StdD,, 2.2860, 0.0109
%NonU,, 2.9697, 0.0149
Date/Time:,13-Oct-05 03:55:58 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W11
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4805.91,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4906.13,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4864.98,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4781.63,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4682.55,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4906.1297, 0.9997
Min,, 4682.5502, 0.9996
Range,, 223.5795, 0.0001
Mean,, 4808.2406, 0.9997
StdD,, 85.6056, 0.0000
%StdD,, 1.7804, 0.0038
%NonU,, 2.3250, 0.0042
Date/Time:,13-Oct-05 03:52:46 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W23
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4349.08,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4476.68,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4396.04,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4323.54,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,4268.58,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4476.6799, 0.9996
Min,, 4268.5813, 0.9994
Range,, 208.0986, 0.0002
Mean,, 4362.7847, 0.9995
StdD,, 78.5495, 0.0001
%StdD,, 1.8004, 0.0094
%NonU,, 2.3849, 0.0103
Date/Time:,13-Oct-05 03:47:37 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W7
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4566.07,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4650.97,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,4613.61,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4453.40,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4416.50,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4650.9651, 0.9995
Min,, 4416.5013, 0.9993
Range,, 234.4638, 0.0002
Mean,, 4540.1080, 0.9994
StdD,, 101.4426, 0.0001
%StdD,, 2.2344, 0.0061
%NonU,, 2.5821, 0.0085
Date/Time:,13-Oct-05 03:45:08 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W20
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4981.57,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,5073.24,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,5000.37,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4884.49,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4826.98,0.9991,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 5073.2440, 0.9997
Min,, 4826.9781, 0.9991
Range,, 246.2660, 0.0006
Mean,, 4953.3287, 0.9994
StdD,, 97.5870, 0.0002
%StdD,, 1.9701, 0.0224
%NonU,, 2.4859, 0.0288
Date/Time:,13-Oct-05 03:44:07 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W12
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7074.27,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,6894.10,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,6939.90,0.9990,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,6988.95,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6932.79,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7074.2702, 0.9997
Min,, 6894.0973, 0.9990
Range,, 180.1729, 0.0007
Mean,, 6966.0003, 0.9994
StdD,, 69.2878, 0.0003
%StdD,, 0.9947, 0.0278
%NonU,, 1.2932, 0.0355
Date/Time:,13-Oct-05 03:43:01 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W1
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4515.45,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4631.95,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4532.66,0.9991,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4426.96,0.9989,-51.215,70.612,10.244,28.172,1,-1,4
,5,4368.12,0.9988,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4631.9463, 0.9997
Min,, 4368.1172, 0.9988
Range,, 263.8292, 0.0008
Mean,, 4495.0270, 0.9992
StdD,, 101.6355, 0.0004
%StdD,, 2.2611, 0.0387
%NonU,, 2.9347, 0.0424
Date/Time:,13-Oct-05 03:41:52 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W11
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4893.95,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4999.85,0.9993,51.110,-42.389,10.244,28.172,-3,4,2
,3,4957.73,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4877.28,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4793.22,0.9988,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4999.8508, 0.9997
Min,, 4793.2189, 0.9988
Range,, 206.6319, 0.0008
Mean,, 4904.4072, 0.9994
StdD,, 79.3105, 0.0003
%StdD,, 1.6171, 0.0336
%NonU,, 2.1066, 0.0421
Date/Time:,13-Oct-05 03:34:17 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W14
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4571.76,0.9981,51.211,70.500,10.244,28.172,1,4,1
,2,4681.17,0.9992,51.110,-42.389,10.244,28.172,-3,4,2
,3,4766.59,0.9991,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4590.17,0.9972,-51.215,70.612,10.244,28.172,1,-1,4
,5,4492.38,0.9969,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4766.5944, 0.9992
Min,, 4492.3830, 0.9969
Range,, 274.2115, 0.0023
Mean,, 4620.4158, 0.9981
StdD,, 105.7522, 0.0011
%StdD,, 2.2888, 0.1053
%NonU,, 2.9674, 0.1129
Date/Time:,13-Oct-05 03:32:48 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W23
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7064.14,0.9975,51.211,70.500,10.244,28.172,1,4,1
,2,7054.34,0.9983,51.110,-42.389,10.244,28.172,-3,4,2
,3,7014.80,0.9978,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7048.44,0.9980,-51.215,70.612,10.244,28.172,1,-1,4
,5,7022.03,0.9968,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7064.1416, 0.9983
Min,, 7014.8040, 0.9968
Range,, 49.3376, 0.0015
Mean,, 7040.7510, 0.9977
StdD,, 21.2984, 0.0006
%StdD,, 0.3025, 0.0581
%NonU,, 0.3504, 0.0762
Date/Time:,13-Oct-05 03:31:39 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W7
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7037.49,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,7026.12,0.9988,51.110,-42.389,10.244,28.172,-3,4,2
,3,6986.40,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7021.16,0.9990,-51.215,70.612,10.244,28.172,1,-1,4
,5,6991.19,0.9992,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7037.4922, 0.9995
Min,, 6986.4006, 0.9988
Range,, 51.0916, 0.0007
Mean,, 7012.4721, 0.9992
StdD,, 22.4734, 0.0003
%StdD,, 0.3205, 0.0267
%NonU,, 0.3643, 0.0335
Date/Time:,13-Oct-05 03:30:32 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W9
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4655.01,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4748.73,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4661.73,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4584.83,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,4497.42,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4748.7253, 0.9995
Min,, 4497.4230, 0.9994
Range,, 251.3024, 0.0002
Mean,, 4629.5429, 0.9994
StdD,, 93.9994, 0.0001
%StdD,, 2.0304, 0.0063
%NonU,, 2.7141, 0.0079
Date/Time:,13-Oct-05 03:29:25 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W1
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,6982.06,0.9983,51.211,70.500,10.244,28.172,1,4,1
,2,6955.61,0.9986,51.110,-42.389,10.244,28.172,-3,4,2
,3,6913.53,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,6971.95,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,6898.70,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 6982.0624, 0.9996
Min,, 6898.7015, 0.9983
Range,, 83.3609, 0.0013
Mean,, 6944.3721, 0.9990
StdD,, 36.5527, 0.0006
%StdD,, 0.5264, 0.0567
%NonU,, 0.6002, 0.0646
Date/Time:,13-Oct-05 03:26:15 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W20
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4982.65,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,5074.22,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,5001.31,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4889.08,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,4828.33,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 5074.2232, 0.9996
Min,, 4828.3279, 0.9994
Range,, 245.8953, 0.0001
Mean,, 4955.1176, 0.9995
StdD,, 96.8437, 0.0001
%StdD,, 1.9544, 0.0058
%NonU,, 2.4812, 0.0074
Date/Time:,13-Oct-05 03:21:36 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W19
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4799.22,0.9984,51.211,70.500,10.244,28.172,1,4,1
,2,4933.04,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4897.51,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4788.64,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4665.64,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4933.0424, 0.9996
Min,, 4665.6381, 0.9984
Range,, 267.4043, 0.0012
Mean,, 4816.8113, 0.9993
StdD,, 104.8550, 0.0005
%StdD,, 2.1769, 0.0529
%NonU,, 2.7757, 0.0610
Date/Time:,13-Oct-05 03:19:28 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W11
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4895.12,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4995.00,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4957.57,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4873.74,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4792.13,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4994.9977, 0.9997
Min,, 4792.1328, 0.9993
Range,, 202.8649, 0.0003
Mean,, 4902.7115, 0.9995
StdD,, 78.5042, 0.0001
%StdD,, 1.6012, 0.0140
%NonU,, 2.0689, 0.0172
Date/Time:,13-Oct-05 03:18:07 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W14
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7090.23,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,6905.98,0.9989,51.110,-42.389,10.244,28.172,-3,4,2
,3,6958.33,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7007.20,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6946.14,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7090.2339, 0.9996
Min,, 6905.9816, 0.9989
Range,, 184.2523, 0.0006
Mean,, 6981.5771, 0.9994
StdD,, 70.6643, 0.0003
%StdD,, 1.0122, 0.0255
%NonU,, 1.3196, 0.0322
Date/Time:,13-Oct-05 03:17:02 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W9
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4732.45,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4830.78,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4748.41,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4661.84,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4591.16,0.9991,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4830.7797, 0.9997
Min,, 4591.1630, 0.9991
Range,, 239.6167, 0.0006
Mean,, 4712.9293, 0.9995
StdD,, 90.7822, 0.0002
%StdD,, 1.9262, 0.0229
%NonU,, 2.5421, 0.0307
Date/Time:,13-Oct-05 03:13:07 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W16
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4477.10,0.9984,51.211,70.500,10.244,28.172,1,4,1
,2,4656.52,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4754.69,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4546.61,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4497.23,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4754.6901, 0.9997
Min,, 4477.1031, 0.9984
Range,, 277.5870, 0.0013
Mean,, 4586.4297, 0.9993
StdD,, 116.9606, 0.0006
%StdD,, 2.5501, 0.0555
%NonU,, 3.0262, 0.0662
Date/Time:,13-Oct-05 03:08:32 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W9
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4732.19,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4830.44,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,4750.62,0.9987,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4664.21,0.9990,-51.215,70.612,10.244,28.172,1,-1,4
,5,4585.12,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4830.4370, 0.9995
Min,, 4585.1204, 0.9987
Range,, 245.3166, 0.0007
Mean,, 4712.5134, 0.9992
StdD,, 92.6110, 0.0003
%StdD,, 1.9652, 0.0316
%NonU,, 2.6028, 0.0366
Date/Time:,13-Oct-05 03:04:00 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W6
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4593.14,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4747.93,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4756.13,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4608.17,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4505.26,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4756.1259, 0.9997
Min,, 4505.2632, 0.9995
Range,, 250.8628, 0.0002
Mean,, 4642.1252, 0.9995
StdD,, 107.7899, 0.0001
%StdD,, 2.3220, 0.0085
%NonU,, 2.7020, 0.0101
Date/Time:,13-Oct-05 03:02:46 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W20
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7089.39,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,6903.56,0.9992,51.110,-42.389,10.244,28.172,-3,4,2
,3,6952.44,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7002.00,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6945.69,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7089.3857, 0.9996
Min,, 6903.5603, 0.9992
Range,, 185.8254, 0.0004
Mean,, 6978.6165, 0.9995
StdD,, 71.0976, 0.0002
%StdD,, 1.0188, 0.0164
%NonU,, 1.3314, 0.0197
Date/Time:,13-Oct-05 03:01:43 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W5
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4620.15,0.9983,51.211,70.500,10.244,28.172,1,4,1
,2,4721.74,0.9989,51.110,-42.389,10.244,28.172,-3,4,2
,3,4623.93,0.9980,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4547.73,0.9979,-51.215,70.612,10.244,28.172,1,-1,4
,5,4509.84,0.9988,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4721.7441, 0.9989
Min,, 4509.8399, 0.9979
Range,, 211.9042, 0.0009
Mean,, 4604.6790, 0.9984
StdD,, 81.4731, 0.0004
%StdD,, 1.7694, 0.0439
%NonU,, 2.3010, 0.0472
Date/Time:,13-Oct-05 03:00:38 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W19
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4975.88,0.9992,51.211,70.500,10.244,28.172,1,4,1
,2,5115.44,0.9991,51.110,-42.389,10.244,28.172,-3,4,2
,3,5060.50,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4959.40,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4849.39,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 5115.4426, 0.9995
Min,, 4849.3878, 0.9991
Range,, 266.0548, 0.0003
Mean,, 4992.1223, 0.9993
StdD,, 101.9683, 0.0001
%StdD,, 2.0426, 0.0134
%NonU,, 2.6647, 0.0174
Date/Time:,13-Oct-05 02:59:36 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W11
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7054.89,0.9991,51.211,70.500,10.244,28.172,1,4,1
,2,7041.35,0.9991,51.110,-42.389,10.244,28.172,-3,4,2
,3,7001.92,0.9991,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7034.00,0.9986,-51.215,70.612,10.244,28.172,1,-1,4
,5,7010.08,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7054.8871, 0.9994
Min,, 7001.9202, 0.9986
Range,, 52.9669, 0.0007
Mean,, 7028.4473, 0.9991
StdD,, 22.0074, 0.0003
%StdD,, 0.3131, 0.0258
%NonU,, 0.3768, 0.0352
Date/Time:,13-Oct-05 02:56:41 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W3
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4677.26,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,4770.18,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4681.42,0.9991,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4580.48,0.9983,-51.215,70.612,10.244,28.172,1,-1,4
,5,4497.50,0.9989,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4770.1761, 0.9995
Min,, 4497.5019, 0.9983
Range,, 272.6742, 0.0011
Mean,, 4641.3671, 0.9990
StdD,, 104.7488, 0.0004
%StdD,, 2.2569, 0.0437
%NonU,, 2.9374, 0.0559
Date/Time:,13-Oct-05 02:55:31 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W16
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7075.99,0.9992,51.211,70.500,10.244,28.172,1,4,1
,2,6896.73,0.9991,51.110,-42.389,10.244,28.172,-3,4,2
,3,6945.34,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,6997.48,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,6937.32,0.9986,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7075.9863, 0.9995
Min,, 6896.7316, 0.9986
Range,, 179.2547, 0.0009
Mean,, 6970.5716, 0.9992
StdD,, 68.9758, 0.0004
%StdD,, 0.9895, 0.0364
%NonU,, 1.2858, 0.0444
Date/Time:,13-Oct-05 02:54:25 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W9
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7053.79,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,7044.32,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,7000.15,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7036.57,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,7008.49,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7053.7908, 0.9996
Min,, 7000.1523, 0.9995
Range,, 53.6386, 0.0001
Mean,, 7028.6634, 0.9996
StdD,, 23.2325, 0.0001
%StdD,, 0.3305, 0.0060
%NonU,, 0.3816, 0.0072
Date/Time:,13-Oct-05 02:53:17 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W19
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4972.17,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,5112.21,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,5064.85,0.9990,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4957.66,0.9988,-51.215,70.612,10.244,28.172,1,-1,4
,5,4846.02,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 5112.2101, 0.9997
Min,, 4846.0214, 0.9988
Range,, 266.1888, 0.0009
Mean,, 4990.5823, 0.9993
StdD,, 103.2352, 0.0004
%StdD,, 2.0686, 0.0354
%NonU,, 2.6669, 0.0440
Date/Time:,13-Oct-05 02:52:01 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W6
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4696.54,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4837.19,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4864.84,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4707.88,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,4613.96,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4864.8383, 0.9996
Min,, 4613.9620, 0.9993
Range,, 250.8763, 0.0003
Mean,, 4744.0821, 0.9995
StdD,, 104.5855, 0.0001
%StdD,, 2.2045, 0.0110
%NonU,, 2.6441, 0.0133
Date/Time:,13-Oct-05 02:50:56 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W5
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4700.83,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4803.14,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,4706.39,0.9988,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4630.67,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,4603.31,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4803.1364, 0.9996
Min,, 4603.3121, 0.9988
Range,, 199.8243, 0.0009
Mean,, 4688.8685, 0.9993
StdD,, 77.8048, 0.0004
%StdD,, 1.6594, 0.0357
%NonU,, 2.1308, 0.0438
Date/Time:,13-Oct-05 02:49:30 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W2
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4708.36,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4838.81,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4864.81,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4700.98,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4600.99,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4864.8066, 0.9996
Min,, 4600.9921, 0.9995
Range,, 263.8144, 0.0002
Mean,, 4742.7903, 0.9995
StdD,, 108.5685, 0.0001
%StdD,, 2.2891, 0.0074
%NonU,, 2.7812, 0.0078
Date/Time:,13-Oct-05 02:47:08 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W3
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4746.05,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4842.35,0.9992,51.110,-42.389,10.244,28.172,-3,4,2
,3,4759.41,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4657.37,0.9991,-51.215,70.612,10.244,28.172,1,-1,4
,5,4582.20,0.9988,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4842.3479, 0.9996
Min,, 4582.1973, 0.9988
Range,, 260.1506, 0.0008
Mean,, 4717.4774, 0.9992
StdD,, 100.1014, 0.0003
%StdD,, 2.1219, 0.0276
%NonU,, 2.7573, 0.0381
Date/Time:,13-Oct-05 02:38:11 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W6
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4695.98,0.9989,51.211,70.500,10.244,28.172,1,4,1
,2,4839.61,0.9991,51.110,-42.389,10.244,28.172,-3,4,2
,3,4868.23,0.9977,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4711.00,0.9988,-51.215,70.612,10.244,28.172,1,-1,4
,5,4611.43,0.9985,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4868.2288, 0.9991
Min,, 4611.4281, 0.9977
Range,, 256.8007, 0.0013
Mean,, 4745.2499, 0.9986
StdD,, 106.6969, 0.0005
%StdD,, 2.2485, 0.0540
%NonU,, 2.7059, 0.0674
Date/Time:,13-Oct-05 02:33:26 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W5
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4701.78,0.9982,51.211,70.500,10.244,28.172,1,4,1
,2,4803.45,0.9989,51.110,-42.389,10.244,28.172,-3,4,2
,3,4715.10,0.9971,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4631.04,0.9980,-51.215,70.612,10.244,28.172,1,-1,4
,5,4602.02,0.9987,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4803.4527, 0.9989
Min,, 4602.0193, 0.9971
Range,, 201.4333, 0.0019
Mean,, 4690.6794, 0.9982
StdD,, 78.8266, 0.0007
%StdD,, 1.6805, 0.0732
%NonU,, 2.1472, 0.0932
Date/Time:,13-Oct-05 02:32:12 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W19
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7051.78,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,7041.67,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,6995.57,0.9989,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7034.36,0.9987,-51.215,70.612,10.244,28.172,1,-1,4
,5,7007.55,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7051.7768, 0.9996
Min,, 6995.5713, 0.9987
Range,, 56.2056, 0.0009
Mean,, 7026.1859, 0.9992
StdD,, 23.6957, 0.0004
%StdD,, 0.3372, 0.0360
%NonU,, 0.4000, 0.0428
Date/Time:,13-Oct-05 02:31:02 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W2
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7019.32,0.9990,51.211,70.500,10.244,28.172,1,4,1
,2,6821.75,0.9988,51.110,-42.389,10.244,28.172,-3,4,2
,3,6876.83,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,6946.48,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,6837.18,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7019.3206, 0.9995
Min,, 6821.7538, 0.9988
Range,, 197.5668, 0.0007
Mean,, 6900.3153, 0.9992
StdD,, 82.1628, 0.0003
%StdD,, 1.1907, 0.0290
%NonU,, 1.4316, 0.0331
Date/Time:,13-Oct-05 02:28:54 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W4
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4613.91,0.9992,51.211,70.500,10.244,28.172,1,4,1
,2,4717.30,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4777.60,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4623.75,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4499.34,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4777.6006, 0.9996
Min,, 4499.3358, 0.9992
Range,, 278.2649, 0.0004
Mean,, 4646.3803, 0.9995
StdD,, 106.5786, 0.0002
%StdD,, 2.2938, 0.0176
%NonU,, 2.9944, 0.0221
Date/Time:,13-Oct-05 02:26:44 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W3
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4743.47,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4839.17,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4762.19,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4650.07,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4582.83,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4839.1716, 0.9997
Min,, 4582.8338, 0.9994
Range,, 256.3378, 0.0003
Mean,, 4715.5469, 0.9996
StdD,, 100.1738, 0.0001
%StdD,, 2.1243, 0.0108
%NonU,, 2.7180, 0.0149
Date/Time:,13-Oct-05 02:04:48 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W6
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7081.89,0.9990,51.211,70.500,10.244,28.172,1,4,1
,2,6906.94,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,6952.75,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,6999.96,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6939.85,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7081.8924, 0.9996
Min,, 6906.9391, 0.9990
Range,, 174.9533, 0.0005
Mean,, 6976.2783, 0.9994
StdD,, 67.8304, 0.0002
%StdD,, 0.9723, 0.0221
%NonU,, 1.2539, 0.0271
Date/Time:,13-Oct-05 02:03:46 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W5
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7045.88,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,7036.39,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,6993.98,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7032.54,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6991.66,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7045.8848, 0.9997
Min,, 6991.6576, 0.9994
Range,, 54.2272, 0.0003
Mean,, 7020.0891, 0.9996
StdD,, 25.3784, 0.0001
%StdD,, 0.3615, 0.0116
%NonU,, 0.3862, 0.0146
Date/Time:,13-Oct-05 02:02:26 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W4
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4780.00,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,4883.99,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4944.78,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4779.65,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4667.45,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4944.7795, 0.9997
Min,, 4667.4465, 0.9993
Range,, 277.3330, 0.0004
Mean,, 4811.1735, 0.9996
StdD,, 106.9765, 0.0001
%StdD,, 2.2235, 0.0146
%NonU,, 2.8822, 0.0199
Date/Time:,13-Oct-05 02:01:21 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W3
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4870.04,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,4978.83,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4899.31,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4794.85,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4743.09,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4978.8293, 0.9997
Min,, 4743.0934, 0.9993
Range,, 235.7359, 0.0004
Mean,, 4857.2251, 0.9996
StdD,, 91.7053, 0.0002
%StdD,, 1.8880, 0.0158
%NonU,, 2.4267, 0.0201
Date/Time:,13-Oct-05 01:50:30 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W4
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4779.85,0.9991,51.211,70.500,10.244,28.172,1,4,1
,2,4887.80,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4946.84,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4779.61,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4669.15,0.9992,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4946.8357, 0.9997
Min,, 4669.1541, 0.9991
Range,, 277.6815, 0.0006
Mean,, 4812.6501, 0.9994
StdD,, 107.7174, 0.0003
%StdD,, 2.2382, 0.0282
%NonU,, 2.8849, 0.0322
Date/Time:,13-Oct-05 01:47:07 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W3
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4869.40,0.9988,51.211,70.500,10.244,28.172,1,4,1
,2,4977.06,0.9992,51.110,-42.389,10.244,28.172,-3,4,2
,3,4897.65,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4796.49,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,4745.89,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4977.0632, 0.9994
Min,, 4745.8935, 0.9988
Range,, 231.1696, 0.0006
Mean,, 4857.2998, 0.9992
StdD,, 89.7596, 0.0003
%StdD,, 1.8479, 0.0255
%NonU,, 2.3796, 0.0317
Date/Time:,13-Oct-05 01:25:05 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W4
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7059.03,0.9982,51.211,70.500,10.244,28.172,1,4,1
,2,6880.13,0.9977,51.110,-42.389,10.244,28.172,-3,4,2
,3,6930.28,0.9987,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,6981.19,0.9980,-51.215,70.612,10.244,28.172,1,-1,4
,5,6910.53,0.9984,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7059.0329, 0.9987
Min,, 6880.1326, 0.9977
Range,, 178.9003, 0.0010
Mean,, 6952.2336, 0.9982
StdD,, 70.1136, 0.0004
%StdD,, 1.0085, 0.0375
%NonU,, 1.2866, 0.0490
Date/Time:,13-Oct-05 01:24:03 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W3
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7001.85,0.9990,51.211,70.500,10.244,28.172,1,4,1
,2,6983.96,0.9981,51.110,-42.389,10.244,28.172,-3,4,2
,3,6947.93,0.9985,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,6985.82,0.9990,-51.215,70.612,10.244,28.172,1,-1,4
,5,6940.02,0.9987,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7001.8495, 0.9990
Min,, 6940.0153, 0.9981
Range,, 61.8342, 0.0010
Mean,, 6971.9155, 0.9987
StdD,, 26.5857, 0.0004
%StdD,, 0.3813, 0.0406
%NonU,, 0.4435, 0.0484
Date/Time:,13-Oct-05 11:36:01 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W25
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4838.79,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4876.80,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4813.55,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4700.05,0.9992,-51.215,70.612,10.244,28.172,1,-1,4
,5,4661.21,0.9990,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4876.8011, 0.9997
Min,, 4661.2080, 0.9990
Range,, 215.5931, 0.0007
Mean,, 4778.0800, 0.9994
StdD,, 92.7871, 0.0003
%StdD,, 1.9419, 0.0290
%NonU,, 2.2561, 0.0360
Date/Time:,13-Oct-05 11:31:45 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W24
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4482.99,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,4725.06,0.9990,51.110,-42.389,10.244,28.172,-3,4,2
,3,4755.67,0.9980,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4581.31,0.9988,-51.215,70.612,10.244,28.172,1,-1,4
,5,4546.88,0.9984,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4755.6698, 0.9993
Min,, 4482.9897, 0.9980
Range,, 272.6801, 0.0013
Mean,, 4618.3822, 0.9987
StdD,, 117.3096, 0.0005
%StdD,, 2.5401, 0.0504
%NonU,, 2.9521, 0.0640
Date/Time:,13-Oct-05 11:26:47 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W23
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4820.33,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4866.50,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,4822.24,0.9984,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4688.36,0.9987,-51.215,70.612,10.244,28.172,1,-1,4
,5,4621.36,0.9982,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4866.5001, 0.9995
Min,, 4621.3649, 0.9982
Range,, 245.1352, 0.0013
Mean,, 4763.7575, 0.9988
StdD,, 103.8469, 0.0006
%StdD,, 2.1799, 0.0578
%NonU,, 2.5729, 0.0629
Date/Time:,13-Oct-05 11:21:51 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W20
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4591.15,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4802.23,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4858.38,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4657.58,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,4612.17,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4858.3793, 0.9997
Min,, 4591.1492, 0.9993
Range,, 267.2302, 0.0005
Mean,, 4704.3039, 0.9995
StdD,, 119.1682, 0.0002
%StdD,, 2.5332, 0.0223
%NonU,, 2.8403, 0.0236
Date/Time:,13-Oct-05 11:16:52 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W19
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4824.81,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4837.18,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4824.72,0.9992,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4665.23,0.9986,-51.215,70.612,10.244,28.172,1,-1,4
,5,4621.67,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4837.1773, 0.9996
Min,, 4621.6661, 0.9986
Range,, 215.5111, 0.0009
Mean,, 4754.7203, 0.9992
StdD,, 102.8637, 0.0004
%StdD,, 2.1634, 0.0366
%NonU,, 2.2663, 0.0467
Date/Time:,13-Oct-05 11:12:19 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W18
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4562.93,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4775.40,0.9991,51.110,-42.389,10.244,28.172,-3,4,2
,3,4822.20,0.9992,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4627.72,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4561.77,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4822.1987, 0.9997
Min,, 4561.7748, 0.9991
Range,, 260.4239, 0.0006
Mean,, 4670.0046, 0.9994
StdD,, 121.6960, 0.0002
%StdD,, 2.6059, 0.0247
%NonU,, 2.7883, 0.0323
Date/Time:,13-Oct-05 11:07:00 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W17
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4753.88,0.9989,51.211,70.500,10.244,28.172,1,4,1
,2,4800.15,0.9986,51.110,-42.389,10.244,28.172,-3,4,2
,3,4741.68,0.9984,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4635.23,0.9987,-51.215,70.612,10.244,28.172,1,-1,4
,5,4560.00,0.9981,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4800.1516, 0.9989
Min,, 4560.0038, 0.9981
Range,, 240.1478, 0.0008
Mean,, 4698.1890, 0.9986
StdD,, 98.0418, 0.0003
%StdD,, 2.0868, 0.0317
%NonU,, 2.5557, 0.0411
Date/Time:,13-Oct-05 11:02:03 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W16
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4593.22,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4809.09,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4863.74,0.9982,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4667.24,0.9989,-51.215,70.612,10.244,28.172,1,-1,4
,5,4639.30,0.9991,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4863.7388, 0.9995
Min,, 4593.2204, 0.9982
Range,, 270.5184, 0.0012
Mean,, 4714.5170, 0.9990
StdD,, 115.9942, 0.0005
%StdD,, 2.4604, 0.0490
%NonU,, 2.8690, 0.0618
Date/Time:,13-Oct-05 10:57:18 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W15
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4732.53,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4778.47,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4721.88,0.9991,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4600.68,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4511.19,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4778.4696, 0.9997
Min,, 4511.1924, 0.9991
Range,, 267.2772, 0.0006
Mean,, 4668.9498, 0.9995
StdD,, 109.9856, 0.0002
%StdD,, 2.3557, 0.0236
%NonU,, 2.8623, 0.0277
Date/Time:,13-Oct-05 10:52:11 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W14
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4625.00,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4798.14,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4860.09,0.9992,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4647.83,0.9990,-51.215,70.612,10.244,28.172,1,-1,4
,5,4661.72,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4860.0852, 0.9996
Min,, 4625.0014, 0.9990
Range,, 235.0838, 0.0006
Mean,, 4718.5532, 0.9993
StdD,, 104.1023, 0.0002
%StdD,, 2.2062, 0.0239
%NonU,, 2.4911, 0.0303
Date/Time:,13-Oct-05 10:47:17 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W13
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4810.41,0.9989,51.211,70.500,10.244,28.172,1,4,1
,2,4858.82,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4800.14,0.9984,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4722.06,0.9990,-51.215,70.612,10.244,28.172,1,-1,4
,5,4611.73,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4858.8159, 0.9996
Min,, 4611.7322, 0.9984
Range,, 247.0838, 0.0012
Mean,, 4760.6318, 0.9991
StdD,, 96.6156, 0.0005
%StdD,, 2.0295, 0.0462
%NonU,, 2.5951, 0.0578
Date/Time:,13-Oct-05 10:42:25 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W12
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4638.83,0.9991,51.211,70.500,10.244,28.172,1,4,1
,2,4777.82,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4815.63,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4600.51,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4570.53,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4815.6279, 0.9997
Min,, 4570.5291, 0.9991
Range,, 245.0988, 0.0005
Mean,, 4680.6633, 0.9995
StdD,, 109.4992, 0.0002
%StdD,, 2.3394, 0.0243
%NonU,, 2.6182, 0.0265
Date/Time:,13-Oct-05 10:37:27 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W11
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4836.13,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4850.98,0.9992,51.110,-42.389,10.244,28.172,-3,4,2
,3,4779.89,0.9988,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4716.93,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,4637.37,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4850.9768, 0.9995
Min,, 4637.3695, 0.9988
Range,, 213.6073, 0.0008
Mean,, 4764.2596, 0.9992
StdD,, 88.4174, 0.0003
%StdD,, 1.8558, 0.0283
%NonU,, 2.2418, 0.0382
Date/Time:,13-Oct-05 10:32:31 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W10
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4611.41,0.9979,51.211,70.500,10.244,28.172,1,4,1
,2,4818.65,0.9980,51.110,-42.389,10.244,28.172,-3,4,2
,3,4873.40,0.9982,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4640.65,0.9987,-51.215,70.612,10.244,28.172,1,-1,4
,5,4624.27,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4873.3973, 0.9993
Min,, 4611.4057, 0.9979
Range,, 261.9916, 0.0014
Mean,, 4713.6743, 0.9984
StdD,, 122.7974, 0.0006
%StdD,, 2.6051, 0.0581
%NonU,, 2.7791, 0.0687
Date/Time:,13-Oct-05 10:27:39 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W9
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4758.26,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4787.41,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4722.31,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4648.80,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4526.71,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4787.4076, 0.9997
Min,, 4526.7081, 0.9995
Range,, 260.6995, 0.0002
Mean,, 4688.6985, 0.9996
StdD,, 104.3372, 0.0001
%StdD,, 2.2253, 0.0098
%NonU,, 2.7801, 0.0115
Date/Time:,13-Oct-05 10:22:34 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W8
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4497.06,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4705.54,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4753.68,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4506.20,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,4481.09,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4753.6790, 0.9997
Min,, 4481.0890, 0.9993
Range,, 272.5900, 0.0004
Mean,, 4588.7137, 0.9995
StdD,, 130.0516, 0.0002
%StdD,, 2.8342, 0.0151
%NonU,, 2.9702, 0.0182
Date/Time:,13-Oct-05 10:21:32 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W7
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4777.95,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4848.08,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4760.18,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4677.80,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4551.12,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4848.0838, 0.9997
Min,, 4551.1182, 0.9994
Range,, 296.9656, 0.0002
Mean,, 4723.0269, 0.9995
StdD,, 113.6163, 0.0001
%StdD,, 2.4056, 0.0107
%NonU,, 3.1438, 0.0110
Date/Time:,13-Oct-05 10:16:07 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W6
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4663.62,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4821.95,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4858.58,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4727.90,0.9998,-51.215,70.612,10.244,28.172,1,-1,4
,5,4587.18,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4858.5839, 0.9998
Min,, 4587.1754, 0.9993
Range,, 271.4085, 0.0004
Mean,, 4731.8457, 0.9995
StdD,, 111.5596, 0.0002
%StdD,, 2.3576, 0.0187
%NonU,, 2.8679, 0.0211
Date/Time:,13-Oct-05 10:15:08 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W5
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4910.81,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4912.62,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4847.70,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4758.04,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4662.15,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4912.6205, 0.9997
Min,, 4662.1488, 0.9994
Range,, 250.4717, 0.0002
Mean,, 4818.2657, 0.9995
StdD,, 107.6264, 0.0001
%StdD,, 2.2337, 0.0097
%NonU,, 2.5992, 0.0119
Date/Time:,13-Oct-05 10:10:28 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W4
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4581.09,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4719.09,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4744.09,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4473.55,0.9989,-51.215,70.612,10.244,28.172,1,-1,4
,5,4511.32,0.9988,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4744.0876, 0.9996
Min,, 4473.5538, 0.9988
Range,, 270.5339, 0.0008
Mean,, 4605.8280, 0.9992
StdD,, 121.4338, 0.0004
%StdD,, 2.6365, 0.0370
%NonU,, 2.9369, 0.0406
Date/Time:,13-Oct-05 10:09:27 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W3
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4785.50,0.9984,51.211,70.500,10.244,28.172,1,4,1
,2,4820.26,0.9987,51.110,-42.389,10.244,28.172,-3,4,2
,3,4725.22,0.9985,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4686.17,0.9990,-51.215,70.612,10.244,28.172,1,-1,4
,5,4518.17,0.9987,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4820.2575, 0.9990
Min,, 4518.1724, 0.9984
Range,, 302.0851, 0.0006
Mean,, 4707.0638, 0.9987
StdD,, 117.6986, 0.0002
%StdD,, 2.5005, 0.0242
%NonU,, 3.2088, 0.0301
Date/Time:,13-Oct-05 10:04:37 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W2
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4597.35,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4810.77,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4839.13,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4600.21,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4558.86,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4839.1250, 0.9996
Min,, 4558.8604, 0.9995
Range,, 280.2646, 0.0002
Mean,, 4681.2648, 0.9996
StdD,, 132.5570, 0.0001
%StdD,, 2.8316, 0.0068
%NonU,, 2.9935, 0.0083
Date/Time:,13-Oct-05 10:03:33 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W1
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4727.01,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,4810.85,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4736.91,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4649.35,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,4504.78,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4810.8537, 0.9996
Min,, 4504.7755, 0.9993
Range,, 306.0782, 0.0003
Mean,, 4685.7801, 0.9995
StdD,, 116.2414, 0.0001
%StdD,, 2.4807, 0.0124
%NonU,, 3.2660, 0.0168
Date/Time:,13-Oct-05 09:43:14 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W25
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7125.22,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,6936.79,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,6985.98,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7041.16,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6975.83,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7125.2245, 0.9996
Min,, 6936.7923, 0.9995
Range,, 188.4322, 0.0002
Mean,, 7012.9973, 0.9996
StdD,, 72.9840, 0.0001
%StdD,, 1.0407, 0.0064
%NonU,, 1.3434, 0.0085
Date/Time:,13-Oct-05 09:42:12 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W24
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7080.61,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,7067.73,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,7028.31,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7064.41,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,7036.18,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7080.6113, 0.9996
Min,, 7028.3094, 0.9993
Range,, 52.3018, 0.0002
Mean,, 7055.4494, 0.9995
StdD,, 22.2038, 0.0001
%StdD,, 0.3147, 0.0105
%NonU,, 0.3706, 0.0125
Date/Time:,13-Oct-05 09:40:09 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W23
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7133.83,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,6946.40,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,6997.03,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7051.85,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,6979.61,0.9989,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7133.8283, 0.9996
Min,, 6946.4023, 0.9989
Range,, 187.4259, 0.0007
Mean,, 7021.7455, 0.9994
StdD,, 73.3685, 0.0003
%StdD,, 1.0449, 0.0289
%NonU,, 1.3346, 0.0340
Date/Time:,13-Oct-05 09:38:15 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W20
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7066.68,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,7050.94,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,7017.68,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7054.52,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,7023.39,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7066.6777, 0.9997
Min,, 7017.6784, 0.9996
Range,, 48.9993, 0.0002
Mean,, 7042.6400, 0.9996
StdD,, 21.1042, 0.0001
%StdD,, 0.2997, 0.0063
%NonU,, 0.3479, 0.0080
Date/Time:,13-Oct-05 09:37:13 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W19
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7144.35,0.9990,51.211,70.500,10.244,28.172,1,4,1
,2,6956.55,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,7007.89,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7060.90,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,6990.53,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7144.3511, 0.9995
Min,, 6956.5506, 0.9990
Range,, 187.8005, 0.0005
Mean,, 7032.0444, 0.9994
StdD,, 73.2314, 0.0002
%StdD,, 1.0414, 0.0203
%NonU,, 1.3353, 0.0253
Date/Time:,13-Oct-05 09:34:06 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W18
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7067.05,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,7055.41,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,7019.75,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7053.95,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,7023.86,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7067.0469, 0.9996
Min,, 7019.7534, 0.9995
Range,, 47.2936, 0.0001
Mean,, 7044.0043, 0.9996
StdD,, 20.9414, 0.0001
%StdD,, 0.2973, 0.0053
%NonU,, 0.3357, 0.0068
Date/Time:,13-Oct-05 09:33:04 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W17
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7121.38,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,6937.36,0.9991,51.110,-42.389,10.244,28.172,-3,4,2
,3,6982.19,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7037.32,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6969.57,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7121.3840, 0.9997
Min,, 6937.3631, 0.9991
Range,, 184.0209, 0.0006
Mean,, 7009.5653, 0.9995
StdD,, 72.1738, 0.0002
%StdD,, 1.0296, 0.0236
%NonU,, 1.3126, 0.0290
Date/Time:,13-Oct-05 09:32:03 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W16
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7075.21,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,7064.50,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,7023.98,0.9990,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7060.53,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,7028.69,0.9988,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7075.2147, 0.9995
Min,, 7023.9772, 0.9988
Range,, 51.2375, 0.0007
Mean,, 7050.5817, 0.9992
StdD,, 22.8374, 0.0003
%StdD,, 0.3239, 0.0305
%NonU,, 0.3634, 0.0326
Date/Time:,13-Oct-05 09:31:03 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W15
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7123.00,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,6937.77,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,6988.11,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7040.44,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6974.11,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7123.0033, 0.9996
Min,, 6937.7699, 0.9995
Range,, 185.2334, 0.0001
Mean,, 7012.6865, 0.9996
StdD,, 71.8404, 0.0000
%StdD,, 1.0244, 0.0049
%NonU,, 1.3207, 0.0059
Date/Time:,13-Oct-05 09:30:01 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W14
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7062.49,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,7051.90,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,7015.26,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7049.20,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,7025.62,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7062.4855, 0.9996
Min,, 7015.2575, 0.9995
Range,, 47.2281, 0.0001
Mean,, 7040.8933, 0.9996
StdD,, 19.6661, 0.0000
%StdD,, 0.2793, 0.0046
%NonU,, 0.3354, 0.0062
Date/Time:,13-Oct-05 09:28:59 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W13
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7121.48,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,6935.22,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,6978.88,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7038.36,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6970.05,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7121.4818, 0.9997
Min,, 6935.2249, 0.9994
Range,, 186.2569, 0.0003
Mean,, 7008.8006, 0.9996
StdD,, 73.1111, 0.0001
%StdD,, 1.0431, 0.0119
%NonU,, 1.3287, 0.0154
Date/Time:,13-Oct-05 09:27:54 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W12
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7060.50,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,7046.58,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,7009.96,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7043.53,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,7017.34,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7060.5017, 0.9997
Min,, 7009.9577, 0.9994
Range,, 50.5440, 0.0003
Mean,, 7035.5834, 0.9996
StdD,, 21.1806, 0.0001
%StdD,, 0.3010, 0.0135
%NonU,, 0.3592, 0.0167
Date/Time:,13-Oct-05 09:26:52 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W11
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7137.21,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,6946.94,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,6992.82,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7050.86,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,6979.24,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7137.2113, 0.9996
Min,, 6946.9445, 0.9994
Range,, 190.2668, 0.0002
Mean,, 7021.4146, 0.9995
StdD,, 74.8629, 0.0001
%StdD,, 1.0662, 0.0091
%NonU,, 1.3549, 0.0101
Date/Time:,13-Oct-05 09:25:47 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W10
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7073.32,0.9990,51.211,70.500,10.244,28.172,1,4,1
,2,7055.90,0.9983,51.110,-42.389,10.244,28.172,-3,4,2
,3,7025.64,0.9989,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7054.27,0.9989,-51.215,70.612,10.244,28.172,1,-1,4
,5,7025.64,0.9985,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7073.3172, 0.9990
Min,, 7025.6423, 0.9983
Range,, 47.6748, 0.0007
Mean,, 7046.9544, 0.9987
StdD,, 20.8378, 0.0003
%StdD,, 0.2957, 0.0296
%NonU,, 0.3383, 0.0352
Date/Time:,13-Oct-05 09:24:42 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W9
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7138.22,0.9973,51.211,70.500,10.244,28.172,1,4,1
,2,6950.76,0.9977,51.110,-42.389,10.244,28.172,-3,4,2
,3,7001.86,0.9986,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7050.05,0.9989,-51.215,70.612,10.244,28.172,1,-1,4
,5,6984.75,0.9992,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7138.2168, 0.9992
Min,, 6950.7618, 0.9973
Range,, 187.4549, 0.0019
Mean,, 7025.1267, 0.9983
StdD,, 72.6512, 0.0008
%StdD,, 1.0342, 0.0813
%NonU,, 1.3342, 0.0973
Date/Time:,13-Oct-05 09:23:38 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W8
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7085.36,0.9987,51.211,70.500,10.244,28.172,1,4,1
,2,7073.96,0.9987,51.110,-42.389,10.244,28.172,-3,4,2
,3,7034.28,0.9992,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7060.78,0.9992,-51.215,70.612,10.244,28.172,1,-1,4
,5,7038.47,0.9989,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7085.3592, 0.9992
Min,, 7034.2823, 0.9987
Range,, 51.0769, 0.0005
Mean,, 7058.5701, 0.9989
StdD,, 22.0979, 0.0003
%StdD,, 0.3131, 0.0255
%NonU,, 0.3618, 0.0259
Date/Time:,13-Oct-05 09:22:37 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W7
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7138.03,0.9986,51.211,70.500,10.244,28.172,1,4,1
,2,6950.27,0.9986,51.110,-42.389,10.244,28.172,-3,4,2
,3,6999.22,0.9988,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7053.84,0.9992,-51.215,70.612,10.244,28.172,1,-1,4
,5,6983.59,0.9988,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7138.0334, 0.9992
Min,, 6950.2702, 0.9986
Range,, 187.7632, 0.0006
Mean,, 7024.9909, 0.9988
StdD,, 73.4377, 0.0002
%StdD,, 1.0454, 0.0225
%NonU,, 1.3364, 0.0276
Date/Time:,13-Oct-05 09:21:35 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W6
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7065.18,0.9985,51.211,70.500,10.244,28.172,1,4,1
,2,7056.34,0.9984,51.110,-42.389,10.244,28.172,-3,4,2
,3,7017.37,0.9990,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7045.66,0.9987,-51.215,70.612,10.244,28.172,1,-1,4
,5,7019.97,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7065.1777, 0.9995
Min,, 7017.3746, 0.9984
Range,, 47.8031, 0.0011
Mean,, 7040.9059, 0.9988
StdD,, 21.4590, 0.0004
%StdD,, 0.3048, 0.0420
%NonU,, 0.3395, 0.0536
Date/Time:,13-Oct-05 09:20:33 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W5
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7149.09,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,6960.48,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,7011.58,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7067.21,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,6995.73,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7149.0897, 0.9997
Min,, 6960.4782, 0.9994
Range,, 188.6115, 0.0003
Mean,, 7036.8181, 0.9996
StdD,, 73.6224, 0.0001
%StdD,, 1.0462, 0.0108
%NonU,, 1.3402, 0.0132
Date/Time:,13-Oct-05 09:19:32 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W4
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7075.37,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,7068.19,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,7027.34,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7055.88,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,7032.05,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7075.3685, 0.9997
Min,, 7027.3416, 0.9995
Range,, 48.0270, 0.0003
Mean,, 7051.7676, 0.9996
StdD,, 21.3837, 0.0001
%StdD,, 0.3032, 0.0100
%NonU,, 0.3405, 0.0138
Date/Time:,13-Oct-05 09:18:30 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W3
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7144.54,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,6958.46,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,7004.64,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7053.07,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,6991.32,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7144.5387, 0.9996
Min,, 6958.4644, 0.9995
Range,, 186.0743, 0.0001
Mean,, 7030.4069, 0.9995
StdD,, 72.2964, 0.0000
%StdD,, 1.0283, 0.0044
%NonU,, 1.3234, 0.0049
Date/Time:,13-Oct-05 09:17:28 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W2
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7086.47,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,7076.39,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,7029.71,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7065.60,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,7038.01,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7086.4684, 0.9997
Min,, 7029.7050, 0.9994
Range,, 56.7634, 0.0002
Mean,, 7059.2338, 0.9996
StdD,, 24.4888, 0.0001
%StdD,, 0.3469, 0.0083
%NonU,, 0.4021, 0.0109
Date/Time:,13-Oct-05 09:16:03 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W1
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7155.79,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,6971.29,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,7018.02,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7071.36,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,7004.40,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7155.7931, 0.9996
Min,, 6971.2919, 0.9994
Range,, 184.5012, 0.0002
Mean,, 7044.1730, 0.9995
StdD,, 72.0690, 0.0001
%StdD,, 1.0231, 0.0085
%NonU,, 1.3096, 0.0101
Date/Time:,12-Oct-05 01:20:02 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100069.011
Wafer ID:,C1W24
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4660.52,0.9998,51.211,70.500,10.244,28.172,1,4,1
,2,4850.80,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4887.59,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4655.93,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4646.49,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4887.5906, 0.9998
Min,, 4646.4949, 0.9995
Range,, 241.0956, 0.0003
Mean,, 4740.2655, 0.9996
StdD,, 118.5198, 0.0001
%StdD,, 2.5003, 0.0107
%NonU,, 2.5431, 0.0142
Date/Time:,12-Oct-05 01:13:27 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100069.011
Wafer ID:,C1W23
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4773.42,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4823.12,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4794.17,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4725.51,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4605.84,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4823.1226, 0.9997
Min,, 4605.8426, 0.9993
Range,, 217.2800, 0.0004
Mean,, 4744.4142, 0.9995
StdD,, 85.2519, 0.0002
%StdD,, 1.7969, 0.0172
%NonU,, 2.2899, 0.0224
Date/Time:,12-Oct-05 01:08:52 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100069.011
Wafer ID:,C1W22
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4638.91,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4846.28,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4915.69,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4698.63,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4626.49,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4915.6855, 0.9997
Min,, 4626.4922, 0.9993
Range,, 289.1933, 0.0003
Mean,, 4745.2014, 0.9995
StdD,, 129.2671, 0.0001
%StdD,, 2.7242, 0.0127
%NonU,, 3.0472, 0.0160
Date/Time:,12-Oct-05 01:03:32 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100069.011
Wafer ID:,C1W21
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4713.43,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4771.13,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4723.66,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4678.83,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4541.42,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4771.1343, 0.9997
Min,, 4541.4180, 0.9995
Range,, 229.7163, 0.0002
Mean,, 4685.6940, 0.9996
StdD,, 87.1399, 0.0001
%StdD,, 1.8597, 0.0073
%NonU,, 2.4513, 0.0087
Date/Time:,12-Oct-05 12:57:48 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.011
Wafer ID:,C2W24
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4704.71,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4830.57,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4910.27,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4726.78,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4642.82,0.9998,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4910.2745, 0.9998
Min,, 4642.8193, 0.9995
Range,, 267.4551, 0.0003
Mean,, 4763.0295, 0.9996
StdD,, 106.5458, 0.0001
%StdD,, 2.2369, 0.0122
%NonU,, 2.8076, 0.0159
Date/Time:,12-Oct-05 12:54:10 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.011
Wafer ID:,C2W23
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4738.30,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4888.61,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4834.33,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4699.22,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4678.86,0.9998,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4888.6149, 0.9998
Min,, 4678.8635, 0.9996
Range,, 209.7514, 0.0002
Mean,, 4767.8646, 0.9997
StdD,, 90.1462, 0.0001
%StdD,, 1.8907, 0.0074
%NonU,, 2.1996, 0.0097
Date/Time:,12-Oct-05 12:49:05 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.011
Wafer ID:,C2W22
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4603.32,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4825.43,0.9998,51.110,-42.389,10.244,28.172,-3,4,2
,3,4865.69,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4689.91,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4623.12,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4865.6864, 0.9998
Min,, 4603.3188, 0.9993
Range,, 262.3676, 0.0005
Mean,, 4721.4916, 0.9996
StdD,, 118.5694, 0.0002
%StdD,, 2.5113, 0.0197
%NonU,, 2.7784, 0.0243
Date/Time:,12-Oct-05 12:47:41 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100069.011
Wafer ID:,C1W24
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7077.54,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,7065.22,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,7025.91,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7057.20,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,7028.14,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7077.5445, 0.9996
Min,, 7025.9079, 0.9996
Range,, 51.6367, 0.0001
Mean,, 7050.8015, 0.9996
StdD,, 22.8972, 0.0000
%StdD,, 0.3247, 0.0029
%NonU,, 0.3662, 0.0033
Date/Time:,12-Oct-05 12:46:41 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100069.011
Wafer ID:,C1W23
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7078.60,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,6900.41,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,6951.07,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7000.13,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,6938.09,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7078.6034, 0.9997
Min,, 6900.4130, 0.9995
Range,, 178.1903, 0.0001
Mean,, 6973.6606, 0.9996
StdD,, 68.6552, 0.0001
%StdD,, 0.9845, 0.0071
%NonU,, 1.2776, 0.0071
Date/Time:,12-Oct-05 12:45:42 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100069.011
Wafer ID:,C1W22
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7079.18,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,7069.01,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,7022.97,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7057.94,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,7030.90,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7079.1777, 0.9996
Min,, 7022.9701, 0.9994
Range,, 56.2076, 0.0003
Mean,, 7051.9989, 0.9995
StdD,, 24.2452, 0.0001
%StdD,, 0.3438, 0.0111
%NonU,, 0.3985, 0.0145
Date/Time:,12-Oct-05 12:44:38 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.011
Wafer ID:,C2W21
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4785.65,0.9998,51.211,70.500,10.244,28.172,1,4,1
,2,4902.41,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4820.56,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4666.54,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4620.39,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4902.4071, 0.9998
Min,, 4620.3927, 0.9994
Range,, 282.0145, 0.0004
Mean,, 4759.1101, 0.9996
StdD,, 114.9206, 0.0001
%StdD,, 2.4148, 0.0142
%NonU,, 2.9629, 0.0191
Date/Time:,12-Oct-05 12:43:19 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100069.011
Wafer ID:,C1W21
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7106.94,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,6922.76,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,6975.14,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7026.11,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,6959.11,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7106.9438, 0.9996
Min,, 6922.7590, 0.9994
Range,, 184.1848, 0.0002
Mean,, 6998.0135, 0.9995
StdD,, 71.3353, 0.0001
%StdD,, 1.0194, 0.0088
%NonU,, 1.3160, 0.0115
Date/Time:,12-Oct-05 12:26:03 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.011
Wafer ID:,C2W24
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7096.84,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,6906.51,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,6960.00,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7010.00,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6944.07,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7096.8402, 0.9996
Min,, 6906.5120, 0.9993
Range,, 190.3282, 0.0003
Mean,, 6983.4856, 0.9995
StdD,, 73.4549, 0.0001
%StdD,, 1.0518, 0.0106
%NonU,, 1.3627, 0.0127
Date/Time:,12-Oct-05 12:25:01 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.011
Wafer ID:,C2W23
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7083.89,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,7065.99,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,7028.17,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7041.00,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,7031.88,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7083.8929, 0.9996
Min,, 7028.1653, 0.9995
Range,, 55.7276, 0.0001
Mean,, 7050.1838, 0.9996
StdD,, 23.9289, 0.0000
%StdD,, 0.3394, 0.0049
%NonU,, 0.3952, 0.0064
Date/Time:,12-Oct-05 12:23:57 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.011
Wafer ID:,C2W22
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7088.93,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,6908.31,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,6955.80,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7012.47,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6943.76,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7088.9320, 0.9997
Min,, 6908.3052, 0.9995
Range,, 180.6267, 0.0002
Mean,, 6981.8545, 0.9996
StdD,, 70.6077, 0.0001
%StdD,, 1.0113, 0.0080
%NonU,, 1.2935, 0.0096
Date/Time:,12-Oct-05 12:22:42 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.011
Wafer ID:,C2W21
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7068.98,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,7063.90,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,7013.37,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7054.77,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,7022.70,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7068.9773, 0.9996
Min,, 7013.3655, 0.9994
Range,, 55.6118, 0.0002
Mean,, 7044.7405, 0.9995
StdD,, 25.1262, 0.0001
%StdD,, 0.3567, 0.0095
%NonU,, 0.3947, 0.0120
Date/Time:,11-Oct-05 10:26:11 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,No Lot ID
Wafer ID:,C1W22
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4641.42,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4830.88,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4889.25,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4756.23,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4559.87,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4889.2470, 0.9997
Min,, 4559.8706, 0.9996
Range,, 329.3765, 0.0001
Mean,, 4735.5301, 0.9996
StdD,, 134.9659, 0.0000
%StdD,, 2.8501, 0.0037
%NonU,, 3.4777, 0.0052
Date/Time:,11-Oct-05 10:25:12 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,No Lot ID
Wafer ID:,C1W21
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4836.47,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4914.16,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4829.22,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4745.55,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4635.80,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4914.1618, 0.9997
Min,, 4635.7975, 0.9995
Range,, 278.3643, 0.0002
Mean,, 4792.2404, 0.9996
StdD,, 105.8804, 0.0001
%StdD,, 2.2094, 0.0064
%NonU,, 2.9043, 0.0080
Date/Time:,11-Oct-05 09:24:17 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.011
Wafer ID:,C1W22
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7089.20,0.9990,51.211,70.500,10.244,28.172,1,4,1
,2,7078.11,0.9991,51.110,-42.389,10.244,28.172,-3,4,2
,3,7035.40,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7074.63,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,7041.62,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7089.2030, 0.9996
Min,, 7035.4008, 0.9990
Range,, 53.8022, 0.0006
Mean,, 7063.7933, 0.9993
StdD,, 23.7990, 0.0003
%StdD,, 0.3369, 0.0260
%NonU,, 0.3808, 0.0290
Date/Time:,11-Oct-05 09:23:18 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.011
Wafer ID:,C1W21
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7127.26,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,6952.34,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,7003.32,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7056.41,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6985.72,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7127.2601, 0.9996
Min,, 6952.3407, 0.9995
Range,, 174.9194, 0.0001
Mean,, 7025.0100, 0.9996
StdD,, 68.4393, 0.0000
%StdD,, 0.9742, 0.0034
%NonU,, 1.2450, 0.0040
Date/Time:,11-Oct-05 09:12:47 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.011
Wafer ID:,C3W24
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4612.41,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4742.89,0.9990,51.110,-42.389,10.244,28.172,-3,4,2
,3,4812.01,0.9991,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4648.01,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,4527.17,0.9991,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4812.0083, 0.9997
Min,, 4527.1687, 0.9990
Range,, 284.8396, 0.0007
Mean,, 4668.4965, 0.9992
StdD,, 111.4331, 0.0003
%StdD,, 2.3869, 0.0271
%NonU,, 3.0507, 0.0330
Date/Time:,11-Oct-05 09:08:04 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.011
Wafer ID:,C3W23
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4479.53,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,4587.04,0.9992,51.110,-42.389,10.244,28.172,-3,4,2
,3,4486.66,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4343.98,0.9988,-51.215,70.612,10.244,28.172,1,-1,4
,5,4312.20,0.9989,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4587.0362, 0.9995
Min,, 4312.2009, 0.9988
Range,, 274.8353, 0.0007
Mean,, 4441.8808, 0.9992
StdD,, 112.7988, 0.0003
%StdD,, 2.5394, 0.0294
%NonU,, 3.0937, 0.0369
Date/Time:,11-Oct-05 08:58:31 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.011
Wafer ID:,C3W24
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7134.46,0.9990,51.211,70.500,10.244,28.172,1,4,1
,2,6952.45,0.9988,51.110,-42.389,10.244,28.172,-3,4,2
,3,6999.19,0.9991,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7055.43,0.9990,-51.215,70.612,10.244,28.172,1,-1,4
,5,6985.74,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7134.4644, 0.9995
Min,, 6952.4494, 0.9988
Range,, 182.0150, 0.0007
Mean,, 7025.4542, 0.9991
StdD,, 71.3763, 0.0003
%StdD,, 1.0160, 0.0260
%NonU,, 1.2954, 0.0345
Date/Time:,11-Oct-05 08:55:48 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.011
Wafer ID:,C3W23
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7090.86,0.9992,51.211,70.500,10.244,28.172,1,4,1
,2,7080.21,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,7038.99,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7074.45,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,7043.41,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7090.8558, 0.9995
Min,, 7038.9921, 0.9992
Range,, 51.8637, 0.0003
Mean,, 7065.5824, 0.9994
StdD,, 23.0767, 0.0001
%StdD,, 0.3266, 0.0139
%NonU,, 0.3670, 0.0175
Date/Time:,09-Oct-05 03:25:57 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,ES508005.001
Wafer ID:,C2W22
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4723.07,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4854.92,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4788.07,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4620.05,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4619.20,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4854.9214, 0.9997
Min,, 4619.1981, 0.9994
Range,, 235.7233, 0.0003
Mean,, 4721.0624, 0.9995
StdD,, 103.6716, 0.0001
%StdD,, 2.1959, 0.0136
%NonU,, 2.4965, 0.0160
Date/Time:,09-Oct-05 03:21:41 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,ES508005.001
Wafer ID:,C2W21
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,5134.48,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,5142.22,0.9993,51.110,-42.389,10.244,28.172,-3,4,2
,3,5117.29,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4976.91,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4937.94,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 5142.2151, 0.9996
Min,, 4937.9417, 0.9993
Range,, 204.2734, 0.0003
Mean,, 5061.7681, 0.9995
StdD,, 96.6629, 0.0001
%StdD,, 1.9097, 0.0110
%NonU,, 2.0178, 0.0150
Date/Time:,09-Oct-05 03:17:21 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,ES508005.001
Wafer ID:,C2W20
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4754.82,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4952.84,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4837.46,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4769.64,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,4692.85,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4952.8445, 0.9996
Min,, 4692.8513, 0.9993
Range,, 259.9933, 0.0003
Mean,, 4801.5251, 0.9994
StdD,, 98.9907, 0.0001
%StdD,, 2.0617, 0.0134
%NonU,, 2.7074, 0.0151
Date/Time:,09-Oct-05 03:04:17 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,ES508005.001
Wafer ID:,C2W22
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7005.26,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,6983.74,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,6947.42,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,6993.08,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,6936.95,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7005.2580, 0.9996
Min,, 6936.9541, 0.9995
Range,, 68.3040, 0.0001
Mean,, 6973.2902, 0.9995
StdD,, 29.6321, 0.0000
%StdD,, 0.4249, 0.0044
%NonU,, 0.4898, 0.0061
Date/Time:,09-Oct-05 03:02:56 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,ES508005.001
Wafer ID:,C2W21
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7012.43,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,6818.77,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,6866.98,0.9992,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,6942.84,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,6836.31,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7012.4320, 0.9996
Min,, 6818.7711, 0.9992
Range,, 193.6609, 0.0003
Mean,, 6895.4652, 0.9994
StdD,, 80.8065, 0.0002
%StdD,, 1.1719, 0.0152
%NonU,, 1.4043, 0.0173
Date/Time:,09-Oct-05 03:01:15 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,ES508005.001
Wafer ID:,C2W20
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,6938.10,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,6910.75,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,6872.65,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,6926.99,0.9992,-51.215,70.612,10.244,28.172,1,-1,4
,5,6860.62,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 6938.0992, 0.9996
Min,, 6860.6159, 0.9992
Range,, 77.4833, 0.0004
Mean,, 6901.8202, 0.9994
StdD,, 33.8306, 0.0001
%StdD,, 0.4902, 0.0144
%NonU,, 0.5613, 0.0183
Date/Time:,08-Oct-05 01:02:05 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,ES508005.001
Wafer ID:,C2W25
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,5009.34,0.9988,51.211,70.500,10.244,28.172,1,4,1
,2,5057.89,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,5024.30,0.9989,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4954.41,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,4820.11,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 5057.8866, 0.9997
Min,, 4820.1132, 0.9988
Range,, 237.7734, 0.0009
Mean,, 4973.2088, 0.9992
StdD,, 93.3773, 0.0004
%StdD,, 1.8776, 0.0383
%NonU,, 2.3905, 0.0434
Date/Time:,08-Oct-05 12:45:10 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,ES508005.001
Wafer ID:,C2W25
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7086.94,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,6900.93,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,6946.52,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7010.26,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,6937.55,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7086.9428, 0.9996
Min,, 6900.9295, 0.9993
Range,, 186.0133, 0.0002
Mean,, 6976.4400, 0.9995
StdD,, 73.2525, 0.0001
%StdD,, 1.0500, 0.0091
%NonU,, 1.3332, 0.0119
Date/Time:,08-Oct-05 12:41:28 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,ES508005.001
Wafer ID:,C2W24
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4938.80,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,5029.90,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4952.03,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,5063.46,0.8401,-51.215,70.612,10.244,28.172,1,-1,4
,5,4771.33,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 5063.4575, 0.9997
Min,, 4771.3345, 0.8401
Range,, 292.1230, 0.1596
Mean,, 4951.1043, 0.9678
StdD,, 113.2490, 0.0714
%StdD,, 2.2873, 7.3745
%NonU,, 2.9501, 8.2465
Date/Time:,07-Oct-05 11:39:10 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,ES508005.001
Wafer ID:,C2W24
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7037.24,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,7025.61,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,6976.21,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7013.47,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6979.68,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7037.2438, 0.9997
Min,, 6976.2142, 0.9993
Range,, 61.0296, 0.0004
Mean,, 7006.4446, 0.9995
StdD,, 27.3655, 0.0002
%StdD,, 0.3906, 0.0162
%NonU,, 0.4355, 0.0223
Date/Time:,07-Oct-05 11:07:45 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,ES508005.001
Wafer ID:,C2W23
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4903.72,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4962.63,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4893.32,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4799.27,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4685.60,0.9998,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4962.6280, 0.9998
Min,, 4685.5993, 0.9995
Range,, 277.0287, 0.0003
Mean,, 4848.9063, 0.9996
StdD,, 108.4467, 0.0001
%StdD,, 2.2365, 0.0109
%NonU,, 2.8566, 0.0144
Date/Time:,07-Oct-05 10:42:21 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,ES508005.001
Wafer ID:,C2W23
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7066.52,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,6870.64,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,6916.46,0.9992,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,6977.77,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6907.09,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7066.5243, 0.9996
Min,, 6870.6416, 0.9992
Range,, 195.8827, 0.0004
Mean,, 6947.6967, 0.9995
StdD,, 76.7901, 0.0002
%StdD,, 1.1053, 0.0161
%NonU,, 1.4097, 0.0208
Max,7155.7931,0.9998
Min,4268.5813,0.8401
Range,2887.2118,0.1597
Mean,5723.1688,0.9992
StdD,1153.0016,0.0045
%StdD,20.1462,0.4525
%NonU,25.2239,7.9906
BitBtn1: TBitBtn;
BitBtn2: TBitBtn;
BitBtn3: TBitBtn;
OpenDialog1: TOpenDialog;
SaveDialog1: TSaveDialog;}
unit Unit1;
interface
uses
Windows, Messages, SysUtils, Variants, Classes, Graphics, Controls, Forms,
Dialogs, StdCtrls, Buttons, ComCtrls;
type
TForm1 = class(TForm)
BitBtn1: TBitBtn;
BitBtn2: TBitBtn;
BitBtn3: TBitBtn;
OpenDialog1: TOpenDialog;
SaveDialog1: TSaveDialog;
RichEdit1: TRichEdit;
Edit1: TEdit;
procedure BitBtn1Click(Sender: TObject);
private
{ Private declarations }
public
{ Public declarations }
end;
type //定义这个记录是用来存放数据的。
Tsticmp = record
DateTime:array[0..1] of string[25];
Filmname:array[0..1] of String[10];
Stagegroup:array[0..1] of String[15];
LotID:array[0..1] of String[15];
WaferID:array[0..1] of String[10];
Data:array[0..5] of array[0..10] of String[10];
Statistical:array[0..6] of array[0..3] of String[10]
end;
Type// 这个类用于子过程中，没有问题。
ArrayOfString=Array of string;
var
Form1: TForm1;
implementation
{$R *.dfm}
Var
StiCmpArr: array of Tsticmp;//定义 一个记录的数组，用来放数据。
//这个子过程是用来把一个字符串分成多个字符串，放入一个数组中。
procedure splitstr(SourceStr,SepChar:String;VAR result:Arrayofstring);
var
TempStr:String;
begin
result:=nil;
TempStr:=SourceStr;
if TempStr[Length(TempStr)]=SePchar then
begin
while pos(SepChar,Tempstr)>0 do
begin
setlength(Result,Length(result)+1);
Result[Length(Result)-1]:=copy(TempStr,1,Pos(SepChar,TempStr)-1);
delete(TempStr,1,pos(SepChar,TempStr));
end;
end
else
begin
while pos(SepChar,Tempstr)>0 do
begin
setlength(Result,Length(result)+1);
Result[Length(Result)-1]:=copy(TempStr,1,Pos(SepChar,TempStr)-1);
delete(TempStr,1,pos(SepChar,TempStr));
end;
setlength(Result,Length(result)+1);
Result[Length(result)-1]:=tempstr;
end;
end;
//主程序在这里，目的是当一个BitBtnr按下，将所有的数据录入一个数组sticmparr中去。
//出错也在这里，可知出错时i=j=5003当时数组sticmparr大小为250。
procedure TForm1.BitBtn1Click(Sender: TObject);
var
SourceFile:Tstringlist;
I:Integer;
J:Integer;
TempArr: ArrayOfString;
begin
try begin
if opendialog1.Execute then
begin
sourcefile:= Tstringlist.Create;
sourcefile.LoadFromFile(opendialog1.FileName);
I:=3;
while I< sourcefile.Count do
begin
J:=I;
setlength(sticmparr,length(sticmparr)+1);
splitstr(sourcefile.Strings[J],',',temparr);
sticmparr[length(sticmparr)-1].DateTime[0]:=temparr[0];
sticmparr[length(sticmparr)-1].DateTime[1]:=temparr[1];
//showmessage( sticmparr[length(sticmparr)-1].DateTime[0]);
//showmessage( sticmparr[length(sticmparr)-1].DateTime[1]);
I:=I+20;
end;
end;
edit1.Text:= sticmparr[length(sticmparr)-1].DateTime[0];
end;
except
showmessage(inttostr(I));
showmessage(inttostr(j));
end;
end;
end.
数据如下：：：：大家记得在copy去TXT文件的时候前面要留两个空行。并且只有数据大于5000行的时候才有问题。
Date/Time:,13-Oct-05 11:28:36 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W25
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4770.56,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,4883.26,0.9990,51.110,-42.389,10.244,28.172,-3,4,2
,3,4808.56,0.9985,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4694.20,0.9989,-51.215,70.612,10.244,28.172,1,-1,4
,5,4600.35,0.9992,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4883.2613, 0.9993
Min,, 4600.3457, 0.9985
Range,, 282.9157, 0.0007
Mean,, 4751.3855, 0.9990
StdD,, 108.5257, 0.0003
%StdD,, 2.2841, 0.0293
%NonU,, 2.9772, 0.0355
Date/Time:,13-Oct-05 11:24:19 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W20
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4658.68,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4826.41,0.9993,51.110,-42.389,10.244,28.172,-3,4,2
,3,4881.67,0.9989,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4706.02,0.9991,-51.215,70.612,10.244,28.172,1,-1,4
,5,4588.71,0.9989,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4881.6723, 0.9997
Min,, 4588.7102, 0.9989
Range,, 292.9621, 0.0008
Mean,, 4732.2985, 0.9992
StdD,, 120.3087, 0.0003
%StdD,, 2.5423, 0.0338
%NonU,, 3.0953, 0.0405
Date/Time:,13-Oct-05 11:19:23 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W19
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4807.63,0.9991,51.211,70.500,10.244,28.172,1,4,1
,2,4915.83,0.9993,51.110,-42.389,10.244,28.172,-3,4,2
,3,4834.66,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4720.62,0.9992,-51.215,70.612,10.244,28.172,1,-1,4
,5,4607.38,0.9987,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4915.8299, 0.9995
Min,, 4607.3786, 0.9987
Range,, 308.4513, 0.0007
Mean,, 4777.2229, 0.9992
StdD,, 117.7786, 0.0003
%StdD,, 2.4654, 0.0284
%NonU,, 3.2284, 0.0368
Date/Time:,13-Oct-05 11:14:43 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W18
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4624.90,0.9992,51.211,70.500,10.244,28.172,1,4,1
,2,4796.31,0.9991,51.110,-42.389,10.244,28.172,-3,4,2
,3,4892.49,0.9987,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4696.60,0.9982,-51.215,70.612,10.244,28.172,1,-1,4
,5,4604.36,0.9975,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4892.4880, 0.9992
Min,, 4604.3562, 0.9975
Range,, 288.1318, 0.0016
Mean,, 4722.9312, 0.9985
StdD,, 120.9314, 0.0007
%StdD,, 2.5605, 0.0679
%NonU,, 3.0503, 0.0808
Date/Time:,13-Oct-05 11:09:33 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W17
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4739.02,0.9991,51.211,70.500,10.244,28.172,1,4,1
,2,4871.23,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,4803.15,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4684.87,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,4608.01,0.9991,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4871.2298, 0.9996
Min,, 4608.0125, 0.9991
Range,, 263.2173, 0.0005
Mean,, 4741.2562, 0.9993
StdD,, 102.0573, 0.0002
%StdD,, 2.1525, 0.0214
%NonU,, 2.7758, 0.0250
Date/Time:,13-Oct-05 11:04:31 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W16
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4619.88,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4794.66,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4862.42,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4655.29,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4580.81,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4862.4181, 0.9996
Min,, 4580.8055, 0.9996
Range,, 281.6126, 0.0001
Mean,, 4702.6106, 0.9996
StdD,, 120.3437, 0.0000
%StdD,, 2.5591, 0.0029
%NonU,, 2.9942, 0.0033
Date/Time:,13-Oct-05 10:59:38 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W15
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4773.73,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4881.20,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4841.00,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4686.40,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4616.79,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4881.1967, 0.9997
Min,, 4616.7859, 0.9995
Range,, 264.4107, 0.0002
Mean,, 4759.8215, 0.9996
StdD,, 108.8179, 0.0001
%StdD,, 2.2862, 0.0059
%NonU,, 2.7775, 0.0081
Date/Time:,13-Oct-05 10:54:41 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W14
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4608.18,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4776.16,0.9993,51.110,-42.389,10.244,28.172,-3,4,2
,3,4887.00,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4710.18,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4569.51,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4887.0035, 0.9996
Min,, 4569.5104, 0.9993
Range,, 317.4931, 0.0004
Mean,, 4710.2056, 0.9995
StdD,, 128.2693, 0.0002
%StdD,, 2.7232, 0.0153
%NonU,, 3.3703, 0.0185
Date/Time:,13-Oct-05 10:49:45 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W13
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4768.71,0.9991,51.211,70.500,10.244,28.172,1,4,1
,2,4883.80,0.9993,51.110,-42.389,10.244,28.172,-3,4,2
,3,4833.00,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4719.16,0.9998,-51.215,70.612,10.244,28.172,1,-1,4
,5,4620.31,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4883.8037, 0.9998
Min,, 4620.3088, 0.9991
Range,, 263.4949, 0.0007
Mean,, 4764.9951, 0.9995
StdD,, 102.2114, 0.0003
%StdD,, 2.1450, 0.0266
%NonU,, 2.7649, 0.0330
Date/Time:,13-Oct-05 10:44:54 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W12
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4617.83,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4784.86,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4826.20,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4666.25,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4553.02,0.9982,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4826.1998, 0.9997
Min,, 4553.0184, 0.9982
Range,, 273.1814, 0.0015
Mean,, 4689.6295, 0.9993
StdD,, 114.1107, 0.0006
%StdD,, 2.4333, 0.0628
%NonU,, 2.9126, 0.0769
Date/Time:,13-Oct-05 10:39:49 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W11
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4772.76,0.9975,51.211,70.500,10.244,28.172,1,4,1
,2,4850.66,0.9984,51.110,-42.389,10.244,28.172,-3,4,2
,3,4796.04,0.9989,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4686.18,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,4573.70,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4850.6595, 0.9994
Min,, 4573.7038, 0.9975
Range,, 276.9557, 0.0020
Mean,, 4735.8693, 0.9987
StdD,, 108.3104, 0.0008
%StdD,, 2.2870, 0.0796
%NonU,, 2.9240, 0.0987
Date/Time:,13-Oct-05 10:34:52 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W10
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4666.43,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4822.40,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4881.49,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4700.18,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4584.21,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4881.4855, 0.9997
Min,, 4584.2126, 0.9993
Range,, 297.2729, 0.0004
Mean,, 4730.9412, 0.9995
StdD,, 120.0692, 0.0002
%StdD,, 2.5380, 0.0168
%NonU,, 3.1418, 0.0221
Date/Time:,13-Oct-05 10:30:03 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W9
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4733.68,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4840.05,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4782.32,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4699.85,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,4584.57,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4840.0515, 0.9997
Min,, 4584.5655, 0.9994
Range,, 255.4860, 0.0003
Mean,, 4728.0941, 0.9996
StdD,, 96.0522, 0.0001
%StdD,, 2.0315, 0.0114
%NonU,, 2.7018, 0.0137
Date/Time:,13-Oct-05 10:24:57 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W8
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4655.16,0.9989,51.211,70.500,10.244,28.172,1,4,1
,2,4774.95,0.9981,51.110,-42.389,10.244,28.172,-3,4,2
,3,4872.04,0.9987,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4670.36,0.9983,-51.215,70.612,10.244,28.172,1,-1,4
,5,4567.09,0.9986,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4872.0404, 0.9989
Min,, 4567.0873, 0.9981
Range,, 304.9531, 0.0008
Mean,, 4707.9177, 0.9985
StdD,, 117.7471, 0.0003
%StdD,, 2.5010, 0.0305
%NonU,, 3.2387, 0.0379
Date/Time:,13-Oct-05 10:20:04 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W7
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4717.82,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4811.98,0.9993,51.110,-42.389,10.244,28.172,-3,4,2
,3,4757.44,0.9990,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4625.23,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4581.58,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4811.9805, 0.9995
Min,, 4581.5759, 0.9990
Range,, 230.4045, 0.0006
Mean,, 4698.8082, 0.9993
StdD,, 94.5571, 0.0002
%StdD,, 2.0124, 0.0223
%NonU,, 2.4517, 0.0276
Date/Time:,13-Oct-05 10:15:08 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W6
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4604.53,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4729.84,0.9998,51.110,-42.389,10.244,28.172,-3,4,2
,3,4787.10,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4613.71,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4515.85,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4787.1034, 0.9998
Min,, 4515.8513, 0.9996
Range,, 271.2521, 0.0001
Mean,, 4650.2075, 0.9997
StdD,, 107.8795, 0.0000
%StdD,, 2.3199, 0.0047
%NonU,, 2.9166, 0.0058
Date/Time:,13-Oct-05 10:10:04 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W5
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4705.01,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4828.27,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,4775.65,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4711.83,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4580.61,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4828.2697, 0.9997
Min,, 4580.6149, 0.9994
Range,, 247.6548, 0.0003
Mean,, 4720.2756, 0.9996
StdD,, 92.9223, 0.0001
%StdD,, 1.9686, 0.0108
%NonU,, 2.6233, 0.0145
Date/Time:,13-Oct-05 10:05:05 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W4
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4497.54,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4650.87,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4716.46,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4553.96,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4470.65,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4716.4640, 0.9997
Min,, 4470.6504, 0.9995
Range,, 245.8136, 0.0001
Mean,, 4577.8970, 0.9996
StdD,, 103.7512, 0.0001
%StdD,, 2.2664, 0.0068
%NonU,, 2.6848, 0.0075
Date/Time:,13-Oct-05 10:00:07 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W3
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4697.66,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4784.40,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4747.10,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4649.96,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4558.07,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4784.4013, 0.9997
Min,, 4558.0658, 0.9996
Range,, 226.3356, 0.0001
Mean,, 4687.4363, 0.9996
StdD,, 88.3287, 0.0001
%StdD,, 1.8844, 0.0057
%NonU,, 2.4143, 0.0066
Date/Time:,13-Oct-05 09:54:58 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W2
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4587.77,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4740.94,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,4810.38,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4661.19,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4536.62,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4810.3845, 0.9997
Min,, 4536.6209, 0.9994
Range,, 273.7636, 0.0003
Mean,, 4667.3824, 0.9995
StdD,, 111.0589, 0.0001
%StdD,, 2.3795, 0.0124
%NonU,, 2.9327, 0.0158
Date/Time:,13-Oct-05 09:51:46 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W1
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4631.23,0.9990,51.211,70.500,10.244,28.172,1,4,1
,2,4781.04,0.9991,51.110,-42.389,10.244,28.172,-3,4,2
,3,4714.73,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4626.13,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,4511.88,0.9989,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4781.0433, 0.9994
Min,, 4511.8806, 0.9989
Range,, 269.1628, 0.0005
Mean,, 4653.0020, 0.9992
StdD,, 101.6318, 0.0002
%StdD,, 2.1842, 0.0212
%NonU,, 2.8924, 0.0258
Date/Time:,13-Oct-05 08:42:09 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W25
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4809.30,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4902.16,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,4830.06,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4747.80,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4658.03,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4902.1573, 0.9997
Min,, 4658.0323, 0.9994
Range,, 244.1250, 0.0004
Mean,, 4789.4691, 0.9996
StdD,, 91.8583, 0.0002
%StdD,, 1.9179, 0.0153
%NonU,, 2.5486, 0.0177
Date/Time:,13-Oct-05 08:37:54 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W22
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4569.58,0.9991,51.211,70.500,10.244,28.172,1,4,1
,2,4743.71,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4781.13,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4580.39,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4513.73,0.9989,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4781.1315, 0.9996
Min,, 4513.7295, 0.9989
Range,, 267.4020, 0.0007
Mean,, 4637.7092, 0.9993
StdD,, 117.3717, 0.0003
%StdD,, 2.5308, 0.0314
%NonU,, 2.8829, 0.0357
Date/Time:,13-Oct-05 08:32:50 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W21
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4817.50,0.9988,51.211,70.500,10.244,28.172,1,4,1
,2,4911.35,0.9983,51.110,-42.389,10.244,28.172,-3,4,2
,3,4860.84,0.9989,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4722.77,0.9988,-51.215,70.612,10.244,28.172,1,-1,4
,5,4693.60,0.9991,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4911.3465, 0.9991
Min,, 4693.5953, 0.9983
Range,, 217.7511, 0.0008
Mean,, 4801.2103, 0.9988
StdD,, 91.7659, 0.0003
%StdD,, 1.9113, 0.0285
%NonU,, 2.2677, 0.0382
Date/Time:,13-Oct-05 08:27:56 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W20
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4558.87,0.9989,51.211,70.500,10.244,28.172,1,4,1
,2,4743.61,0.9992,51.110,-42.389,10.244,28.172,-3,4,2
,3,4810.91,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4522.63,0.9991,-51.215,70.612,10.244,28.172,1,-1,4
,5,4545.86,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4810.9148, 0.9997
Min,, 4522.6323, 0.9989
Range,, 288.2825, 0.0008
Mean,, 4636.3770, 0.9993
StdD,, 131.4351, 0.0004
%StdD,, 2.8349, 0.0350
%NonU,, 3.1089, 0.0392
Date/Time:,13-Oct-05 08:23:00 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W19
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4754.93,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4894.12,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4789.54,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4660.19,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4608.77,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4894.1150, 0.9997
Min,, 4608.7716, 0.9996
Range,, 285.3435, 0.0001
Mean,, 4741.5088, 0.9996
StdD,, 111.8124, 0.0001
%StdD,, 2.3582, 0.0063
%NonU,, 3.0090, 0.0066
Date/Time:,13-Oct-05 08:17:55 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W18
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4587.25,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4793.51,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4839.85,0.9990,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4597.41,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4551.68,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4839.8517, 0.9997
Min,, 4551.6799, 0.9990
Range,, 288.1718, 0.0007
Mean,, 4673.9411, 0.9995
StdD,, 132.4223, 0.0003
%StdD,, 2.8332, 0.0281
%NonU,, 3.0827, 0.0341
Date/Time:,13-Oct-05 08:12:58 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W17
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4798.99,0.9998,51.211,70.500,10.244,28.172,1,4,1
,2,4904.93,0.9993,51.110,-42.389,10.244,28.172,-3,4,2
,3,4801.94,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4701.79,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4628.45,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4904.9312, 0.9998
Min,, 4628.4467, 0.9993
Range,, 276.4845, 0.0005
Mean,, 4767.2205, 0.9996
StdD,, 105.7332, 0.0002
%StdD,, 2.2179, 0.0187
%NonU,, 2.8998, 0.0235
Date/Time:,13-Oct-05 08:08:09 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W16
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4652.29,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4786.15,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4831.33,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4638.93,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4577.19,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4831.3346, 0.9997
Min,, 4577.1931, 0.9995
Range,, 254.1414, 0.0003
Mean,, 4697.1802, 0.9996
StdD,, 106.9088, 0.0001
%StdD,, 2.2760, 0.0114
%NonU,, 2.7053, 0.0126
Date/Time:,13-Oct-05 08:03:05 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W15
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4741.54,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,4866.04,0.9984,51.110,-42.389,10.244,28.172,-3,4,2
,3,4768.40,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4659.98,0.9990,-51.215,70.612,10.244,28.172,1,-1,4
,5,4584.77,0.9987,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4866.0427, 0.9993
Min,, 4584.7750, 0.9984
Range,, 281.2677, 0.0009
Mean,, 4724.1453, 0.9989
StdD,, 107.1645, 0.0004
%StdD,, 2.2684, 0.0382
%NonU,, 2.9769, 0.0455
Date/Time:,13-Oct-05 07:58:07 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W14
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4683.86,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4842.68,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4908.63,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4687.21,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4644.31,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4908.6349, 0.9997
Min,, 4644.3136, 0.9994
Range,, 264.3213, 0.0003
Mean,, 4753.3384, 0.9996
StdD,, 115.3116, 0.0001
%StdD,, 2.4259, 0.0125
%NonU,, 2.7804, 0.0164
Date/Time:,13-Oct-05 07:53:15 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W13
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4718.45,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4849.23,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4735.49,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4631.95,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4575.75,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4849.2289, 0.9997
Min,, 4575.7527, 0.9994
Range,, 273.4762, 0.0004
Mean,, 4702.1766, 0.9996
StdD,, 104.7778, 0.0002
%StdD,, 2.2283, 0.0154
%NonU,, 2.9080, 0.0184
Date/Time:,13-Oct-05 07:48:12 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W12
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4658.47,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4828.32,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4881.78,0.9998,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4651.18,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4612.20,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4881.7813, 0.9998
Min,, 4612.2020, 0.9996
Range,, 269.5793, 0.0001
Mean,, 4726.3917, 0.9997
StdD,, 120.2555, 0.0000
%StdD,, 2.5443, 0.0045
%NonU,, 2.8519, 0.0064
Date/Time:,13-Oct-05 07:43:17 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W11
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4809.50,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4905.22,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4799.20,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4706.62,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,4623.57,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4905.2211, 0.9996
Min,, 4623.5715, 0.9994
Range,, 281.6496, 0.0002
Mean,, 4768.8236, 0.9995
StdD,, 107.4109, 0.0001
%StdD,, 2.2524, 0.0088
%NonU,, 2.9530, 0.0110
Date/Time:,13-Oct-05 07:38:27 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W10
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4644.05,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4820.58,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4863.37,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4686.66,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4632.32,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4863.3667, 0.9997
Min,, 4632.3182, 0.9996
Range,, 231.0486, 0.0001
Mean,, 4729.3954, 0.9996
StdD,, 105.8269, 0.0001
%StdD,, 2.2376, 0.0060
%NonU,, 2.4427, 0.0072
Date/Time:,13-Oct-05 07:33:25 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W9
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4744.43,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4875.29,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4757.28,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4666.03,0.9998,-51.215,70.612,10.244,28.172,1,-1,4
,5,4612.14,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4875.2929, 0.9998
Min,, 4612.1396, 0.9996
Range,, 263.1533, 0.0001
Mean,, 4731.0354, 0.9997
StdD,, 100.0510, 0.0001
%StdD,, 2.1148, 0.0061
%NonU,, 2.7811, 0.0061
Date/Time:,13-Oct-05 07:28:28 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W8
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4677.43,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4821.21,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4886.48,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4634.33,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4602.58,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4886.4779, 0.9997
Min,, 4602.5752, 0.9996
Range,, 283.9027, 0.0002
Mean,, 4724.4036, 0.9997
StdD,, 123.2901, 0.0001
%StdD,, 2.6096, 0.0068
%NonU,, 3.0046, 0.0084
Date/Time:,13-Oct-05 07:26:53 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W25
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7067.53,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,7057.17,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,7018.28,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7051.01,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,7022.68,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7067.5312, 0.9997
Min,, 7018.2772, 0.9994
Range,, 49.2540, 0.0003
Mean,, 7043.3340, 0.9995
StdD,, 21.7375, 0.0001
%StdD,, 0.3086, 0.0101
%NonU,, 0.3497, 0.0130
Date/Time:,13-Oct-05 07:25:49 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W20
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7093.33,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,6909.00,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,6956.12,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7017.43,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,6945.17,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7093.3301, 0.9997
Min,, 6908.9984, 0.9993
Range,, 184.3317, 0.0004
Mean,, 6984.2100, 0.9995
StdD,, 72.4230, 0.0002
%StdD,, 1.0370, 0.0156
%NonU,, 1.3196, 0.0202
Date/Time:,13-Oct-05 07:24:48 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W19
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7082.29,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,7068.80,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,7024.93,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7065.44,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,7031.20,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7082.2870, 0.9996
Min,, 7024.9268, 0.9994
Range,, 57.3602, 0.0002
Mean,, 7054.5303, 0.9995
StdD,, 25.0673, 0.0001
%StdD,, 0.3553, 0.0092
%NonU,, 0.4065, 0.0119
Date/Time:,13-Oct-05 07:23:38 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W7
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4783.06,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4846.83,0.9990,51.110,-42.389,10.244,28.172,-3,4,2
,3,4740.13,0.9976,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4696.37,0.9987,-51.215,70.612,10.244,28.172,1,-1,4
,5,4603.76,0.9985,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4846.8311, 0.9995
Min,, 4603.7636, 0.9976
Range,, 243.0675, 0.0019
Mean,, 4734.0314, 0.9987
StdD,, 91.5878, 0.0007
%StdD,, 1.9347, 0.0693
%NonU,, 2.5672, 0.0941
Date/Time:,13-Oct-05 07:22:36 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W18
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7087.77,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,6903.17,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,6953.82,0.9992,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7009.45,0.9992,-51.215,70.612,10.244,28.172,1,-1,4
,5,6943.00,0.9986,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7087.7747, 0.9995
Min,, 6903.1697, 0.9986
Range,, 184.6050, 0.0009
Mean,, 6979.4408, 0.9992
StdD,, 71.4818, 0.0004
%StdD,, 1.0242, 0.0358
%NonU,, 1.3225, 0.0445
Date/Time:,13-Oct-05 07:21:34 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W17
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7076.69,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,7060.40,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,7020.21,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7057.89,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,7023.51,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7076.6901, 0.9997
Min,, 7020.2087, 0.9995
Range,, 56.4814, 0.0002
Mean,, 7047.7393, 0.9996
StdD,, 24.7307, 0.0001
%StdD,, 0.3509, 0.0077
%NonU,, 0.4007, 0.0086
Date/Time:,13-Oct-05 07:20:33 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W16
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7086.85,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,6902.47,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,6953.42,0.9989,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7005.50,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,6941.87,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7086.8479, 0.9995
Min,, 6902.4677, 0.9989
Range,, 184.3802, 0.0006
Mean,, 6978.0205, 0.9993
StdD,, 71.0966, 0.0002
%StdD,, 1.0189, 0.0240
%NonU,, 1.3211, 0.0286
Date/Time:,13-Oct-05 07:19:27 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W6
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4563.68,0.9988,51.211,70.500,10.244,28.172,1,4,1
,2,4722.39,0.9988,51.110,-42.389,10.244,28.172,-3,4,2
,3,4752.93,0.9987,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4582.22,0.9991,-51.215,70.612,10.244,28.172,1,-1,4
,5,4516.70,0.9992,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4752.9251, 0.9992
Min,, 4516.7018, 0.9987
Range,, 236.2233, 0.0005
Mean,, 4627.5830, 0.9989
StdD,, 103.8443, 0.0002
%StdD,, 2.2440, 0.0219
%NonU,, 2.5523, 0.0232
Date/Time:,13-Oct-05 07:18:16 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W15
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7076.28,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,7064.69,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,7017.07,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7055.67,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,7027.83,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7076.2811, 0.9996
Min,, 7017.0723, 0.9994
Range,, 59.2088, 0.0002
Mean,, 7048.3093, 0.9995
StdD,, 24.9992, 0.0001
%StdD,, 0.3547, 0.0072
%NonU,, 0.4200, 0.0089
Date/Time:,13-Oct-05 07:17:00 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W14
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7093.01,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,6906.98,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,6956.82,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7011.44,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6946.79,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7093.0125, 0.9996
Min,, 6906.9850, 0.9994
Range,, 186.0275, 0.0002
Mean,, 6983.0084, 0.9995
StdD,, 71.9136, 0.0001
%StdD,, 1.0298, 0.0106
%NonU,, 1.3320, 0.0100
Date/Time:,13-Oct-05 07:15:58 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W13
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7077.85,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,7067.42,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,7024.72,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7066.62,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,7029.37,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7077.8525, 0.9996
Min,, 7024.7209, 0.9994
Range,, 53.1317, 0.0002
Mean,, 7053.1977, 0.9995
StdD,, 24.3355, 0.0001
%StdD,, 0.3450, 0.0069
%NonU,, 0.3766, 0.0091
Date/Time:,13-Oct-05 07:14:56 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W12
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7081.81,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,6902.38,0.9990,51.110,-42.389,10.244,28.172,-3,4,2
,3,6950.44,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7006.19,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,6937.69,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7081.8112, 0.9994
Min,, 6902.3753, 0.9990
Range,, 179.4359, 0.0004
Mean,, 6975.7032, 0.9993
StdD,, 70.0863, 0.0002
%StdD,, 1.0047, 0.0168
%NonU,, 1.2861, 0.0211
Date/Time:,13-Oct-05 07:13:49 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W5
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4778.39,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4877.07,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4746.06,0.9998,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4626.35,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4594.78,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4877.0665, 0.9998
Min,, 4594.7841, 0.9995
Range,, 282.2824, 0.0003
Mean,, 4724.5295, 0.9996
StdD,, 115.2215, 0.0001
%StdD,, 2.4388, 0.0120
%NonU,, 2.9874, 0.0165
Date/Time:,13-Oct-05 07:12:28 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W11
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7065.36,0.9991,51.211,70.500,10.244,28.172,1,4,1
,2,7058.20,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,7017.53,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7053.44,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,7022.34,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7065.3555, 0.9996
Min,, 7017.5333, 0.9991
Range,, 47.8222, 0.0005
Mean,, 7043.3732, 0.9995
StdD,, 21.8772, 0.0002
%StdD,, 0.3106, 0.0192
%NonU,, 0.3395, 0.0241
Date/Time:,13-Oct-05 07:11:25 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W10
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7098.99,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,6916.89,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,6967.29,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7016.42,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,6953.02,0.9992,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7098.9945, 0.9996
Min,, 6916.8892, 0.9992
Range,, 182.1053, 0.0003
Mean,, 6990.5214, 0.9994
StdD,, 70.3650, 0.0001
%StdD,, 1.0066, 0.0130
%NonU,, 1.3025, 0.0155
Date/Time:,13-Oct-05 07:10:24 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W9
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7069.30,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,7061.25,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,7017.94,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7050.96,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,7025.93,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7069.3029, 0.9996
Min,, 7017.9373, 0.9995
Range,, 51.3656, 0.0002
Mean,, 7045.0759, 0.9995
StdD,, 22.2849, 0.0001
%StdD,, 0.3163, 0.0072
%NonU,, 0.3645, 0.0094
Date/Time:,13-Oct-05 07:09:17 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W4
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4556.52,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4744.27,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4770.69,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4549.05,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4515.83,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4770.6936, 0.9995
Min,, 4515.8277, 0.9995
Range,, 254.8659, 0.0001
Mean,, 4627.2724, 0.9995
StdD,, 120.2102, 0.0000
%StdD,, 2.5979, 0.0028
%NonU,, 2.7540, 0.0035
Date/Time:,13-Oct-05 07:07:43 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W8
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7099.94,0.9992,51.211,70.500,10.244,28.172,1,4,1
,2,6920.31,0.9993,51.110,-42.389,10.244,28.172,-3,4,2
,3,6969.26,0.9990,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7019.69,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,6956.99,0.9985,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7099.9394, 0.9993
Min,, 6920.3083, 0.9985
Range,, 179.6311, 0.0008
Mean,, 6993.2370, 0.9991
StdD,, 69.4484, 0.0003
%StdD,, 0.9931, 0.0335
%NonU,, 1.2843, 0.0412
Date/Time:,13-Oct-05 07:06:41 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W7
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7069.40,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,7056.75,0.9993,51.110,-42.389,10.244,28.172,-3,4,2
,3,7019.87,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7055.26,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,7023.27,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7069.4032, 0.9995
Min,, 7019.8735, 0.9993
Range,, 49.5298, 0.0002
Mean,, 7044.9111, 0.9993
StdD,, 22.0374, 0.0001
%StdD,, 0.3128, 0.0091
%NonU,, 0.3515, 0.0112
Date/Time:,13-Oct-05 07:05:39 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W6
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7087.69,0.9990,51.211,70.500,10.244,28.172,1,4,1
,2,6908.52,0.9992,51.110,-42.389,10.244,28.172,-3,4,2
,3,6953.36,0.9990,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7010.09,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,6947.68,0.9991,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7087.6874, 0.9995
Min,, 6908.5234, 0.9990
Range,, 179.1639, 0.0005
Mean,, 6981.4671, 0.9992
StdD,, 69.5595, 0.0002
%StdD,, 0.9963, 0.0206
%NonU,, 1.2831, 0.0268
Date/Time:,13-Oct-05 07:04:38 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W5
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7070.62,0.9989,51.211,70.500,10.244,28.172,1,4,1
,2,7059.13,0.9987,51.110,-42.389,10.244,28.172,-3,4,2
,3,7017.54,0.9989,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7049.72,0.9988,-51.215,70.612,10.244,28.172,1,-1,4
,5,7025.47,0.9989,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7070.6155, 0.9989
Min,, 7017.5404, 0.9987
Range,, 53.0751, 0.0002
Mean,, 7044.4954, 0.9989
StdD,, 22.4290, 0.0001
%StdD,, 0.3184, 0.0089
%NonU,, 0.3767, 0.0098
Date/Time:,13-Oct-05 07:03:32 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W3
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4736.72,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4845.42,0.9993,51.110,-42.389,10.244,28.172,-3,4,2
,3,4739.71,0.9984,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4574.32,0.9992,-51.215,70.612,10.244,28.172,1,-1,4
,5,4605.86,0.9991,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4845.4233, 0.9996
Min,, 4574.3200, 0.9984
Range,, 271.1033, 0.0012
Mean,, 4700.4070, 0.9991
StdD,, 110.3746, 0.0005
%StdD,, 2.3482, 0.0459
%NonU,, 2.8838, 0.0624
Date/Time:,13-Oct-05 07:02:24 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W4
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7104.62,0.9984,51.211,70.500,10.244,28.172,1,4,1
,2,6916.18,0.9988,51.110,-42.389,10.244,28.172,-3,4,2
,3,6966.92,0.9988,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7025.98,0.9989,-51.215,70.612,10.244,28.172,1,-1,4
,5,6955.22,0.9987,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7104.6172, 0.9989
Min,, 6916.1792, 0.9984
Range,, 188.4380, 0.0005
Mean,, 6993.7848, 0.9987
StdD,, 73.4025, 0.0002
%StdD,, 1.0495, 0.0179
%NonU,, 1.3472, 0.0234
Date/Time:,13-Oct-05 07:01:22 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W3
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7059.23,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,7047.00,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,7012.05,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7046.24,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,7015.48,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7059.2346, 0.9996
Min,, 7012.0488, 0.9994
Range,, 47.1858, 0.0003
Mean,, 7036.0012, 0.9995
StdD,, 20.9786, 0.0001
%StdD,, 0.2982, 0.0097
%NonU,, 0.3353, 0.0131
Date/Time:,13-Oct-05 07:00:21 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W2
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7091.31,0.9992,51.211,70.500,10.244,28.172,1,4,1
,2,6906.60,0.9991,51.110,-42.389,10.244,28.172,-3,4,2
,3,6961.56,0.9990,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7014.44,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,6946.72,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7091.3081, 0.9995
Min,, 6906.5991, 0.9990
Range,, 184.7090, 0.0005
Mean,, 6984.1243, 0.9993
StdD,, 71.2843, 0.0002
%StdD,, 1.0207, 0.0216
%NonU,, 1.3223, 0.0258
Date/Time:,13-Oct-05 06:59:13 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W2
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4705.70,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4792.48,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4859.84,0.9989,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4661.75,0.9992,-51.215,70.612,10.244,28.172,1,-1,4
,5,4603.15,0.9981,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4859.8420, 0.9996
Min,, 4603.1545, 0.9981
Range,, 256.6875, 0.0015
Mean,, 4724.5855, 0.9990
StdD,, 102.4129, 0.0006
%StdD,, 2.1677, 0.0609
%NonU,, 2.7165, 0.0767
Date/Time:,13-Oct-05 06:57:48 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.001
Wafer ID:,C2W1
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7079.54,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,7066.88,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,7021.76,0.9992,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7063.35,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,7033.87,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7079.5411, 0.9996
Min,, 7021.7645, 0.9992
Range,, 57.7765, 0.0004
Mean,, 7053.0822, 0.9994
StdD,, 24.2171, 0.0001
%StdD,, 0.3434, 0.0140
%NonU,, 0.4096, 0.0180
Date/Time:,13-Oct-05 06:53:56 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W1
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4714.59,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4789.89,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4682.76,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4601.38,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4556.42,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4789.8860, 0.9997
Min,, 4556.4181, 0.9993
Range,, 233.4678, 0.0004
Mean,, 4669.0067, 0.9995
StdD,, 92.3688, 0.0002
%StdD,, 1.9783, 0.0150
%NonU,, 2.5002, 0.0185
Date/Time:,13-Oct-05 06:15:52 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W25
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7082.13,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,7076.81,0.9991,51.110,-42.389,10.244,28.172,-3,4,2
,3,7033.73,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7063.57,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,7037.46,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7082.1308, 0.9996
Min,, 7033.7312, 0.9991
Range,, 48.3996, 0.0006
Mean,, 7058.7410, 0.9995
StdD,, 22.2211, 0.0002
%StdD,, 0.3148, 0.0226
%NonU,, 0.3428, 0.0282
Date/Time:,13-Oct-05 06:14:48 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W22
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7133.56,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,6954.00,0.9992,51.110,-42.389,10.244,28.172,-3,4,2
,3,7001.95,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7050.18,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,6985.59,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7133.5585, 0.9996
Min,, 6954.0040, 0.9992
Range,, 179.5545, 0.0004
Mean,, 7025.0561, 0.9994
StdD,, 69.9003, 0.0001
%StdD,, 0.9950, 0.0143
%NonU,, 1.2780, 0.0177
Date/Time:,13-Oct-05 06:09:25 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W21
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7073.89,0.9991,51.211,70.500,10.244,28.172,1,4,1
,2,7065.98,0.9990,51.110,-42.389,10.244,28.172,-3,4,2
,3,7026.25,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7056.19,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,7028.54,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7073.8922, 0.9995
Min,, 7026.2457, 0.9990
Range,, 47.6466, 0.0005
Mean,, 7050.1703, 0.9993
StdD,, 21.7312, 0.0002
%StdD,, 0.3082, 0.0230
%NonU,, 0.3379, 0.0246
Date/Time:,13-Oct-05 06:08:22 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W20
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7132.09,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,6946.87,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,6999.37,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7046.71,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,6982.22,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7132.0923, 0.9996
Min,, 6946.8687, 0.9993
Range,, 185.2235, 0.0003
Mean,, 7021.4516, 0.9995
StdD,, 71.5339, 0.0001
%StdD,, 1.0188, 0.0130
%NonU,, 1.3190, 0.0155
Date/Time:,13-Oct-05 06:07:17 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W19
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7079.22,0.9991,51.211,70.500,10.244,28.172,1,4,1
,2,7069.64,0.9989,51.110,-42.389,10.244,28.172,-3,4,2
,3,7028.66,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7060.14,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,7033.90,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7079.2247, 0.9994
Min,, 7028.6621, 0.9989
Range,, 50.5627, 0.0005
Mean,, 7054.3129, 0.9992
StdD,, 22.1600, 0.0002
%StdD,, 0.3141, 0.0229
%NonU,, 0.3584, 0.0274
Date/Time:,13-Oct-05 06:02:03 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W18
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7135.80,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,6949.35,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,7000.11,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7052.71,0.9992,-51.215,70.612,10.244,28.172,1,-1,4
,5,6983.66,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7135.8040, 0.9996
Min,, 6949.3546, 0.9992
Range,, 186.4494, 0.0004
Mean,, 7024.3280, 0.9995
StdD,, 72.6193, 0.0002
%StdD,, 1.0338, 0.0172
%NonU,, 1.3272, 0.0207
Date/Time:,13-Oct-05 06:00:59 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W17
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7076.06,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,7069.31,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,7028.00,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7064.48,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,7031.63,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7076.0607, 0.9997
Min,, 7027.9978, 0.9995
Range,, 48.0630, 0.0002
Mean,, 7053.8961, 0.9996
StdD,, 22.4010, 0.0001
%StdD,, 0.3176, 0.0073
%NonU,, 0.3407, 0.0092
Date/Time:,13-Oct-05 05:59:52 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W16
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7145.53,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,6963.27,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,7016.59,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7066.93,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,6994.92,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7145.5350, 0.9996
Min,, 6963.2677, 0.9994
Range,, 182.2672, 0.0002
Mean,, 7037.4485, 0.9995
StdD,, 71.2367, 0.0001
%StdD,, 1.0123, 0.0069
%NonU,, 1.2950, 0.0094
Date/Time:,13-Oct-05 05:54:24 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W15
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7080.29,0.9991,51.211,70.500,10.244,28.172,1,4,1
,2,7075.90,0.9990,51.110,-42.389,10.244,28.172,-3,4,2
,3,7033.78,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7061.89,0.9990,-51.215,70.612,10.244,28.172,1,-1,4
,5,7033.48,0.9992,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7080.2885, 0.9993
Min,, 7033.4811, 0.9990
Range,, 46.8074, 0.0004
Mean,, 7057.0691, 0.9991
StdD,, 22.4483, 0.0002
%StdD,, 0.3181, 0.0157
%NonU,, 0.3316, 0.0186
Date/Time:,13-Oct-05 05:53:20 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W14
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7137.93,0.9990,51.211,70.500,10.244,28.172,1,4,1
,2,6961.63,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,7009.92,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7061.83,0.9992,-51.215,70.612,10.244,28.172,1,-1,4
,5,6994.99,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7137.9343, 0.9994
Min,, 6961.6326, 0.9990
Range,, 176.3018, 0.0004
Mean,, 7033.2619, 0.9993
StdD,, 68.7608, 0.0001
%StdD,, 0.9777, 0.0149
%NonU,, 1.2533, 0.0180
Date/Time:,13-Oct-05 05:52:16 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W13
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7077.66,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,7071.19,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,7024.13,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7058.73,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,7028.32,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7077.6572, 0.9996
Min,, 7024.1326, 0.9995
Range,, 53.5246, 0.0001
Mean,, 7052.0056, 0.9995
StdD,, 24.5405, 0.0000
%StdD,, 0.3480, 0.0038
%NonU,, 0.3795, 0.0048
Date/Time:,13-Oct-05 05:51:10 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W12
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7134.45,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,6947.90,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,7000.38,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7047.16,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6983.19,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7134.4454, 0.9996
Min,, 6947.9033, 0.9994
Range,, 186.5421, 0.0002
Mean,, 7022.6166, 0.9995
StdD,, 72.0051, 0.0001
%StdD,, 1.0253, 0.0067
%NonU,, 1.3282, 0.0078
Date/Time:,13-Oct-05 05:48:58 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W11
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7085.46,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,7074.07,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,7033.39,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7061.82,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,7038.35,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7085.4594, 0.9996
Min,, 7033.3941, 0.9993
Range,, 52.0653, 0.0003
Mean,, 7058.6190, 0.9995
StdD,, 22.4546, 0.0001
%StdD,, 0.3181, 0.0113
%NonU,, 0.3688, 0.0153
Date/Time:,13-Oct-05 05:46:02 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W10
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7140.15,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,6959.85,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,7010.01,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7055.23,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6995.14,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7140.1457, 0.9996
Min,, 6959.8478, 0.9995
Range,, 180.2978, 0.0001
Mean,, 7032.0748, 0.9996
StdD,, 69.4328, 0.0000
%StdD,, 0.9874, 0.0040
%NonU,, 1.2820, 0.0055
Date/Time:,13-Oct-05 05:44:58 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W9
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7088.60,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,7078.74,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,7034.48,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7065.98,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,7037.79,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7088.6006, 0.9995
Min,, 7034.4751, 0.9993
Range,, 54.1254, 0.0002
Mean,, 7061.1168, 0.9994
StdD,, 24.2055, 0.0001
%StdD,, 0.3428, 0.0074
%NonU,, 0.3833, 0.0090
Date/Time:,13-Oct-05 05:43:54 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W8
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7135.22,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,6952.50,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,7003.37,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7048.71,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6986.04,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7135.2178, 0.9996
Min,, 6952.4989, 0.9994
Range,, 182.7189, 0.0002
Mean,, 7025.1670, 0.9996
StdD,, 70.6259, 0.0001
%StdD,, 1.0053, 0.0100
%NonU,, 1.3005, 0.0106
Date/Time:,13-Oct-05 05:42:40 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W7
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7087.01,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,7077.44,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,7031.03,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7071.12,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,7038.30,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7087.0106, 0.9996
Min,, 7031.0327, 0.9993
Range,, 55.9779, 0.0003
Mean,, 7060.9801, 0.9994
StdD,, 24.8121, 0.0001
%StdD,, 0.3514, 0.0126
%NonU,, 0.3964, 0.0151
Date/Time:,13-Oct-05 05:41:20 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W6
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7152.37,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,6961.78,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,7014.22,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7067.04,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6995.29,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7152.3708, 0.9996
Min,, 6961.7790, 0.9994
Range,, 190.5918, 0.0002
Mean,, 7038.1404, 0.9995
StdD,, 74.3690, 0.0001
%StdD,, 1.0567, 0.0091
%NonU,, 1.3540, 0.0111
Date/Time:,13-Oct-05 05:39:59 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W5
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7079.38,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,7062.03,0.9993,51.110,-42.389,10.244,28.172,-3,4,2
,3,7020.83,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7054.86,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,7020.05,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7079.3754, 0.9995
Min,, 7020.0541, 0.9993
Range,, 59.3214, 0.0002
Mean,, 7047.4285, 0.9994
StdD,, 26.2012, 0.0001
%StdD,, 0.3718, 0.0094
%NonU,, 0.4209, 0.0121
Date/Time:,13-Oct-05 05:38:50 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W4
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7135.75,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,6955.22,0.9989,51.110,-42.389,10.244,28.172,-3,4,2
,3,7001.92,0.9992,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7053.17,0.9983,-51.215,70.612,10.244,28.172,1,-1,4
,5,6986.00,0.9990,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7135.7545, 0.9995
Min,, 6955.2176, 0.9983
Range,, 180.5370, 0.0012
Mean,, 7026.4119, 0.9990
StdD,, 70.6635, 0.0004
%StdD,, 1.0057, 0.0439
%NonU,, 1.2847, 0.0580
Date/Time:,13-Oct-05 05:37:38 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W3
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7040.41,0.9985,51.211,70.500,10.244,28.172,1,4,1
,2,7022.25,0.9987,51.110,-42.389,10.244,28.172,-3,4,2
,3,6985.33,0.9988,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7022.29,0.9980,-51.215,70.612,10.244,28.172,1,-1,4
,5,6979.25,0.9990,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7040.4109, 0.9990
Min,, 6979.2542, 0.9980
Range,, 61.1568, 0.0011
Mean,, 7009.9063, 0.9986
StdD,, 26.3613, 0.0004
%StdD,, 0.3761, 0.0404
%NonU,, 0.4362, 0.0536
Date/Time:,13-Oct-05 05:36:16 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W2
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7121.33,0.9991,51.211,70.500,10.244,28.172,1,4,1
,2,6945.54,0.9992,51.110,-42.389,10.244,28.172,-3,4,2
,3,6998.81,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7050.57,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,6976.78,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7121.3283, 0.9996
Min,, 6945.5410, 0.9991
Range,, 175.7873, 0.0004
Mean,, 7018.6058, 0.9993
StdD,, 69.0164, 0.0002
%StdD,, 0.9833, 0.0184
%NonU,, 1.2523, 0.0216
Date/Time:,13-Oct-05 05:35:11 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.001
Wafer ID:,C3W1
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,6919.51,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,6840.77,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,6806.40,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,6892.63,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,6777.13,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 6919.5114, 0.9996
Min,, 6777.1286, 0.9993
Range,, 142.3828, 0.0002
Mean,, 6847.2860, 0.9994
StdD,, 58.9681, 0.0001
%StdD,, 0.8612, 0.0092
%NonU,, 1.0397, 0.0119
Date/Time:,13-Oct-05 05:22:08 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W17
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4498.73,0.9988,51.211,70.500,10.244,28.172,1,4,1
,2,4568.08,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,4509.45,0.9991,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4380.76,0.9989,-51.215,70.612,10.244,28.172,1,-1,4
,5,4311.30,0.9992,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4568.0778, 0.9994
Min,, 4311.2965, 0.9988
Range,, 256.7813, 0.0006
Mean,, 4453.6634, 0.9991
StdD,, 104.6626, 0.0002
%StdD,, 2.3500, 0.0242
%NonU,, 2.8828, 0.0285
Date/Time:,13-Oct-05 05:20:00 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W15
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4454.32,0.9988,51.211,70.500,10.244,28.172,1,4,1
,2,4583.04,0.9992,51.110,-42.389,10.244,28.172,-3,4,2
,3,4497.22,0.9990,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4389.17,0.9987,-51.215,70.612,10.244,28.172,1,-1,4
,5,4320.70,0.9989,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4583.0402, 0.9992
Min,, 4320.6959, 0.9987
Range,, 262.3442, 0.0005
Mean,, 4448.8883, 0.9989
StdD,, 100.4499, 0.0002
%StdD,, 2.2579, 0.0205
%NonU,, 2.9484, 0.0265
Date/Time:,13-Oct-05 05:17:52 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W8
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4372.59,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,4571.57,0.9992,51.110,-42.389,10.244,28.172,-3,4,2
,3,4598.53,0.9988,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4370.86,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,4344.58,0.9988,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4598.5291, 0.9993
Min,, 4344.5783, 0.9988
Range,, 253.9508, 0.0005
Mean,, 4451.6243, 0.9991
StdD,, 122.6752, 0.0003
%StdD,, 2.7557, 0.0268
%NonU,, 2.8523, 0.0274
Date/Time:,13-Oct-05 05:06:44 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W17
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4612.34,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4699.45,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,4639.37,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4498.55,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4446.07,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4699.4491, 0.9996
Min,, 4446.0687, 0.9993
Range,, 253.3803, 0.0003
Mean,, 4579.1543, 0.9994
StdD,, 104.1707, 0.0001
%StdD,, 2.2749, 0.0116
%NonU,, 2.7667, 0.0145
Date/Time:,13-Oct-05 05:05:38 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W15
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4552.64,0.9992,51.211,70.500,10.244,28.172,1,4,1
,2,4680.87,0.9992,51.110,-42.389,10.244,28.172,-3,4,2
,3,4587.76,0.9992,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4477.65,0.9990,-51.215,70.612,10.244,28.172,1,-1,4
,5,4420.20,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4680.8700, 0.9993
Min,, 4420.1957, 0.9990
Range,, 260.6743, 0.0002
Mean,, 4543.8242, 0.9992
StdD,, 100.5651, 0.0001
%StdD,, 2.2132, 0.0096
%NonU,, 2.8684, 0.0124
Date/Time:,13-Oct-05 05:04:31 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W8
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7086.67,0.9992,51.211,70.500,10.244,28.172,1,4,1
,2,6903.58,0.9992,51.110,-42.389,10.244,28.172,-3,4,2
,3,6953.25,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,6998.98,0.9992,-51.215,70.612,10.244,28.172,1,-1,4
,5,6940.08,0.9992,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7086.6670, 0.9993
Min,, 6903.5766, 0.9992
Range,, 183.0904, 0.0001
Mean,, 6976.5114, 0.9992
StdD,, 70.4042, 0.0001
%StdD,, 1.0092, 0.0053
%NonU,, 1.3122, 0.0065
Date/Time:,13-Oct-05 05:03:15 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W13
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4812.63,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,4926.41,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4884.89,0.9990,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4705.48,0.9990,-51.215,70.612,10.244,28.172,1,-1,4
,5,4694.85,0.9988,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4926.4091, 0.9996
Min,, 4694.8522, 0.9988
Range,, 231.5569, 0.0008
Mean,, 4804.8543, 0.9992
StdD,, 103.9435, 0.0003
%StdD,, 2.1633, 0.0328
%NonU,, 2.4096, 0.0401
Date/Time:,13-Oct-05 05:00:06 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W25
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4626.36,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4753.22,0.9988,51.110,-42.389,10.244,28.172,-3,4,2
,3,4661.45,0.9979,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4570.59,0.9986,-51.215,70.612,10.244,28.172,1,-1,4
,5,4537.66,0.9991,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4753.2151, 0.9995
Min,, 4537.6602, 0.9979
Range,, 215.5550, 0.0016
Mean,, 4629.8533, 0.9988
StdD,, 84.0248, 0.0006
%StdD,, 1.8148, 0.0593
%NonU,, 2.3279, 0.0789
Date/Time:,13-Oct-05 04:56:47 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W24
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4525.53,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4608.12,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,4507.19,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4421.31,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4341.56,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4608.1210, 0.9997
Min,, 4341.5593, 0.9993
Range,, 266.5617, 0.0004
Mean,, 4480.7427, 0.9995
StdD,, 102.2687, 0.0002
%StdD,, 2.2824, 0.0163
%NonU,, 2.9745, 0.0190
Date/Time:,13-Oct-05 04:52:29 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W17
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4614.02,0.9985,51.211,70.500,10.244,28.172,1,4,1
,2,4701.92,0.9988,51.110,-42.389,10.244,28.172,-3,4,2
,3,4640.56,0.9985,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4496.45,0.9988,-51.215,70.612,10.244,28.172,1,-1,4
,5,4445.69,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4701.9202, 0.9993
Min,, 4445.6943, 0.9985
Range,, 256.2260, 0.0008
Mean,, 4579.7269, 0.9988
StdD,, 105.7209, 0.0003
%StdD,, 2.3085, 0.0334
%NonU,, 2.7974, 0.0424
Date/Time:,13-Oct-05 04:47:12 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W15
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4552.99,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4685.96,0.9991,51.110,-42.389,10.244,28.172,-3,4,2
,3,4594.60,0.9989,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4486.26,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,4420.63,0.9986,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4685.9632, 0.9994
Min,, 4420.6336, 0.9986
Range,, 265.3296, 0.0008
Mean,, 4548.0902, 0.9990
StdD,, 101.5669, 0.0003
%StdD,, 2.2332, 0.0326
%NonU,, 2.9169, 0.0416
Date/Time:,13-Oct-05 04:44:22 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W13
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4963.45,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,5089.40,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,5030.95,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4877.47,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,4858.87,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 5089.4029, 0.9997
Min,, 4858.8695, 0.9993
Range,, 230.5334, 0.0004
Mean,, 4964.0300, 0.9996
StdD,, 98.4225, 0.0002
%StdD,, 1.9827, 0.0151
%NonU,, 2.3220, 0.0180
Date/Time:,13-Oct-05 04:40:52 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W13
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4967.27,0.9992,51.211,70.500,10.244,28.172,1,4,1
,2,5091.89,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,5035.45,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4876.51,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4860.40,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 5091.8922, 0.9997
Min,, 4860.3962, 0.9992
Range,, 231.4961, 0.0005
Mean,, 4966.3043, 0.9995
StdD,, 99.7910, 0.0002
%StdD,, 2.0094, 0.0212
%NonU,, 2.3307, 0.0257
Date/Time:,13-Oct-05 04:38:20 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W25
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4684.37,0.9989,51.211,70.500,10.244,28.172,1,4,1
,2,4813.21,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,4725.43,0.9984,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4628.58,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,4606.32,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4813.2064, 0.9995
Min,, 4606.3191, 0.9984
Range,, 206.8873, 0.0010
Mean,, 4691.5819, 0.9991
StdD,, 82.5057, 0.0004
%StdD,, 1.7586, 0.0444
%NonU,, 2.2049, 0.0525
Date/Time:,13-Oct-05 04:35:57 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W25
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4682.98,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4814.88,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4718.80,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4630.68,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4607.64,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4814.8791, 0.9996
Min,, 4607.6421, 0.9993
Range,, 207.2370, 0.0003
Mean,, 4690.9957, 0.9994
StdD,, 81.8081, 0.0001
%StdD,, 1.7439, 0.0122
%NonU,, 2.2089, 0.0156
Date/Time:,13-Oct-05 04:31:37 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W22
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4544.64,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,4720.41,0.9989,51.110,-42.389,10.244,28.172,-3,4,2
,3,4810.90,0.9990,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4595.23,0.9992,-51.215,70.612,10.244,28.172,1,-1,4
,5,4544.97,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4810.8972, 0.9994
Min,, 4544.6355, 0.9989
Range,, 266.2617, 0.0004
Mean,, 4643.2303, 0.9992
StdD,, 118.0557, 0.0002
%StdD,, 2.5425, 0.0202
%NonU,, 2.8672, 0.0213
Date/Time:,13-Oct-05 04:27:10 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W24
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7082.76,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,6905.58,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,6955.29,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7010.07,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,6945.09,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7082.7635, 0.9997
Min,, 6905.5814, 0.9994
Range,, 177.1821, 0.0003
Mean,, 6979.7565, 0.9996
StdD,, 68.6146, 0.0001
%StdD,, 0.9831, 0.0107
%NonU,, 1.2693, 0.0144
Date/Time:,13-Oct-05 04:26:00 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W21
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4659.67,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4809.24,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,4725.25,0.9991,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4563.17,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4543.35,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4809.2440, 0.9996
Min,, 4543.3468, 0.9991
Range,, 265.8972, 0.0005
Mean,, 4660.1361, 0.9994
StdD,, 111.2605, 0.0002
%StdD,, 2.3875, 0.0221
%NonU,, 2.8529, 0.0262
Date/Time:,13-Oct-05 04:24:50 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W17
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7062.80,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,7050.81,0.9992,51.110,-42.389,10.244,28.172,-3,4,2
,3,7010.17,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7045.44,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,7016.86,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7062.8016, 0.9996
Min,, 7010.1716, 0.9992
Range,, 52.6300, 0.0004
Mean,, 7037.2172, 0.9993
StdD,, 22.6527, 0.0001
%StdD,, 0.3219, 0.0150
%NonU,, 0.3739, 0.0206
Date/Time:,13-Oct-05 04:23:18 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W15
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7076.44,0.9991,51.211,70.500,10.244,28.172,1,4,1
,2,7066.34,0.9993,51.110,-42.389,10.244,28.172,-3,4,2
,3,7021.32,0.9991,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7057.83,0.9990,-51.215,70.612,10.244,28.172,1,-1,4
,5,7025.45,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7076.4428, 0.9994
Min,, 7021.3184, 0.9990
Range,, 55.1244, 0.0003
Mean,, 7049.4778, 0.9992
StdD,, 24.7567, 0.0001
%StdD,, 0.3512, 0.0145
%NonU,, 0.3910, 0.0167
Date/Time:,13-Oct-05 04:20:37 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W18
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4519.24,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4642.86,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4755.44,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4540.77,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4475.14,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4755.4355, 0.9997
Min,, 4475.1428, 0.9994
Range,, 280.2927, 0.0003
Mean,, 4586.6900, 0.9996
StdD,, 112.6180, 0.0001
%StdD,, 2.4553, 0.0111
%NonU,, 3.0555, 0.0141
Date/Time:,13-Oct-05 04:14:35 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W10
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4343.73,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4504.04,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,4591.58,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4470.83,0.9992,-51.215,70.612,10.244,28.172,1,-1,4
,5,4351.03,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4591.5836, 0.9996
Min,, 4343.7347, 0.9992
Range,, 247.8490, 0.0004
Mean,, 4452.2430, 0.9994
StdD,, 105.4311, 0.0002
%StdD,, 2.3680, 0.0154
%NonU,, 2.7834, 0.0191
Date/Time:,13-Oct-05 04:12:38 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W13
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7055.76,0.9991,51.211,70.500,10.244,28.172,1,4,1
,2,7040.43,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,6998.31,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7033.80,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,7011.11,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7055.7623, 0.9996
Min,, 6998.3146, 0.9991
Range,, 57.4477, 0.0006
Mean,, 7027.8820, 0.9995
StdD,, 23.0505, 0.0002
%StdD,, 0.3280, 0.0222
%NonU,, 0.4087, 0.0278
Date/Time:,13-Oct-05 04:09:27 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W7
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4453.42,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4539.05,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4496.91,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4339.08,0.9990,-51.215,70.612,10.244,28.172,1,-1,4
,5,4283.47,0.9991,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4539.0512, 0.9997
Min,, 4283.4684, 0.9990
Range,, 255.5827, 0.0007
Mean,, 4422.3862, 0.9994
StdD,, 107.6622, 0.0003
%StdD,, 2.4345, 0.0310
%NonU,, 2.8896, 0.0351
Date/Time:,13-Oct-05 04:07:18 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W1
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4439.06,0.9992,51.211,70.500,10.244,28.172,1,4,1
,2,4553.70,0.9991,51.110,-42.389,10.244,28.172,-3,4,2
,3,4450.76,0.9987,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4356.63,0.9991,-51.215,70.612,10.244,28.172,1,-1,4
,5,4283.57,0.9991,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4553.6996, 0.9992
Min,, 4283.5750, 0.9987
Range,, 270.1246, 0.0005
Mean,, 4416.7458, 0.9990
StdD,, 102.1753, 0.0002
%StdD,, 2.3134, 0.0215
%NonU,, 3.0580, 0.0269
Date/Time:,13-Oct-05 04:06:08 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W25
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7076.37,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,7066.02,0.9990,51.110,-42.389,10.244,28.172,-3,4,2
,3,7025.88,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7062.30,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,7035.05,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7076.3723, 0.9996
Min,, 7025.8762, 0.9990
Range,, 50.4961, 0.0006
Mean,, 7053.1236, 0.9994
StdD,, 21.5641, 0.0002
%StdD,, 0.3057, 0.0245
%NonU,, 0.3580, 0.0322
Date/Time:,13-Oct-05 04:05:05 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W22
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7072.34,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,6892.31,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,6943.23,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,6992.01,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6934.85,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7072.3374, 0.9997
Min,, 6892.3080, 0.9995
Range,, 180.0294, 0.0002
Mean,, 6966.9469, 0.9996
StdD,, 68.7368, 0.0001
%StdD,, 0.9866, 0.0072
%NonU,, 1.2920, 0.0088
Date/Time:,13-Oct-05 04:03:52 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W20
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4865.67,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4946.82,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4875.96,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4755.10,0.9998,-51.215,70.612,10.244,28.172,1,-1,4
,5,4684.92,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4946.8183, 0.9998
Min,, 4684.9202, 0.9996
Range,, 261.8981, 0.0002
Mean,, 4825.6940, 0.9997
StdD,, 104.3986, 0.0001
%StdD,, 2.1634, 0.0079
%NonU,, 2.7136, 0.0101
Date/Time:,13-Oct-05 04:02:41 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W21
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7062.10,0.9989,51.211,70.500,10.244,28.172,1,4,1
,2,7055.37,0.9990,51.110,-42.389,10.244,28.172,-3,4,2
,3,7015.64,0.9992,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7041.67,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,7019.41,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7062.1019, 0.9995
Min,, 7015.6434, 0.9989
Range,, 46.4585, 0.0006
Mean,, 7038.8399, 0.9992
StdD,, 20.8455, 0.0002
%StdD,, 0.2962, 0.0247
%NonU,, 0.3300, 0.0322
Date/Time:,13-Oct-05 04:01:37 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W12
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4727.75,0.9992,51.211,70.500,10.244,28.172,1,4,1
,2,4849.75,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,4895.76,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4682.34,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,4667.82,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4895.7551, 0.9997
Min,, 4667.8231, 0.9992
Range,, 227.9319, 0.0006
Mean,, 4764.6841, 0.9995
StdD,, 102.3994, 0.0002
%StdD,, 2.1491, 0.0221
%NonU,, 2.3919, 0.0291
Date/Time:,13-Oct-05 04:00:31 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W18
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7068.62,0.9979,51.211,70.500,10.244,28.172,1,4,1
,2,6889.02,0.9983,51.110,-42.389,10.244,28.172,-3,4,2
,3,6938.00,0.9984,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,6987.25,0.9975,-51.215,70.612,10.244,28.172,1,-1,4
,5,6929.97,0.9986,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7068.6193, 0.9986
Min,, 6889.0189, 0.9975
Range,, 179.6004, 0.0011
Mean,, 6962.5705, 0.9981
StdD,, 68.7964, 0.0004
%StdD,, 0.9881, 0.0448
%NonU,, 1.2898, 0.0571
Date/Time:,13-Oct-05 03:59:21 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W10
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7082.66,0.9991,51.211,70.500,10.244,28.172,1,4,1
,2,6905.27,0.9988,51.110,-42.389,10.244,28.172,-3,4,2
,3,6950.74,0.9991,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7005.52,0.9986,-51.215,70.612,10.244,28.172,1,-1,4
,5,6943.62,0.9989,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7082.6628, 0.9991
Min,, 6905.2697, 0.9986
Range,, 177.3931, 0.0005
Mean,, 6977.5626, 0.9989
StdD,, 68.7842, 0.0002
%StdD,, 0.9858, 0.0211
%NonU,, 1.2712, 0.0254
Date/Time:,13-Oct-05 03:58:14 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W7
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4565.45,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4652.79,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4617.88,0.9992,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4452.84,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,4418.65,0.9992,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4652.7878, 0.9997
Min,, 4418.6452, 0.9992
Range,, 234.1425, 0.0004
Mean,, 4541.5213, 0.9994
StdD,, 102.1605, 0.0002
%StdD,, 2.2495, 0.0178
%NonU,, 2.5778, 0.0220
Date/Time:,13-Oct-05 03:57:08 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W1
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4517.66,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4634.84,0.9993,51.110,-42.389,10.244,28.172,-3,4,2
,3,4531.98,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4426.88,0.9992,-51.215,70.612,10.244,28.172,1,-1,4
,5,4367.81,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4634.8415, 0.9995
Min,, 4367.8126, 0.9992
Range,, 267.0289, 0.0003
Mean,, 4495.8338, 0.9994
StdD,, 102.7732, 0.0001
%StdD,, 2.2860, 0.0109
%NonU,, 2.9697, 0.0149
Date/Time:,13-Oct-05 03:55:58 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W11
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4805.91,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4906.13,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4864.98,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4781.63,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4682.55,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4906.1297, 0.9997
Min,, 4682.5502, 0.9996
Range,, 223.5795, 0.0001
Mean,, 4808.2406, 0.9997
StdD,, 85.6056, 0.0000
%StdD,, 1.7804, 0.0038
%NonU,, 2.3250, 0.0042
Date/Time:,13-Oct-05 03:52:46 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W23
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4349.08,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4476.68,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4396.04,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4323.54,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,4268.58,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4476.6799, 0.9996
Min,, 4268.5813, 0.9994
Range,, 208.0986, 0.0002
Mean,, 4362.7847, 0.9995
StdD,, 78.5495, 0.0001
%StdD,, 1.8004, 0.0094
%NonU,, 2.3849, 0.0103
Date/Time:,13-Oct-05 03:47:37 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W7
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4566.07,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4650.97,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,4613.61,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4453.40,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4416.50,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4650.9651, 0.9995
Min,, 4416.5013, 0.9993
Range,, 234.4638, 0.0002
Mean,, 4540.1080, 0.9994
StdD,, 101.4426, 0.0001
%StdD,, 2.2344, 0.0061
%NonU,, 2.5821, 0.0085
Date/Time:,13-Oct-05 03:45:08 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W20
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4981.57,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,5073.24,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,5000.37,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4884.49,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4826.98,0.9991,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 5073.2440, 0.9997
Min,, 4826.9781, 0.9991
Range,, 246.2660, 0.0006
Mean,, 4953.3287, 0.9994
StdD,, 97.5870, 0.0002
%StdD,, 1.9701, 0.0224
%NonU,, 2.4859, 0.0288
Date/Time:,13-Oct-05 03:44:07 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W12
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7074.27,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,6894.10,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,6939.90,0.9990,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,6988.95,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6932.79,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7074.2702, 0.9997
Min,, 6894.0973, 0.9990
Range,, 180.1729, 0.0007
Mean,, 6966.0003, 0.9994
StdD,, 69.2878, 0.0003
%StdD,, 0.9947, 0.0278
%NonU,, 1.2932, 0.0355
Date/Time:,13-Oct-05 03:43:01 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W1
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4515.45,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4631.95,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4532.66,0.9991,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4426.96,0.9989,-51.215,70.612,10.244,28.172,1,-1,4
,5,4368.12,0.9988,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4631.9463, 0.9997
Min,, 4368.1172, 0.9988
Range,, 263.8292, 0.0008
Mean,, 4495.0270, 0.9992
StdD,, 101.6355, 0.0004
%StdD,, 2.2611, 0.0387
%NonU,, 2.9347, 0.0424
Date/Time:,13-Oct-05 03:41:52 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W11
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4893.95,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4999.85,0.9993,51.110,-42.389,10.244,28.172,-3,4,2
,3,4957.73,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4877.28,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4793.22,0.9988,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4999.8508, 0.9997
Min,, 4793.2189, 0.9988
Range,, 206.6319, 0.0008
Mean,, 4904.4072, 0.9994
StdD,, 79.3105, 0.0003
%StdD,, 1.6171, 0.0336
%NonU,, 2.1066, 0.0421
Date/Time:,13-Oct-05 03:34:17 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W14
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4571.76,0.9981,51.211,70.500,10.244,28.172,1,4,1
,2,4681.17,0.9992,51.110,-42.389,10.244,28.172,-3,4,2
,3,4766.59,0.9991,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4590.17,0.9972,-51.215,70.612,10.244,28.172,1,-1,4
,5,4492.38,0.9969,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4766.5944, 0.9992
Min,, 4492.3830, 0.9969
Range,, 274.2115, 0.0023
Mean,, 4620.4158, 0.9981
StdD,, 105.7522, 0.0011
%StdD,, 2.2888, 0.1053
%NonU,, 2.9674, 0.1129
Date/Time:,13-Oct-05 03:32:48 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W23
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7064.14,0.9975,51.211,70.500,10.244,28.172,1,4,1
,2,7054.34,0.9983,51.110,-42.389,10.244,28.172,-3,4,2
,3,7014.80,0.9978,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7048.44,0.9980,-51.215,70.612,10.244,28.172,1,-1,4
,5,7022.03,0.9968,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7064.1416, 0.9983
Min,, 7014.8040, 0.9968
Range,, 49.3376, 0.0015
Mean,, 7040.7510, 0.9977
StdD,, 21.2984, 0.0006
%StdD,, 0.3025, 0.0581
%NonU,, 0.3504, 0.0762
Date/Time:,13-Oct-05 03:31:39 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W7
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7037.49,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,7026.12,0.9988,51.110,-42.389,10.244,28.172,-3,4,2
,3,6986.40,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7021.16,0.9990,-51.215,70.612,10.244,28.172,1,-1,4
,5,6991.19,0.9992,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7037.4922, 0.9995
Min,, 6986.4006, 0.9988
Range,, 51.0916, 0.0007
Mean,, 7012.4721, 0.9992
StdD,, 22.4734, 0.0003
%StdD,, 0.3205, 0.0267
%NonU,, 0.3643, 0.0335
Date/Time:,13-Oct-05 03:30:32 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W9
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4655.01,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4748.73,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4661.73,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4584.83,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,4497.42,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4748.7253, 0.9995
Min,, 4497.4230, 0.9994
Range,, 251.3024, 0.0002
Mean,, 4629.5429, 0.9994
StdD,, 93.9994, 0.0001
%StdD,, 2.0304, 0.0063
%NonU,, 2.7141, 0.0079
Date/Time:,13-Oct-05 03:29:25 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.031
Wafer ID:,C3W1
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,6982.06,0.9983,51.211,70.500,10.244,28.172,1,4,1
,2,6955.61,0.9986,51.110,-42.389,10.244,28.172,-3,4,2
,3,6913.53,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,6971.95,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,6898.70,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 6982.0624, 0.9996
Min,, 6898.7015, 0.9983
Range,, 83.3609, 0.0013
Mean,, 6944.3721, 0.9990
StdD,, 36.5527, 0.0006
%StdD,, 0.5264, 0.0567
%NonU,, 0.6002, 0.0646
Date/Time:,13-Oct-05 03:26:15 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W20
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4982.65,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,5074.22,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,5001.31,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4889.08,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,4828.33,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 5074.2232, 0.9996
Min,, 4828.3279, 0.9994
Range,, 245.8953, 0.0001
Mean,, 4955.1176, 0.9995
StdD,, 96.8437, 0.0001
%StdD,, 1.9544, 0.0058
%NonU,, 2.4812, 0.0074
Date/Time:,13-Oct-05 03:21:36 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W19
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4799.22,0.9984,51.211,70.500,10.244,28.172,1,4,1
,2,4933.04,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4897.51,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4788.64,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4665.64,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4933.0424, 0.9996
Min,, 4665.6381, 0.9984
Range,, 267.4043, 0.0012
Mean,, 4816.8113, 0.9993
StdD,, 104.8550, 0.0005
%StdD,, 2.1769, 0.0529
%NonU,, 2.7757, 0.0610
Date/Time:,13-Oct-05 03:19:28 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W11
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4895.12,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4995.00,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4957.57,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4873.74,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4792.13,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4994.9977, 0.9997
Min,, 4792.1328, 0.9993
Range,, 202.8649, 0.0003
Mean,, 4902.7115, 0.9995
StdD,, 78.5042, 0.0001
%StdD,, 1.6012, 0.0140
%NonU,, 2.0689, 0.0172
Date/Time:,13-Oct-05 03:18:07 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W14
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7090.23,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,6905.98,0.9989,51.110,-42.389,10.244,28.172,-3,4,2
,3,6958.33,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7007.20,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6946.14,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7090.2339, 0.9996
Min,, 6905.9816, 0.9989
Range,, 184.2523, 0.0006
Mean,, 6981.5771, 0.9994
StdD,, 70.6643, 0.0003
%StdD,, 1.0122, 0.0255
%NonU,, 1.3196, 0.0322
Date/Time:,13-Oct-05 03:17:02 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W9
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4732.45,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4830.78,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4748.41,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4661.84,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4591.16,0.9991,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4830.7797, 0.9997
Min,, 4591.1630, 0.9991
Range,, 239.6167, 0.0006
Mean,, 4712.9293, 0.9995
StdD,, 90.7822, 0.0002
%StdD,, 1.9262, 0.0229
%NonU,, 2.5421, 0.0307
Date/Time:,13-Oct-05 03:13:07 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W16
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4477.10,0.9984,51.211,70.500,10.244,28.172,1,4,1
,2,4656.52,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4754.69,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4546.61,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4497.23,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4754.6901, 0.9997
Min,, 4477.1031, 0.9984
Range,, 277.5870, 0.0013
Mean,, 4586.4297, 0.9993
StdD,, 116.9606, 0.0006
%StdD,, 2.5501, 0.0555
%NonU,, 3.0262, 0.0662
Date/Time:,13-Oct-05 03:08:32 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W9
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4732.19,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4830.44,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,4750.62,0.9987,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4664.21,0.9990,-51.215,70.612,10.244,28.172,1,-1,4
,5,4585.12,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4830.4370, 0.9995
Min,, 4585.1204, 0.9987
Range,, 245.3166, 0.0007
Mean,, 4712.5134, 0.9992
StdD,, 92.6110, 0.0003
%StdD,, 1.9652, 0.0316
%NonU,, 2.6028, 0.0366
Date/Time:,13-Oct-05 03:04:00 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W6
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4593.14,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4747.93,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4756.13,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4608.17,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4505.26,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4756.1259, 0.9997
Min,, 4505.2632, 0.9995
Range,, 250.8628, 0.0002
Mean,, 4642.1252, 0.9995
StdD,, 107.7899, 0.0001
%StdD,, 2.3220, 0.0085
%NonU,, 2.7020, 0.0101
Date/Time:,13-Oct-05 03:02:46 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W20
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7089.39,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,6903.56,0.9992,51.110,-42.389,10.244,28.172,-3,4,2
,3,6952.44,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7002.00,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6945.69,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7089.3857, 0.9996
Min,, 6903.5603, 0.9992
Range,, 185.8254, 0.0004
Mean,, 6978.6165, 0.9995
StdD,, 71.0976, 0.0002
%StdD,, 1.0188, 0.0164
%NonU,, 1.3314, 0.0197
Date/Time:,13-Oct-05 03:01:43 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W5
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4620.15,0.9983,51.211,70.500,10.244,28.172,1,4,1
,2,4721.74,0.9989,51.110,-42.389,10.244,28.172,-3,4,2
,3,4623.93,0.9980,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4547.73,0.9979,-51.215,70.612,10.244,28.172,1,-1,4
,5,4509.84,0.9988,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4721.7441, 0.9989
Min,, 4509.8399, 0.9979
Range,, 211.9042, 0.0009
Mean,, 4604.6790, 0.9984
StdD,, 81.4731, 0.0004
%StdD,, 1.7694, 0.0439
%NonU,, 2.3010, 0.0472
Date/Time:,13-Oct-05 03:00:38 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W19
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4975.88,0.9992,51.211,70.500,10.244,28.172,1,4,1
,2,5115.44,0.9991,51.110,-42.389,10.244,28.172,-3,4,2
,3,5060.50,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4959.40,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4849.39,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 5115.4426, 0.9995
Min,, 4849.3878, 0.9991
Range,, 266.0548, 0.0003
Mean,, 4992.1223, 0.9993
StdD,, 101.9683, 0.0001
%StdD,, 2.0426, 0.0134
%NonU,, 2.6647, 0.0174
Date/Time:,13-Oct-05 02:59:36 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W11
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7054.89,0.9991,51.211,70.500,10.244,28.172,1,4,1
,2,7041.35,0.9991,51.110,-42.389,10.244,28.172,-3,4,2
,3,7001.92,0.9991,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7034.00,0.9986,-51.215,70.612,10.244,28.172,1,-1,4
,5,7010.08,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7054.8871, 0.9994
Min,, 7001.9202, 0.9986
Range,, 52.9669, 0.0007
Mean,, 7028.4473, 0.9991
StdD,, 22.0074, 0.0003
%StdD,, 0.3131, 0.0258
%NonU,, 0.3768, 0.0352
Date/Time:,13-Oct-05 02:56:41 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W3
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4677.26,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,4770.18,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4681.42,0.9991,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4580.48,0.9983,-51.215,70.612,10.244,28.172,1,-1,4
,5,4497.50,0.9989,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4770.1761, 0.9995
Min,, 4497.5019, 0.9983
Range,, 272.6742, 0.0011
Mean,, 4641.3671, 0.9990
StdD,, 104.7488, 0.0004
%StdD,, 2.2569, 0.0437
%NonU,, 2.9374, 0.0559
Date/Time:,13-Oct-05 02:55:31 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W16
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7075.99,0.9992,51.211,70.500,10.244,28.172,1,4,1
,2,6896.73,0.9991,51.110,-42.389,10.244,28.172,-3,4,2
,3,6945.34,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,6997.48,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,6937.32,0.9986,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7075.9863, 0.9995
Min,, 6896.7316, 0.9986
Range,, 179.2547, 0.0009
Mean,, 6970.5716, 0.9992
StdD,, 68.9758, 0.0004
%StdD,, 0.9895, 0.0364
%NonU,, 1.2858, 0.0444
Date/Time:,13-Oct-05 02:54:25 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W9
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7053.79,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,7044.32,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,7000.15,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7036.57,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,7008.49,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7053.7908, 0.9996
Min,, 7000.1523, 0.9995
Range,, 53.6386, 0.0001
Mean,, 7028.6634, 0.9996
StdD,, 23.2325, 0.0001
%StdD,, 0.3305, 0.0060
%NonU,, 0.3816, 0.0072
Date/Time:,13-Oct-05 02:53:17 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W19
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4972.17,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,5112.21,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,5064.85,0.9990,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4957.66,0.9988,-51.215,70.612,10.244,28.172,1,-1,4
,5,4846.02,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 5112.2101, 0.9997
Min,, 4846.0214, 0.9988
Range,, 266.1888, 0.0009
Mean,, 4990.5823, 0.9993
StdD,, 103.2352, 0.0004
%StdD,, 2.0686, 0.0354
%NonU,, 2.6669, 0.0440
Date/Time:,13-Oct-05 02:52:01 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W6
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4696.54,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4837.19,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4864.84,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4707.88,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,4613.96,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4864.8383, 0.9996
Min,, 4613.9620, 0.9993
Range,, 250.8763, 0.0003
Mean,, 4744.0821, 0.9995
StdD,, 104.5855, 0.0001
%StdD,, 2.2045, 0.0110
%NonU,, 2.6441, 0.0133
Date/Time:,13-Oct-05 02:50:56 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W5
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4700.83,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4803.14,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,4706.39,0.9988,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4630.67,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,4603.31,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4803.1364, 0.9996
Min,, 4603.3121, 0.9988
Range,, 199.8243, 0.0009
Mean,, 4688.8685, 0.9993
StdD,, 77.8048, 0.0004
%StdD,, 1.6594, 0.0357
%NonU,, 2.1308, 0.0438
Date/Time:,13-Oct-05 02:49:30 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W2
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4708.36,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4838.81,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4864.81,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4700.98,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4600.99,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4864.8066, 0.9996
Min,, 4600.9921, 0.9995
Range,, 263.8144, 0.0002
Mean,, 4742.7903, 0.9995
StdD,, 108.5685, 0.0001
%StdD,, 2.2891, 0.0074
%NonU,, 2.7812, 0.0078
Date/Time:,13-Oct-05 02:47:08 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W3
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4746.05,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4842.35,0.9992,51.110,-42.389,10.244,28.172,-3,4,2
,3,4759.41,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4657.37,0.9991,-51.215,70.612,10.244,28.172,1,-1,4
,5,4582.20,0.9988,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4842.3479, 0.9996
Min,, 4582.1973, 0.9988
Range,, 260.1506, 0.0008
Mean,, 4717.4774, 0.9992
StdD,, 100.1014, 0.0003
%StdD,, 2.1219, 0.0276
%NonU,, 2.7573, 0.0381
Date/Time:,13-Oct-05 02:38:11 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W6
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4695.98,0.9989,51.211,70.500,10.244,28.172,1,4,1
,2,4839.61,0.9991,51.110,-42.389,10.244,28.172,-3,4,2
,3,4868.23,0.9977,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4711.00,0.9988,-51.215,70.612,10.244,28.172,1,-1,4
,5,4611.43,0.9985,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4868.2288, 0.9991
Min,, 4611.4281, 0.9977
Range,, 256.8007, 0.0013
Mean,, 4745.2499, 0.9986
StdD,, 106.6969, 0.0005
%StdD,, 2.2485, 0.0540
%NonU,, 2.7059, 0.0674
Date/Time:,13-Oct-05 02:33:26 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W5
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4701.78,0.9982,51.211,70.500,10.244,28.172,1,4,1
,2,4803.45,0.9989,51.110,-42.389,10.244,28.172,-3,4,2
,3,4715.10,0.9971,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4631.04,0.9980,-51.215,70.612,10.244,28.172,1,-1,4
,5,4602.02,0.9987,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4803.4527, 0.9989
Min,, 4602.0193, 0.9971
Range,, 201.4333, 0.0019
Mean,, 4690.6794, 0.9982
StdD,, 78.8266, 0.0007
%StdD,, 1.6805, 0.0732
%NonU,, 2.1472, 0.0932
Date/Time:,13-Oct-05 02:32:12 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W19
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7051.78,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,7041.67,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,6995.57,0.9989,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7034.36,0.9987,-51.215,70.612,10.244,28.172,1,-1,4
,5,7007.55,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7051.7768, 0.9996
Min,, 6995.5713, 0.9987
Range,, 56.2056, 0.0009
Mean,, 7026.1859, 0.9992
StdD,, 23.6957, 0.0004
%StdD,, 0.3372, 0.0360
%NonU,, 0.4000, 0.0428
Date/Time:,13-Oct-05 02:31:02 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.041
Wafer ID:,C1W2
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7019.32,0.9990,51.211,70.500,10.244,28.172,1,4,1
,2,6821.75,0.9988,51.110,-42.389,10.244,28.172,-3,4,2
,3,6876.83,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,6946.48,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,6837.18,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7019.3206, 0.9995
Min,, 6821.7538, 0.9988
Range,, 197.5668, 0.0007
Mean,, 6900.3153, 0.9992
StdD,, 82.1628, 0.0003
%StdD,, 1.1907, 0.0290
%NonU,, 1.4316, 0.0331
Date/Time:,13-Oct-05 02:28:54 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W4
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4613.91,0.9992,51.211,70.500,10.244,28.172,1,4,1
,2,4717.30,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4777.60,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4623.75,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4499.34,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4777.6006, 0.9996
Min,, 4499.3358, 0.9992
Range,, 278.2649, 0.0004
Mean,, 4646.3803, 0.9995
StdD,, 106.5786, 0.0002
%StdD,, 2.2938, 0.0176
%NonU,, 2.9944, 0.0221
Date/Time:,13-Oct-05 02:26:44 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W3
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4743.47,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4839.17,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4762.19,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4650.07,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4582.83,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4839.1716, 0.9997
Min,, 4582.8338, 0.9994
Range,, 256.3378, 0.0003
Mean,, 4715.5469, 0.9996
StdD,, 100.1738, 0.0001
%StdD,, 2.1243, 0.0108
%NonU,, 2.7180, 0.0149
Date/Time:,13-Oct-05 02:04:48 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W6
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7081.89,0.9990,51.211,70.500,10.244,28.172,1,4,1
,2,6906.94,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,6952.75,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,6999.96,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6939.85,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7081.8924, 0.9996
Min,, 6906.9391, 0.9990
Range,, 174.9533, 0.0005
Mean,, 6976.2783, 0.9994
StdD,, 67.8304, 0.0002
%StdD,, 0.9723, 0.0221
%NonU,, 1.2539, 0.0271
Date/Time:,13-Oct-05 02:03:46 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W5
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7045.88,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,7036.39,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,6993.98,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7032.54,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6991.66,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7045.8848, 0.9997
Min,, 6991.6576, 0.9994
Range,, 54.2272, 0.0003
Mean,, 7020.0891, 0.9996
StdD,, 25.3784, 0.0001
%StdD,, 0.3615, 0.0116
%NonU,, 0.3862, 0.0146
Date/Time:,13-Oct-05 02:02:26 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W4
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4780.00,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,4883.99,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4944.78,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4779.65,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4667.45,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4944.7795, 0.9997
Min,, 4667.4465, 0.9993
Range,, 277.3330, 0.0004
Mean,, 4811.1735, 0.9996
StdD,, 106.9765, 0.0001
%StdD,, 2.2235, 0.0146
%NonU,, 2.8822, 0.0199
Date/Time:,13-Oct-05 02:01:21 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W3
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4870.04,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,4978.83,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4899.31,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4794.85,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4743.09,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4978.8293, 0.9997
Min,, 4743.0934, 0.9993
Range,, 235.7359, 0.0004
Mean,, 4857.2251, 0.9996
StdD,, 91.7053, 0.0002
%StdD,, 1.8880, 0.0158
%NonU,, 2.4267, 0.0201
Date/Time:,13-Oct-05 01:50:30 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W4
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4779.85,0.9991,51.211,70.500,10.244,28.172,1,4,1
,2,4887.80,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4946.84,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4779.61,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4669.15,0.9992,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4946.8357, 0.9997
Min,, 4669.1541, 0.9991
Range,, 277.6815, 0.0006
Mean,, 4812.6501, 0.9994
StdD,, 107.7174, 0.0003
%StdD,, 2.2382, 0.0282
%NonU,, 2.8849, 0.0322
Date/Time:,13-Oct-05 01:47:07 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W3
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4869.40,0.9988,51.211,70.500,10.244,28.172,1,4,1
,2,4977.06,0.9992,51.110,-42.389,10.244,28.172,-3,4,2
,3,4897.65,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4796.49,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,4745.89,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4977.0632, 0.9994
Min,, 4745.8935, 0.9988
Range,, 231.1696, 0.0006
Mean,, 4857.2998, 0.9992
StdD,, 89.7596, 0.0003
%StdD,, 1.8479, 0.0255
%NonU,, 2.3796, 0.0317
Date/Time:,13-Oct-05 01:25:05 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W4
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7059.03,0.9982,51.211,70.500,10.244,28.172,1,4,1
,2,6880.13,0.9977,51.110,-42.389,10.244,28.172,-3,4,2
,3,6930.28,0.9987,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,6981.19,0.9980,-51.215,70.612,10.244,28.172,1,-1,4
,5,6910.53,0.9984,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7059.0329, 0.9987
Min,, 6880.1326, 0.9977
Range,, 178.9003, 0.0010
Mean,, 6952.2336, 0.9982
StdD,, 70.1136, 0.0004
%StdD,, 1.0085, 0.0375
%NonU,, 1.2866, 0.0490
Date/Time:,13-Oct-05 01:24:03 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,EF510005.001
Wafer ID:,C2W3
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7001.85,0.9990,51.211,70.500,10.244,28.172,1,4,1
,2,6983.96,0.9981,51.110,-42.389,10.244,28.172,-3,4,2
,3,6947.93,0.9985,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,6985.82,0.9990,-51.215,70.612,10.244,28.172,1,-1,4
,5,6940.02,0.9987,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7001.8495, 0.9990
Min,, 6940.0153, 0.9981
Range,, 61.8342, 0.0010
Mean,, 6971.9155, 0.9987
StdD,, 26.5857, 0.0004
%StdD,, 0.3813, 0.0406
%NonU,, 0.4435, 0.0484
Date/Time:,13-Oct-05 11:36:01 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W25
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4838.79,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4876.80,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4813.55,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4700.05,0.9992,-51.215,70.612,10.244,28.172,1,-1,4
,5,4661.21,0.9990,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4876.8011, 0.9997
Min,, 4661.2080, 0.9990
Range,, 215.5931, 0.0007
Mean,, 4778.0800, 0.9994
StdD,, 92.7871, 0.0003
%StdD,, 1.9419, 0.0290
%NonU,, 2.2561, 0.0360
Date/Time:,13-Oct-05 11:31:45 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W24
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4482.99,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,4725.06,0.9990,51.110,-42.389,10.244,28.172,-3,4,2
,3,4755.67,0.9980,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4581.31,0.9988,-51.215,70.612,10.244,28.172,1,-1,4
,5,4546.88,0.9984,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4755.6698, 0.9993
Min,, 4482.9897, 0.9980
Range,, 272.6801, 0.0013
Mean,, 4618.3822, 0.9987
StdD,, 117.3096, 0.0005
%StdD,, 2.5401, 0.0504
%NonU,, 2.9521, 0.0640
Date/Time:,13-Oct-05 11:26:47 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W23
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4820.33,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4866.50,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,4822.24,0.9984,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4688.36,0.9987,-51.215,70.612,10.244,28.172,1,-1,4
,5,4621.36,0.9982,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4866.5001, 0.9995
Min,, 4621.3649, 0.9982
Range,, 245.1352, 0.0013
Mean,, 4763.7575, 0.9988
StdD,, 103.8469, 0.0006
%StdD,, 2.1799, 0.0578
%NonU,, 2.5729, 0.0629
Date/Time:,13-Oct-05 11:21:51 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W20
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4591.15,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4802.23,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4858.38,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4657.58,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,4612.17,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4858.3793, 0.9997
Min,, 4591.1492, 0.9993
Range,, 267.2302, 0.0005
Mean,, 4704.3039, 0.9995
StdD,, 119.1682, 0.0002
%StdD,, 2.5332, 0.0223
%NonU,, 2.8403, 0.0236
Date/Time:,13-Oct-05 11:16:52 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W19
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4824.81,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4837.18,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4824.72,0.9992,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4665.23,0.9986,-51.215,70.612,10.244,28.172,1,-1,4
,5,4621.67,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4837.1773, 0.9996
Min,, 4621.6661, 0.9986
Range,, 215.5111, 0.0009
Mean,, 4754.7203, 0.9992
StdD,, 102.8637, 0.0004
%StdD,, 2.1634, 0.0366
%NonU,, 2.2663, 0.0467
Date/Time:,13-Oct-05 11:12:19 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W18
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4562.93,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4775.40,0.9991,51.110,-42.389,10.244,28.172,-3,4,2
,3,4822.20,0.9992,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4627.72,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4561.77,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4822.1987, 0.9997
Min,, 4561.7748, 0.9991
Range,, 260.4239, 0.0006
Mean,, 4670.0046, 0.9994
StdD,, 121.6960, 0.0002
%StdD,, 2.6059, 0.0247
%NonU,, 2.7883, 0.0323
Date/Time:,13-Oct-05 11:07:00 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W17
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4753.88,0.9989,51.211,70.500,10.244,28.172,1,4,1
,2,4800.15,0.9986,51.110,-42.389,10.244,28.172,-3,4,2
,3,4741.68,0.9984,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4635.23,0.9987,-51.215,70.612,10.244,28.172,1,-1,4
,5,4560.00,0.9981,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4800.1516, 0.9989
Min,, 4560.0038, 0.9981
Range,, 240.1478, 0.0008
Mean,, 4698.1890, 0.9986
StdD,, 98.0418, 0.0003
%StdD,, 2.0868, 0.0317
%NonU,, 2.5557, 0.0411
Date/Time:,13-Oct-05 11:02:03 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W16
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4593.22,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4809.09,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4863.74,0.9982,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4667.24,0.9989,-51.215,70.612,10.244,28.172,1,-1,4
,5,4639.30,0.9991,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4863.7388, 0.9995
Min,, 4593.2204, 0.9982
Range,, 270.5184, 0.0012
Mean,, 4714.5170, 0.9990
StdD,, 115.9942, 0.0005
%StdD,, 2.4604, 0.0490
%NonU,, 2.8690, 0.0618
Date/Time:,13-Oct-05 10:57:18 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W15
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4732.53,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4778.47,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4721.88,0.9991,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4600.68,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4511.19,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4778.4696, 0.9997
Min,, 4511.1924, 0.9991
Range,, 267.2772, 0.0006
Mean,, 4668.9498, 0.9995
StdD,, 109.9856, 0.0002
%StdD,, 2.3557, 0.0236
%NonU,, 2.8623, 0.0277
Date/Time:,13-Oct-05 10:52:11 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W14
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4625.00,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4798.14,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4860.09,0.9992,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4647.83,0.9990,-51.215,70.612,10.244,28.172,1,-1,4
,5,4661.72,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4860.0852, 0.9996
Min,, 4625.0014, 0.9990
Range,, 235.0838, 0.0006
Mean,, 4718.5532, 0.9993
StdD,, 104.1023, 0.0002
%StdD,, 2.2062, 0.0239
%NonU,, 2.4911, 0.0303
Date/Time:,13-Oct-05 10:47:17 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W13
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4810.41,0.9989,51.211,70.500,10.244,28.172,1,4,1
,2,4858.82,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4800.14,0.9984,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4722.06,0.9990,-51.215,70.612,10.244,28.172,1,-1,4
,5,4611.73,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4858.8159, 0.9996
Min,, 4611.7322, 0.9984
Range,, 247.0838, 0.0012
Mean,, 4760.6318, 0.9991
StdD,, 96.6156, 0.0005
%StdD,, 2.0295, 0.0462
%NonU,, 2.5951, 0.0578
Date/Time:,13-Oct-05 10:42:25 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W12
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4638.83,0.9991,51.211,70.500,10.244,28.172,1,4,1
,2,4777.82,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4815.63,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4600.51,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4570.53,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4815.6279, 0.9997
Min,, 4570.5291, 0.9991
Range,, 245.0988, 0.0005
Mean,, 4680.6633, 0.9995
StdD,, 109.4992, 0.0002
%StdD,, 2.3394, 0.0243
%NonU,, 2.6182, 0.0265
Date/Time:,13-Oct-05 10:37:27 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W11
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4836.13,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4850.98,0.9992,51.110,-42.389,10.244,28.172,-3,4,2
,3,4779.89,0.9988,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4716.93,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,4637.37,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4850.9768, 0.9995
Min,, 4637.3695, 0.9988
Range,, 213.6073, 0.0008
Mean,, 4764.2596, 0.9992
StdD,, 88.4174, 0.0003
%StdD,, 1.8558, 0.0283
%NonU,, 2.2418, 0.0382
Date/Time:,13-Oct-05 10:32:31 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W10
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4611.41,0.9979,51.211,70.500,10.244,28.172,1,4,1
,2,4818.65,0.9980,51.110,-42.389,10.244,28.172,-3,4,2
,3,4873.40,0.9982,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4640.65,0.9987,-51.215,70.612,10.244,28.172,1,-1,4
,5,4624.27,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4873.3973, 0.9993
Min,, 4611.4057, 0.9979
Range,, 261.9916, 0.0014
Mean,, 4713.6743, 0.9984
StdD,, 122.7974, 0.0006
%StdD,, 2.6051, 0.0581
%NonU,, 2.7791, 0.0687
Date/Time:,13-Oct-05 10:27:39 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W9
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4758.26,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4787.41,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4722.31,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4648.80,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4526.71,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4787.4076, 0.9997
Min,, 4526.7081, 0.9995
Range,, 260.6995, 0.0002
Mean,, 4688.6985, 0.9996
StdD,, 104.3372, 0.0001
%StdD,, 2.2253, 0.0098
%NonU,, 2.7801, 0.0115
Date/Time:,13-Oct-05 10:22:34 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W8
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4497.06,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4705.54,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4753.68,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4506.20,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,4481.09,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4753.6790, 0.9997
Min,, 4481.0890, 0.9993
Range,, 272.5900, 0.0004
Mean,, 4588.7137, 0.9995
StdD,, 130.0516, 0.0002
%StdD,, 2.8342, 0.0151
%NonU,, 2.9702, 0.0182
Date/Time:,13-Oct-05 10:21:32 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W7
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4777.95,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4848.08,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4760.18,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4677.80,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4551.12,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4848.0838, 0.9997
Min,, 4551.1182, 0.9994
Range,, 296.9656, 0.0002
Mean,, 4723.0269, 0.9995
StdD,, 113.6163, 0.0001
%StdD,, 2.4056, 0.0107
%NonU,, 3.1438, 0.0110
Date/Time:,13-Oct-05 10:16:07 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W6
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4663.62,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4821.95,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4858.58,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4727.90,0.9998,-51.215,70.612,10.244,28.172,1,-1,4
,5,4587.18,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4858.5839, 0.9998
Min,, 4587.1754, 0.9993
Range,, 271.4085, 0.0004
Mean,, 4731.8457, 0.9995
StdD,, 111.5596, 0.0002
%StdD,, 2.3576, 0.0187
%NonU,, 2.8679, 0.0211
Date/Time:,13-Oct-05 10:15:08 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W5
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4910.81,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4912.62,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4847.70,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4758.04,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4662.15,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4912.6205, 0.9997
Min,, 4662.1488, 0.9994
Range,, 250.4717, 0.0002
Mean,, 4818.2657, 0.9995
StdD,, 107.6264, 0.0001
%StdD,, 2.2337, 0.0097
%NonU,, 2.5992, 0.0119
Date/Time:,13-Oct-05 10:10:28 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W4
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4581.09,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4719.09,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4744.09,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4473.55,0.9989,-51.215,70.612,10.244,28.172,1,-1,4
,5,4511.32,0.9988,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4744.0876, 0.9996
Min,, 4473.5538, 0.9988
Range,, 270.5339, 0.0008
Mean,, 4605.8280, 0.9992
StdD,, 121.4338, 0.0004
%StdD,, 2.6365, 0.0370
%NonU,, 2.9369, 0.0406
Date/Time:,13-Oct-05 10:09:27 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W3
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4785.50,0.9984,51.211,70.500,10.244,28.172,1,4,1
,2,4820.26,0.9987,51.110,-42.389,10.244,28.172,-3,4,2
,3,4725.22,0.9985,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4686.17,0.9990,-51.215,70.612,10.244,28.172,1,-1,4
,5,4518.17,0.9987,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4820.2575, 0.9990
Min,, 4518.1724, 0.9984
Range,, 302.0851, 0.0006
Mean,, 4707.0638, 0.9987
StdD,, 117.6986, 0.0002
%StdD,, 2.5005, 0.0242
%NonU,, 3.2088, 0.0301
Date/Time:,13-Oct-05 10:04:37 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W2
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4597.35,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4810.77,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4839.13,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4600.21,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4558.86,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4839.1250, 0.9996
Min,, 4558.8604, 0.9995
Range,, 280.2646, 0.0002
Mean,, 4681.2648, 0.9996
StdD,, 132.5570, 0.0001
%StdD,, 2.8316, 0.0068
%NonU,, 2.9935, 0.0083
Date/Time:,13-Oct-05 10:03:33 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W1
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4727.01,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,4810.85,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4736.91,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4649.35,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,4504.78,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4810.8537, 0.9996
Min,, 4504.7755, 0.9993
Range,, 306.0782, 0.0003
Mean,, 4685.7801, 0.9995
StdD,, 116.2414, 0.0001
%StdD,, 2.4807, 0.0124
%NonU,, 3.2660, 0.0168
Date/Time:,13-Oct-05 09:43:14 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W25
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7125.22,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,6936.79,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,6985.98,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7041.16,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6975.83,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7125.2245, 0.9996
Min,, 6936.7923, 0.9995
Range,, 188.4322, 0.0002
Mean,, 7012.9973, 0.9996
StdD,, 72.9840, 0.0001
%StdD,, 1.0407, 0.0064
%NonU,, 1.3434, 0.0085
Date/Time:,13-Oct-05 09:42:12 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W24
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7080.61,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,7067.73,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,7028.31,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7064.41,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,7036.18,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7080.6113, 0.9996
Min,, 7028.3094, 0.9993
Range,, 52.3018, 0.0002
Mean,, 7055.4494, 0.9995
StdD,, 22.2038, 0.0001
%StdD,, 0.3147, 0.0105
%NonU,, 0.3706, 0.0125
Date/Time:,13-Oct-05 09:40:09 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W23
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7133.83,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,6946.40,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,6997.03,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7051.85,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,6979.61,0.9989,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7133.8283, 0.9996
Min,, 6946.4023, 0.9989
Range,, 187.4259, 0.0007
Mean,, 7021.7455, 0.9994
StdD,, 73.3685, 0.0003
%StdD,, 1.0449, 0.0289
%NonU,, 1.3346, 0.0340
Date/Time:,13-Oct-05 09:38:15 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W20
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7066.68,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,7050.94,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,7017.68,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7054.52,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,7023.39,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7066.6777, 0.9997
Min,, 7017.6784, 0.9996
Range,, 48.9993, 0.0002
Mean,, 7042.6400, 0.9996
StdD,, 21.1042, 0.0001
%StdD,, 0.2997, 0.0063
%NonU,, 0.3479, 0.0080
Date/Time:,13-Oct-05 09:37:13 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W19
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7144.35,0.9990,51.211,70.500,10.244,28.172,1,4,1
,2,6956.55,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,7007.89,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7060.90,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,6990.53,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7144.3511, 0.9995
Min,, 6956.5506, 0.9990
Range,, 187.8005, 0.0005
Mean,, 7032.0444, 0.9994
StdD,, 73.2314, 0.0002
%StdD,, 1.0414, 0.0203
%NonU,, 1.3353, 0.0253
Date/Time:,13-Oct-05 09:34:06 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W18
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7067.05,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,7055.41,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,7019.75,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7053.95,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,7023.86,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7067.0469, 0.9996
Min,, 7019.7534, 0.9995
Range,, 47.2936, 0.0001
Mean,, 7044.0043, 0.9996
StdD,, 20.9414, 0.0001
%StdD,, 0.2973, 0.0053
%NonU,, 0.3357, 0.0068
Date/Time:,13-Oct-05 09:33:04 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W17
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7121.38,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,6937.36,0.9991,51.110,-42.389,10.244,28.172,-3,4,2
,3,6982.19,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7037.32,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6969.57,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7121.3840, 0.9997
Min,, 6937.3631, 0.9991
Range,, 184.0209, 0.0006
Mean,, 7009.5653, 0.9995
StdD,, 72.1738, 0.0002
%StdD,, 1.0296, 0.0236
%NonU,, 1.3126, 0.0290
Date/Time:,13-Oct-05 09:32:03 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W16
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7075.21,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,7064.50,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,7023.98,0.9990,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7060.53,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,7028.69,0.9988,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7075.2147, 0.9995
Min,, 7023.9772, 0.9988
Range,, 51.2375, 0.0007
Mean,, 7050.5817, 0.9992
StdD,, 22.8374, 0.0003
%StdD,, 0.3239, 0.0305
%NonU,, 0.3634, 0.0326
Date/Time:,13-Oct-05 09:31:03 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W15
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7123.00,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,6937.77,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,6988.11,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7040.44,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6974.11,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7123.0033, 0.9996
Min,, 6937.7699, 0.9995
Range,, 185.2334, 0.0001
Mean,, 7012.6865, 0.9996
StdD,, 71.8404, 0.0000
%StdD,, 1.0244, 0.0049
%NonU,, 1.3207, 0.0059
Date/Time:,13-Oct-05 09:30:01 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W14
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7062.49,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,7051.90,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,7015.26,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7049.20,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,7025.62,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7062.4855, 0.9996
Min,, 7015.2575, 0.9995
Range,, 47.2281, 0.0001
Mean,, 7040.8933, 0.9996
StdD,, 19.6661, 0.0000
%StdD,, 0.2793, 0.0046
%NonU,, 0.3354, 0.0062
Date/Time:,13-Oct-05 09:28:59 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W13
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7121.48,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,6935.22,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,6978.88,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7038.36,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6970.05,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7121.4818, 0.9997
Min,, 6935.2249, 0.9994
Range,, 186.2569, 0.0003
Mean,, 7008.8006, 0.9996
StdD,, 73.1111, 0.0001
%StdD,, 1.0431, 0.0119
%NonU,, 1.3287, 0.0154
Date/Time:,13-Oct-05 09:27:54 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W12
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7060.50,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,7046.58,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,7009.96,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7043.53,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,7017.34,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7060.5017, 0.9997
Min,, 7009.9577, 0.9994
Range,, 50.5440, 0.0003
Mean,, 7035.5834, 0.9996
StdD,, 21.1806, 0.0001
%StdD,, 0.3010, 0.0135
%NonU,, 0.3592, 0.0167
Date/Time:,13-Oct-05 09:26:52 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W11
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7137.21,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,6946.94,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,6992.82,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7050.86,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,6979.24,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7137.2113, 0.9996
Min,, 6946.9445, 0.9994
Range,, 190.2668, 0.0002
Mean,, 7021.4146, 0.9995
StdD,, 74.8629, 0.0001
%StdD,, 1.0662, 0.0091
%NonU,, 1.3549, 0.0101
Date/Time:,13-Oct-05 09:25:47 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W10
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7073.32,0.9990,51.211,70.500,10.244,28.172,1,4,1
,2,7055.90,0.9983,51.110,-42.389,10.244,28.172,-3,4,2
,3,7025.64,0.9989,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7054.27,0.9989,-51.215,70.612,10.244,28.172,1,-1,4
,5,7025.64,0.9985,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7073.3172, 0.9990
Min,, 7025.6423, 0.9983
Range,, 47.6748, 0.0007
Mean,, 7046.9544, 0.9987
StdD,, 20.8378, 0.0003
%StdD,, 0.2957, 0.0296
%NonU,, 0.3383, 0.0352
Date/Time:,13-Oct-05 09:24:42 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W9
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7138.22,0.9973,51.211,70.500,10.244,28.172,1,4,1
,2,6950.76,0.9977,51.110,-42.389,10.244,28.172,-3,4,2
,3,7001.86,0.9986,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7050.05,0.9989,-51.215,70.612,10.244,28.172,1,-1,4
,5,6984.75,0.9992,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7138.2168, 0.9992
Min,, 6950.7618, 0.9973
Range,, 187.4549, 0.0019
Mean,, 7025.1267, 0.9983
StdD,, 72.6512, 0.0008
%StdD,, 1.0342, 0.0813
%NonU,, 1.3342, 0.0973
Date/Time:,13-Oct-05 09:23:38 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W8
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7085.36,0.9987,51.211,70.500,10.244,28.172,1,4,1
,2,7073.96,0.9987,51.110,-42.389,10.244,28.172,-3,4,2
,3,7034.28,0.9992,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7060.78,0.9992,-51.215,70.612,10.244,28.172,1,-1,4
,5,7038.47,0.9989,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7085.3592, 0.9992
Min,, 7034.2823, 0.9987
Range,, 51.0769, 0.0005
Mean,, 7058.5701, 0.9989
StdD,, 22.0979, 0.0003
%StdD,, 0.3131, 0.0255
%NonU,, 0.3618, 0.0259
Date/Time:,13-Oct-05 09:22:37 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W7
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7138.03,0.9986,51.211,70.500,10.244,28.172,1,4,1
,2,6950.27,0.9986,51.110,-42.389,10.244,28.172,-3,4,2
,3,6999.22,0.9988,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7053.84,0.9992,-51.215,70.612,10.244,28.172,1,-1,4
,5,6983.59,0.9988,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7138.0334, 0.9992
Min,, 6950.2702, 0.9986
Range,, 187.7632, 0.0006
Mean,, 7024.9909, 0.9988
StdD,, 73.4377, 0.0002
%StdD,, 1.0454, 0.0225
%NonU,, 1.3364, 0.0276
Date/Time:,13-Oct-05 09:21:35 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W6
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7065.18,0.9985,51.211,70.500,10.244,28.172,1,4,1
,2,7056.34,0.9984,51.110,-42.389,10.244,28.172,-3,4,2
,3,7017.37,0.9990,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7045.66,0.9987,-51.215,70.612,10.244,28.172,1,-1,4
,5,7019.97,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7065.1777, 0.9995
Min,, 7017.3746, 0.9984
Range,, 47.8031, 0.0011
Mean,, 7040.9059, 0.9988
StdD,, 21.4590, 0.0004
%StdD,, 0.3048, 0.0420
%NonU,, 0.3395, 0.0536
Date/Time:,13-Oct-05 09:20:33 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W5
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7149.09,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,6960.48,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,7011.58,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7067.21,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,6995.73,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7149.0897, 0.9997
Min,, 6960.4782, 0.9994
Range,, 188.6115, 0.0003
Mean,, 7036.8181, 0.9996
StdD,, 73.6224, 0.0001
%StdD,, 1.0462, 0.0108
%NonU,, 1.3402, 0.0132
Date/Time:,13-Oct-05 09:19:32 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W4
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7075.37,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,7068.19,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,7027.34,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7055.88,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,7032.05,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7075.3685, 0.9997
Min,, 7027.3416, 0.9995
Range,, 48.0270, 0.0003
Mean,, 7051.7676, 0.9996
StdD,, 21.3837, 0.0001
%StdD,, 0.3032, 0.0100
%NonU,, 0.3405, 0.0138
Date/Time:,13-Oct-05 09:18:30 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W3
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7144.54,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,6958.46,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,7004.64,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7053.07,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,6991.32,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7144.5387, 0.9996
Min,, 6958.4644, 0.9995
Range,, 186.0743, 0.0001
Mean,, 7030.4069, 0.9995
StdD,, 72.2964, 0.0000
%StdD,, 1.0283, 0.0044
%NonU,, 1.3234, 0.0049
Date/Time:,13-Oct-05 09:17:28 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W2
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7086.47,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,7076.39,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,7029.71,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7065.60,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,7038.01,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7086.4684, 0.9997
Min,, 7029.7050, 0.9994
Range,, 56.7634, 0.0002
Mean,, 7059.2338, 0.9996
StdD,, 24.4888, 0.0001
%StdD,, 0.3469, 0.0083
%NonU,, 0.4021, 0.0109
Date/Time:,13-Oct-05 09:16:03 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.001
Wafer ID:,C2W1
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7155.79,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,6971.29,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,7018.02,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7071.36,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,7004.40,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7155.7931, 0.9996
Min,, 6971.2919, 0.9994
Range,, 184.5012, 0.0002
Mean,, 7044.1730, 0.9995
StdD,, 72.0690, 0.0001
%StdD,, 1.0231, 0.0085
%NonU,, 1.3096, 0.0101
Date/Time:,12-Oct-05 01:20:02 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100069.011
Wafer ID:,C1W24
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4660.52,0.9998,51.211,70.500,10.244,28.172,1,4,1
,2,4850.80,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4887.59,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4655.93,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4646.49,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4887.5906, 0.9998
Min,, 4646.4949, 0.9995
Range,, 241.0956, 0.0003
Mean,, 4740.2655, 0.9996
StdD,, 118.5198, 0.0001
%StdD,, 2.5003, 0.0107
%NonU,, 2.5431, 0.0142
Date/Time:,12-Oct-05 01:13:27 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100069.011
Wafer ID:,C1W23
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4773.42,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4823.12,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4794.17,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4725.51,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4605.84,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4823.1226, 0.9997
Min,, 4605.8426, 0.9993
Range,, 217.2800, 0.0004
Mean,, 4744.4142, 0.9995
StdD,, 85.2519, 0.0002
%StdD,, 1.7969, 0.0172
%NonU,, 2.2899, 0.0224
Date/Time:,12-Oct-05 01:08:52 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100069.011
Wafer ID:,C1W22
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4638.91,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4846.28,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4915.69,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4698.63,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4626.49,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4915.6855, 0.9997
Min,, 4626.4922, 0.9993
Range,, 289.1933, 0.0003
Mean,, 4745.2014, 0.9995
StdD,, 129.2671, 0.0001
%StdD,, 2.7242, 0.0127
%NonU,, 3.0472, 0.0160
Date/Time:,12-Oct-05 01:03:32 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100069.011
Wafer ID:,C1W21
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4713.43,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4771.13,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4723.66,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4678.83,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4541.42,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4771.1343, 0.9997
Min,, 4541.4180, 0.9995
Range,, 229.7163, 0.0002
Mean,, 4685.6940, 0.9996
StdD,, 87.1399, 0.0001
%StdD,, 1.8597, 0.0073
%NonU,, 2.4513, 0.0087
Date/Time:,12-Oct-05 12:57:48 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.011
Wafer ID:,C2W24
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4704.71,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,4830.57,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4910.27,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4726.78,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4642.82,0.9998,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4910.2745, 0.9998
Min,, 4642.8193, 0.9995
Range,, 267.4551, 0.0003
Mean,, 4763.0295, 0.9996
StdD,, 106.5458, 0.0001
%StdD,, 2.2369, 0.0122
%NonU,, 2.8076, 0.0159
Date/Time:,12-Oct-05 12:54:10 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.011
Wafer ID:,C2W23
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4738.30,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4888.61,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4834.33,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4699.22,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4678.86,0.9998,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4888.6149, 0.9998
Min,, 4678.8635, 0.9996
Range,, 209.7514, 0.0002
Mean,, 4767.8646, 0.9997
StdD,, 90.1462, 0.0001
%StdD,, 1.8907, 0.0074
%NonU,, 2.1996, 0.0097
Date/Time:,12-Oct-05 12:49:05 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.011
Wafer ID:,C2W22
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4603.32,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4825.43,0.9998,51.110,-42.389,10.244,28.172,-3,4,2
,3,4865.69,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4689.91,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4623.12,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4865.6864, 0.9998
Min,, 4603.3188, 0.9993
Range,, 262.3676, 0.0005
Mean,, 4721.4916, 0.9996
StdD,, 118.5694, 0.0002
%StdD,, 2.5113, 0.0197
%NonU,, 2.7784, 0.0243
Date/Time:,12-Oct-05 12:47:41 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100069.011
Wafer ID:,C1W24
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7077.54,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,7065.22,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,7025.91,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7057.20,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,7028.14,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7077.5445, 0.9996
Min,, 7025.9079, 0.9996
Range,, 51.6367, 0.0001
Mean,, 7050.8015, 0.9996
StdD,, 22.8972, 0.0000
%StdD,, 0.3247, 0.0029
%NonU,, 0.3662, 0.0033
Date/Time:,12-Oct-05 12:46:41 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100069.011
Wafer ID:,C1W23
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7078.60,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,6900.41,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,6951.07,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7000.13,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,6938.09,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7078.6034, 0.9997
Min,, 6900.4130, 0.9995
Range,, 178.1903, 0.0001
Mean,, 6973.6606, 0.9996
StdD,, 68.6552, 0.0001
%StdD,, 0.9845, 0.0071
%NonU,, 1.2776, 0.0071
Date/Time:,12-Oct-05 12:45:42 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100069.011
Wafer ID:,C1W22
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7079.18,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,7069.01,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,7022.97,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7057.94,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,7030.90,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7079.1777, 0.9996
Min,, 7022.9701, 0.9994
Range,, 56.2076, 0.0003
Mean,, 7051.9989, 0.9995
StdD,, 24.2452, 0.0001
%StdD,, 0.3438, 0.0111
%NonU,, 0.3985, 0.0145
Date/Time:,12-Oct-05 12:44:38 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.011
Wafer ID:,C2W21
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4785.65,0.9998,51.211,70.500,10.244,28.172,1,4,1
,2,4902.41,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4820.56,0.9994,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4666.54,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4620.39,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4902.4071, 0.9998
Min,, 4620.3927, 0.9994
Range,, 282.0145, 0.0004
Mean,, 4759.1101, 0.9996
StdD,, 114.9206, 0.0001
%StdD,, 2.4148, 0.0142
%NonU,, 2.9629, 0.0191
Date/Time:,12-Oct-05 12:43:19 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100069.011
Wafer ID:,C1W21
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7106.94,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,6922.76,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,6975.14,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7026.11,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,6959.11,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7106.9438, 0.9996
Min,, 6922.7590, 0.9994
Range,, 184.1848, 0.0002
Mean,, 6998.0135, 0.9995
StdD,, 71.3353, 0.0001
%StdD,, 1.0194, 0.0088
%NonU,, 1.3160, 0.0115
Date/Time:,12-Oct-05 12:26:03 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.011
Wafer ID:,C2W24
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7096.84,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,6906.51,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,6960.00,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7010.00,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6944.07,0.9993,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7096.8402, 0.9996
Min,, 6906.5120, 0.9993
Range,, 190.3282, 0.0003
Mean,, 6983.4856, 0.9995
StdD,, 73.4549, 0.0001
%StdD,, 1.0518, 0.0106
%NonU,, 1.3627, 0.0127
Date/Time:,12-Oct-05 12:25:01 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.011
Wafer ID:,C2W23
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7083.89,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,7065.99,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,7028.17,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7041.00,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,7031.88,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7083.8929, 0.9996
Min,, 7028.1653, 0.9995
Range,, 55.7276, 0.0001
Mean,, 7050.1838, 0.9996
StdD,, 23.9289, 0.0000
%StdD,, 0.3394, 0.0049
%NonU,, 0.3952, 0.0064
Date/Time:,12-Oct-05 12:23:57 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.011
Wafer ID:,C2W22
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7088.93,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,6908.31,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,6955.80,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7012.47,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6943.76,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7088.9320, 0.9997
Min,, 6908.3052, 0.9995
Range,, 180.6267, 0.0002
Mean,, 6981.8545, 0.9996
StdD,, 70.6077, 0.0001
%StdD,, 1.0113, 0.0080
%NonU,, 1.2935, 0.0096
Date/Time:,12-Oct-05 12:22:42 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100067.011
Wafer ID:,C2W21
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7068.98,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,7063.90,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,7013.37,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7054.77,0.9994,-51.215,70.612,10.244,28.172,1,-1,4
,5,7022.70,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7068.9773, 0.9996
Min,, 7013.3655, 0.9994
Range,, 55.6118, 0.0002
Mean,, 7044.7405, 0.9995
StdD,, 25.1262, 0.0001
%StdD,, 0.3567, 0.0095
%NonU,, 0.3947, 0.0120
Date/Time:,11-Oct-05 10:26:11 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,No Lot ID
Wafer ID:,C1W22
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4641.42,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4830.88,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4889.25,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4756.23,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4559.87,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4889.2470, 0.9997
Min,, 4559.8706, 0.9996
Range,, 329.3765, 0.0001
Mean,, 4735.5301, 0.9996
StdD,, 134.9659, 0.0000
%StdD,, 2.8501, 0.0037
%NonU,, 3.4777, 0.0052
Date/Time:,11-Oct-05 10:25:12 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,No Lot ID
Wafer ID:,C1W21
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4836.47,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4914.16,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4829.22,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4745.55,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4635.80,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4914.1618, 0.9997
Min,, 4635.7975, 0.9995
Range,, 278.3643, 0.0002
Mean,, 4792.2404, 0.9996
StdD,, 105.8804, 0.0001
%StdD,, 2.2094, 0.0064
%NonU,, 2.9043, 0.0080
Date/Time:,11-Oct-05 09:24:17 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.011
Wafer ID:,C1W22
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7089.20,0.9990,51.211,70.500,10.244,28.172,1,4,1
,2,7078.11,0.9991,51.110,-42.389,10.244,28.172,-3,4,2
,3,7035.40,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7074.63,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,7041.62,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7089.2030, 0.9996
Min,, 7035.4008, 0.9990
Range,, 53.8022, 0.0006
Mean,, 7063.7933, 0.9993
StdD,, 23.7990, 0.0003
%StdD,, 0.3369, 0.0260
%NonU,, 0.3808, 0.0290
Date/Time:,11-Oct-05 09:23:18 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100056.011
Wafer ID:,C1W21
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7127.26,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,6952.34,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,7003.32,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7056.41,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6985.72,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7127.2601, 0.9996
Min,, 6952.3407, 0.9995
Range,, 174.9194, 0.0001
Mean,, 7025.0100, 0.9996
StdD,, 68.4393, 0.0000
%StdD,, 0.9742, 0.0034
%NonU,, 1.2450, 0.0040
Date/Time:,11-Oct-05 09:12:47 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.011
Wafer ID:,C3W24
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4612.41,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,4742.89,0.9990,51.110,-42.389,10.244,28.172,-3,4,2
,3,4812.01,0.9991,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4648.01,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,4527.17,0.9991,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4812.0083, 0.9997
Min,, 4527.1687, 0.9990
Range,, 284.8396, 0.0007
Mean,, 4668.4965, 0.9992
StdD,, 111.4331, 0.0003
%StdD,, 2.3869, 0.0271
%NonU,, 3.0507, 0.0330
Date/Time:,11-Oct-05 09:08:04 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.011
Wafer ID:,C3W23
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4479.53,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,4587.04,0.9992,51.110,-42.389,10.244,28.172,-3,4,2
,3,4486.66,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4343.98,0.9988,-51.215,70.612,10.244,28.172,1,-1,4
,5,4312.20,0.9989,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4587.0362, 0.9995
Min,, 4312.2009, 0.9988
Range,, 274.8353, 0.0007
Mean,, 4441.8808, 0.9992
StdD,, 112.7988, 0.0003
%StdD,, 2.5394, 0.0294
%NonU,, 3.0937, 0.0369
Date/Time:,11-Oct-05 08:58:31 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.011
Wafer ID:,C3W24
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7134.46,0.9990,51.211,70.500,10.244,28.172,1,4,1
,2,6952.45,0.9988,51.110,-42.389,10.244,28.172,-3,4,2
,3,6999.19,0.9991,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7055.43,0.9990,-51.215,70.612,10.244,28.172,1,-1,4
,5,6985.74,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7134.4644, 0.9995
Min,, 6952.4494, 0.9988
Range,, 182.0150, 0.0007
Mean,, 7025.4542, 0.9991
StdD,, 71.3763, 0.0003
%StdD,, 1.0160, 0.0260
%NonU,, 1.2954, 0.0345
Date/Time:,11-Oct-05 08:55:48 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,P5100055.011
Wafer ID:,C3W23
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7090.86,0.9992,51.211,70.500,10.244,28.172,1,4,1
,2,7080.21,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,7038.99,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7074.45,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,7043.41,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7090.8558, 0.9995
Min,, 7038.9921, 0.9992
Range,, 51.8637, 0.0003
Mean,, 7065.5824, 0.9994
StdD,, 23.0767, 0.0001
%StdD,, 0.3266, 0.0139
%NonU,, 0.3670, 0.0175
Date/Time:,09-Oct-05 03:25:57 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,ES508005.001
Wafer ID:,C2W22
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4723.07,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4854.92,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4788.07,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4620.05,0.9997,-51.215,70.612,10.244,28.172,1,-1,4
,5,4619.20,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4854.9214, 0.9997
Min,, 4619.1981, 0.9994
Range,, 235.7233, 0.0003
Mean,, 4721.0624, 0.9995
StdD,, 103.6716, 0.0001
%StdD,, 2.1959, 0.0136
%NonU,, 2.4965, 0.0160
Date/Time:,09-Oct-05 03:21:41 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,ES508005.001
Wafer ID:,C2W21
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,5134.48,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,5142.22,0.9993,51.110,-42.389,10.244,28.172,-3,4,2
,3,5117.29,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4976.91,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,4937.94,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 5142.2151, 0.9996
Min,, 4937.9417, 0.9993
Range,, 204.2734, 0.0003
Mean,, 5061.7681, 0.9995
StdD,, 96.6629, 0.0001
%StdD,, 1.9097, 0.0110
%NonU,, 2.0178, 0.0150
Date/Time:,09-Oct-05 03:17:21 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,ES508005.001
Wafer ID:,C2W20
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4754.82,0.9994,51.211,70.500,10.244,28.172,1,4,1
,2,4952.84,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,4837.46,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4769.64,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,4692.85,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4952.8445, 0.9996
Min,, 4692.8513, 0.9993
Range,, 259.9933, 0.0003
Mean,, 4801.5251, 0.9994
StdD,, 98.9907, 0.0001
%StdD,, 2.0617, 0.0134
%NonU,, 2.7074, 0.0151
Date/Time:,09-Oct-05 03:04:17 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,ES508005.001
Wafer ID:,C2W22
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7005.26,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,6983.74,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,6947.42,0.9996,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,6993.08,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,6936.95,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7005.2580, 0.9996
Min,, 6936.9541, 0.9995
Range,, 68.3040, 0.0001
Mean,, 6973.2902, 0.9995
StdD,, 29.6321, 0.0000
%StdD,, 0.4249, 0.0044
%NonU,, 0.4898, 0.0061
Date/Time:,09-Oct-05 03:02:56 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,ES508005.001
Wafer ID:,C2W21
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7012.43,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,6818.77,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,6866.98,0.9992,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,6942.84,0.9995,-51.215,70.612,10.244,28.172,1,-1,4
,5,6836.31,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7012.4320, 0.9996
Min,, 6818.7711, 0.9992
Range,, 193.6609, 0.0003
Mean,, 6895.4652, 0.9994
StdD,, 80.8065, 0.0002
%StdD,, 1.1719, 0.0152
%NonU,, 1.4043, 0.0173
Date/Time:,09-Oct-05 03:01:15 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,ES508005.001
Wafer ID:,C2W20
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,6938.10,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,6910.75,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,6872.65,0.9993,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,6926.99,0.9992,-51.215,70.612,10.244,28.172,1,-1,4
,5,6860.62,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 6938.0992, 0.9996
Min,, 6860.6159, 0.9992
Range,, 77.4833, 0.0004
Mean,, 6901.8202, 0.9994
StdD,, 33.8306, 0.0001
%StdD,, 0.4902, 0.0144
%NonU,, 0.5613, 0.0183
Date/Time:,08-Oct-05 01:02:05 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,ES508005.001
Wafer ID:,C2W25
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,5009.34,0.9988,51.211,70.500,10.244,28.172,1,4,1
,2,5057.89,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,5024.30,0.9989,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4954.41,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,4820.11,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 5057.8866, 0.9997
Min,, 4820.1132, 0.9988
Range,, 237.7734, 0.0009
Mean,, 4973.2088, 0.9992
StdD,, 93.3773, 0.0004
%StdD,, 1.8776, 0.0383
%NonU,, 2.3905, 0.0434
Date/Time:,08-Oct-05 12:45:10 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,ES508005.001
Wafer ID:,C2W25
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7086.94,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,6900.93,0.9994,51.110,-42.389,10.244,28.172,-3,4,2
,3,6946.52,0.9995,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7010.26,0.9993,-51.215,70.612,10.244,28.172,1,-1,4
,5,6937.55,0.9996,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7086.9428, 0.9996
Min,, 6900.9295, 0.9993
Range,, 186.0133, 0.0002
Mean,, 6976.4400, 0.9995
StdD,, 73.2525, 0.0001
%StdD,, 1.0500, 0.0091
%NonU,, 1.3332, 0.0119
Date/Time:,08-Oct-05 12:41:28 AM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,ES508005.001
Wafer ID:,C2W24
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4938.80,0.9997,51.211,70.500,10.244,28.172,1,4,1
,2,5029.90,0.9997,51.110,-42.389,10.244,28.172,-3,4,2
,3,4952.03,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,5063.46,0.8401,-51.215,70.612,10.244,28.172,1,-1,4
,5,4771.33,0.9997,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 5063.4575, 0.9997
Min,, 4771.3345, 0.8401
Range,, 292.1230, 0.1596
Mean,, 4951.1043, 0.9678
StdD,, 113.2490, 0.0714
%StdD,, 2.2873, 7.3745
%NonU,, 2.9501, 8.2465
Date/Time:,07-Oct-05 11:39:10 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,ES508005.001
Wafer ID:,C2W24
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7037.24,0.9993,51.211,70.500,10.244,28.172,1,4,1
,2,7025.61,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,6976.21,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,7013.47,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6979.68,0.9995,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7037.2438, 0.9997
Min,, 6976.2142, 0.9993
Range,, 61.0296, 0.0004
Mean,, 7006.4446, 0.9995
StdD,, 27.3655, 0.0002
%StdD,, 0.3906, 0.0162
%NonU,, 0.4355, 0.0223
Date/Time:,07-Oct-05 11:07:45 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,ES508005.001
Wafer ID:,C2W23
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,4903.72,0.9996,51.211,70.500,10.244,28.172,1,4,1
,2,4962.63,0.9995,51.110,-42.389,10.244,28.172,-3,4,2
,3,4893.32,0.9997,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,4799.27,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,4685.60,0.9998,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 4962.6280, 0.9998
Min,, 4685.5993, 0.9995
Range,, 277.0287, 0.0003
Mean,, 4848.9063, 0.9996
StdD,, 108.4467, 0.0001
%StdD,, 2.2365, 0.0109
%NonU,, 2.8566, 0.0144
Date/Time:,07-Oct-05 10:42:21 PM
Film name:,HDP Oxide
Stage group:,In-die Grp #1
Lot ID:,ES508005.001
Wafer ID:,C2W23
Title:,Point#,Thick1 (?,GOF,X(mm),Y(mm),Die X(mm),Die Y(mm),DieRow,DieCol,DieNum
,1,7066.52,0.9995,51.211,70.500,10.244,28.172,1,4,1
,2,6870.64,0.9996,51.110,-42.389,10.244,28.172,-3,4,2
,3,6916.46,0.9992,-51.343,-42.296,10.244,28.172,-3,-1,3
,4,6977.77,0.9996,-51.215,70.612,10.244,28.172,1,-1,4
,5,6907.09,0.9994,-10.328,14.142,10.244,28.172,-1,1,5
Max,, 7066.5243, 0.9996
Min,, 6870.6416, 0.9992
Range,, 195.8827, 0.0004
Mean,, 6947.6967, 0.9995
StdD,, 76.7901, 0.0002
%StdD,, 1.1053, 0.0161
%NonU,, 1.4097, 0.0208
Max,7155.7931,0.9998
Min,4268.5813,0.8401
Range,2887.2118,0.1597
Mean,5723.1688,0.9992
StdD,1153.0016,0.0045
%StdD,20.1462,0.4525
%NonU,25.2239,7.9906